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1.发明授权Guided self-assembly of block copolymer line structures for integrated circuit interconnects 有权用于集成电路互连的嵌段共聚物线结构的引导自组装公开(公告)号：US08309278B2
公开(公告)日：2012-11-13
申请号：US12885051
申请日：2010-09-17
IPC分类号： G03F1/50 , H01L21/31 , H01L21/469
CPC分类号： G03F7/40 , B81C1/00031 , B81C2201/0149 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10T428/24669
摘要： Complex self-assembled patterns can be created using a sparse template and local changes to the shape or distribution of the posts of the template to direct pattern generation of block copolymer. The post spacing in the template is formed commensurate with the equilibrium periodicity of the block copolymer, which controls the orientation of the linear features. Further, the posts can be arranged such that the template occupies only a few percent of the area of the final self-assembled patterns. Local aperiodic features can be introduced by changing the period or motif of the lattice or by adding guiding posts. According to one embodiment, an array of carefully spaced and shaped posts, prepared by electron-beam patterning of an inorganic resist, can be used to template complex patterns in a cylindrical-morphology block copolymer. These complex self-assembled patterns can form a mask used in fabrication processes of arbitrary structures such as interconnect layouts.
摘要翻译： 可以使用稀疏模板创建复杂的自组装图案，并且对模板的柱的形状或分布进行局部变化以引导嵌段共聚物的图案生成。 模板中的柱间距与嵌段共聚物的平衡周期相一致，嵌段共聚物控制线性特征的取向。 此外，柱可以被布置成使得模板仅占最终自组装图案的面积的百分之几。 可以通过改变晶格的周期或图案或添加引导柱来引入局部非周期特征。 根据一个实施例，可以使用通过无机抗蚀剂的电子束图案化制备的仔细间隔和形状的柱的阵列来模制圆柱形形态嵌段共聚物中的复杂图案。 这些复杂的自组装图案可以形成用于诸如互连布局的任意结构的制造工艺中的掩模。
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2.发明申请GUIDED SELF-ASSEMBLY OF BLOCK COPOLYMER LINE STRUCTURES FOR INTEGRATED CIRCUIT INTERCONNECTS 有权用于集成电路互连的块状共聚物线结构的指导自组装公开(公告)号：US20120009390A1
公开(公告)日：2012-01-12
申请号：US12885051
申请日：2010-09-17
CPC分类号： G03F7/40 , B81C1/00031 , B81C2201/0149 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10T428/24669
摘要： Complex self-assembled patterns can be created using a sparse template and local changes to the shape or distribution of the posts of the template to direct pattern generation of block copolymer. The post spacing in the template is formed commensurate with the equilibrium periodicity of the block copolymer, which controls the orientation of the linear features. Further, the posts can be arranged such that the template occupies only a few percent of the area of the final self-assembled patterns. Local aperiodic features can be introduced by changing the period or motif of the lattice or by adding guiding posts. According to one embodiment, an array of carefully spaced and shaped posts, prepared by electron-beam patterning of an inorganic resist, can be used to template complex patterns in a cylindrical-morphology block copolymer. These complex self-assembled patterns can form a mask used in fabrication processes of arbitrary structures such as interconnect layouts.
摘要翻译： 可以使用稀疏模板创建复杂的自组装图案，并且对模板的柱的形状或分布进行局部变化以引导嵌段共聚物的图案生成。 模板中的柱间距与嵌段共聚物的平衡周期相一致，嵌段共聚物控制线性特征的取向。 此外，柱可以被布置成使得模板仅占最终自组装图案的面积的百分之几。 可以通过改变晶格的周期或图案或添加引导柱来引入局部非周期特征。 根据一个实施例，可以使用通过无机抗蚀剂的电子束图案化制备的仔细间隔和形状的柱的阵列来模制圆柱形形态嵌段共聚物中的复杂图案。 这些复杂的自组装图案可以形成用于诸如互连布局的任意结构的制造工艺中的掩模。
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公开(公告)号：US07638751B2
公开(公告)日：2009-12-29
申请号：US12118187
申请日：2008-05-09
CPC分类号： G01J1/4228 , G01J1/02 , G01J1/0209 , H01L39/10
摘要： A multi-element optical detector includes a plurality of optical detector elements capable of producing an output signal having information about the state of an incident electromagnetic radiation as a function of time. An active region includes a photosensitive region of one of the optical detector elements separated in part or in whole from the photosensitive region of at least one other optical detector element by a distance less than the wavelength of the electromagnetic radiation that the optical detector elements are being used to detect.
摘要翻译： 多元光学检测器包括多个光学检测器元件，其能够产生具有关于作为时间的函数的入射电磁辐射的状态的信息的输出信号。 有源区包括光检测器元件中的一个的光敏区域，其部分或全部与至少一个其它光学检测器元件的感光区域分开的距离小于光学检测器元件的电磁辐射的波长 用于检测。
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