Wafer drying apparatus
    1.
    发明授权
    Wafer drying apparatus 失效
    晶圆烘干设备

    公开(公告)号:US07343922B2

    公开(公告)日:2008-03-18

    申请号:US11103802

    申请日:2005-04-12

    CPC classification number: H01L21/67034 Y10S134/902

    Abstract: A wafer drying method includes submerging a wafer in a cleaning solution in a dry chamber. An organic liquid vapor from an organic liquid is supplied into the dry chamber at a first volumetric supply rate to form an organic liquid layer on a surface of the cleaning solution, the organic liquid layer having at least a prescribed concentration of the organic liquid. The organic liquid vapor is supplied into the dry chamber at a second volumetric supply rate that is lower than the first volumetric supply rate. During and/or following the supplying of the organic liquid vapor into the dry chamber, at least a portion of the wafer is removed from the cleaning solution through the organic liquid layer.

    Abstract translation: 晶片干燥方法包括将晶片浸没在干燥室中的清洁溶液中。 来自有机液体的有机液体蒸气以第一体积供应速率供应到干燥室中,以在清洁溶液的表面上形成有机液体层,有机液体层至少具有规定浓度的有机液体。 有机液体蒸气以低于第一体积供应速率的第二体积供应速率供应到干燥室中。 在将有机液体蒸气供应到干燥室中和/或之后,晶片的至少一部分通过有机液体层从清洗溶液中除去。

    Polarization switching device, driver of polarization switching device, and method of driving the same
    3.
    发明授权
    Polarization switching device, driver of polarization switching device, and method of driving the same 有权
    极化开关装置,极化开关装置的驱动器及其驱动方法

    公开(公告)号:US09313483B2

    公开(公告)日:2016-04-12

    申请号:US13480256

    申请日:2012-05-24

    CPC classification number: H04N13/337 G09G3/003 G09G3/36 H04N13/315

    Abstract: A polarization switching device includes a lower panel; an upper panel facing the lower panel; a liquid crystal layer disposed between the lower panel and the upper panel; and a driver to apply a first driving voltage and a second driving voltage to the lower panel and the upper panel, respectively, the first driving voltage to transition among a center voltage, a first voltage and a second voltage. The first voltage and the second voltage have the same difference in value from the center voltage. The driver includes a voltage changing unit to generate the first voltage and the second voltage based on a digital data input to a first digital-analog converter.

    Abstract translation: 偏振切换装置包括下面板; 面向下面板的上面板; 设置在下板和上板之间的液晶层; 以及驱动器,分别将第一驱动电压和第二驱动电压施加到下面板和上面板,使第一驱动电压在中心电压,第一电压和第二电压之间转换。 第一电压和第二电压的值与中心电压具有相同的差值。 驱动器包括电压改变单元,用于基于输入到第一数模转换器的数字数据产生第一电压和第二电压。

    Liquid crystal display
    4.
    发明授权
    Liquid crystal display 有权
    液晶显示器

    公开(公告)号:US09291868B2

    公开(公告)日:2016-03-22

    申请号:US13242875

    申请日:2011-09-23

    CPC classification number: G02F1/1362 G02F1/13624 G02F1/136286 H01L29/41733

    Abstract: A liquid crystal display includes a plurality of pixels arranged in a matrix, each pixel having a first sub-pixel electrode and a second sub-pixel electrode. A first thin film transistor is connected to the first sub-pixel electrode. A second thin film transistor is connected to the second sub-pixel electrode. A third thin film transistor is connected to the second sub-pixel electrode. A fourth thin film transistor is connected to a drain electrode of the third thin film transistor. A first gate line is connected to the first thin film transistor and the second thin film transistor. A data line is connected to the first thin film transistor and the second thin film transistor. A second gate line is connected to the third thin film transistor. A third gate line is connected to the fourth thin film transistor.

    Abstract translation: 液晶显示器包括以矩阵排列的多个像素,每个像素具有第一子像素电极和第二子像素电极。 第一薄膜晶体管连接到第一子像素电极。 第二薄膜晶体管连接到第二子像素电极。 第三薄膜晶体管连接到第二子像素电极。 第四薄膜晶体管连接到第三薄膜晶体管的漏电极。 第一栅极线连接到第一薄膜晶体管和第二薄膜晶体管。 数据线连接到第一薄膜晶体管和第二薄膜晶体管。 第二栅极线连接到第三薄膜晶体管。 第三栅极线连接到第四薄膜晶体管。

    Display device and driving method thereof
    5.
    发明授权
    Display device and driving method thereof 有权
    显示装置及其驱动方法

    公开(公告)号:US09053661B2

    公开(公告)日:2015-06-09

    申请号:US13102076

    申请日:2011-05-06

    CPC classification number: G09G3/20 G09G3/3266 G09G3/3677 G09G2310/0267

    Abstract: A gate-off voltage generator provides a gate-off voltage to a gate line of a display panel. The gate-off voltage generator includes a transistor having a base terminal, a collector terminal, and an emitter terminal, the emitter terminal configured to output the gate-off voltage to the gate line. A controller is connected to the base terminal. A feedback circuit is connected between the gate line and the controller, the feedback circuit configured to provide to the controller a feedback voltage based upon the gate-off voltage outputted from the emitter terminal. The gate-off voltage from the emitter terminal is compared with a desired gate-off voltage in the controller and the voltage at the base terminal is controlled by the controller to provide the desired gate-off voltage to gate line.

    Abstract translation: 栅极截止电压发生器向显示面板的栅极线提供栅极截止电压。 栅极截止电压发生器包括具有基极端子,集电极端子和发射极端子的晶体管,发射极端子被配置为将栅极截止电压输出到栅极线。 控制器连接到基本终端。 反馈电路连接在栅极线和控制器之间,反馈电路被配置为基于从发射极端子输出的栅极截止电压向控制器提供反馈电压。 将来自发射极端子的栅极截止电压与控制器中的期望栅极截止电压进行比较,并且由控制器控制基极端子处的电压,以向栅极线提供所需的栅极截止电压。

    Power source circuit having a protector to control an operation of a voltage generator and display apparatus having the same
    6.
    发明授权
    Power source circuit having a protector to control an operation of a voltage generator and display apparatus having the same 有权
    电源电路具有用于控制电压发生器和具有该电压发生器的显示装置的操作的保护器

    公开(公告)号:US08736593B2

    公开(公告)日:2014-05-27

    申请号:US12899848

    申请日:2010-10-07

    Abstract: A power source circuit of a display apparatus includes a voltage divider, an operational amplifier, a first switch, a second switch, and a protector. The voltage divider generates a divided voltage between a first driving voltage and a ground voltage. The operational amplifier receives the divided voltage and outputs the divided voltage as a second driving voltage. The first switch is connected between a first supply voltage terminal to receive the first driving voltage and a common node. The second switch is connected between the common node and a second supply voltage terminal to receive the ground voltage. The protector is connected to the common node to limit a voltage output of the first supply voltage terminal in response to a voltage of the common node.

    Abstract translation: 显示装置的电源电路包括分压器,运算放大器,第一开关,第二开关和保护器。 分压器在第一驱动电压和接地电压之间产生分压。 运算放大器接收分压,并输出分压为第二驱动电压。 第一开关连接在用于接收第一驱动电压的第一电源电压端子和公共节点之间。 第二开关连接在公共节点和第二电源电压端子之间以接收地电压。 保护器连接到公共节点,以响应于公共节点的电压来限制第一电源电压端子的电压输出。

    POLARIZATION SWITCHING DEVICE, DRIVER OF POLARIZATION SWITCHING DEVICE, AND METHOD OF DRIVING THE SAME
    7.
    发明申请
    POLARIZATION SWITCHING DEVICE, DRIVER OF POLARIZATION SWITCHING DEVICE, AND METHOD OF DRIVING THE SAME 有权
    偏振切换装置,极化切换装置的驱动器及其驱动方法

    公开(公告)号:US20130135285A1

    公开(公告)日:2013-05-30

    申请号:US13480256

    申请日:2012-05-24

    CPC classification number: H04N13/337 G09G3/003 G09G3/36 H04N13/315

    Abstract: A polarization switching device includes a lower panel; an upper panel facing the lower panel; a liquid crystal layer disposed between the lower panel and the upper panel; and a driver to apply a first driving voltage and a second driving voltage to the lower panel and the upper panel, respectively, the first driving voltage to transition among a center voltage, a first voltage and a second voltage. The first voltage and the second voltage have the same difference in value from the center voltage. The driver includes a voltage changing unit to generate the first voltage and the second voltage based on a digital data input to a first digital-analog converter.

    Abstract translation: 偏振切换装置包括下面板; 面向下面板的上面板; 设置在下板和上板之间的液晶层; 以及驱动器,分别将第一驱动电压和第二驱动电压施加到下面板和上面板,使第一驱动电压在中心电压,第一电压和第二电压之间转换。 第一电压和第二电压的值与中心电压具有相同的差值。 驱动器包括电压改变单元,用于基于输入到第一数模转换器的数字数据产生第一电压和第二电压。

    METHOD OF DRIVING A LIGHT SOURCE, LIGHT SOURCE ASSEMBLY FOR PERFORMING THE METHOD, AND LIQUID CRYSTAL DISPLAY APPARATUS HAVING THE SAME
    8.
    发明申请
    METHOD OF DRIVING A LIGHT SOURCE, LIGHT SOURCE ASSEMBLY FOR PERFORMING THE METHOD, AND LIQUID CRYSTAL DISPLAY APPARATUS HAVING THE SAME 失效
    驱动光源的方法,用于执行该方法的光源组件和具有该光源的液晶显示装置

    公开(公告)号:US20100176736A1

    公开(公告)日:2010-07-15

    申请号:US12362939

    申请日:2009-01-30

    CPC classification number: H05B41/2855 Y02B20/186

    Abstract: A method of driving a light source includes; converting an externally supplied direct current voltage into a first alternating current voltage, boosting the first alternating current voltage to a second alternating current voltage having a higher voltage than the first alternating current voltage, turning on the light source using the second alternating current voltage, detecting an arc noise detection voltage by adding arc noise generated from a high voltage terminal of the light source and arc noise generated from a low voltage terminal of the light source, and blocking the high voltage from being provided to the light source based on the detected arc noise detection voltage.

    Abstract translation: 驱动光源的方法包括: 将外部供应的直流电压转换成第一交流电压,将第一交流电压升压到具有比第一交流电压更高的电压的第二交流电压,使用第二交流电压接通光源,检测 通过添加从光源的高电压端子产生的电弧噪声和从光源的低电压端子产生的电弧噪声,并且基于检测的电弧阻挡高电压而被提供给光源的电弧噪声检测电压 噪声检测电压。

    Wafer guide and semiconductor wafer drying apparatus using the same
    9.
    发明申请
    Wafer guide and semiconductor wafer drying apparatus using the same 审中-公开
    晶圆导向器和半导体晶片干燥装置使用它

    公开(公告)号:US20060162748A1

    公开(公告)日:2006-07-27

    申请号:US11340325

    申请日:2006-01-25

    CPC classification number: H01L21/67313 H01L21/67034

    Abstract: A wafer guide and a semiconductor wafer drying apparatus using the same are disclosed. The wafer guide includes a body and supporters formed on the body. The supporters present a plurality of grooves to engage and support a periphery of a wafer. A discharge structure, e.g., a discharging hole, promotes flow of a cleaning solution away from the grooves thereby more effectively drying the wafer by more readily discharging the cleaning solution by way of the discharging structure. The discharging structure reduces undesirable accumulation of the cleaning solution, such as deionized water, in the grooves during a wafer cleaning process. In some embodiments, a pump actively draws fluid away from the discharge structure.

    Abstract translation: 公开了一种晶片引导件和使用其的半导体晶片干燥装置。 晶片引导件包括形成在主体上的主体和支撑件。 支持者呈现多个槽以接合和支撑晶片的周边。 诸如排放孔的排出结构促进清洁溶液远离凹槽的流动,从而通过更容易地通过排出结构排出清洁溶液更有效地干燥晶片。 排出结构在晶片清洁过程中减少了在凹槽中的清洁溶液(例如去离子水)的不期望的积聚。 在一些实施例中,泵主动地将流体从排放结构中吸取流体。

    Vacuum dryer of drying semiconductor device using the same
    10.
    发明授权
    Vacuum dryer of drying semiconductor device using the same 失效
    干燥半导体装置的真空干燥机使用相同

    公开(公告)号:US6108928A

    公开(公告)日:2000-08-29

    申请号:US115231

    申请日:1998-07-14

    CPC classification number: H01L21/67034 Y10S134/902

    Abstract: A vacuum dryer and a method of drying a semiconductor device using the same are provided. In the present invention, a vacuum dryer using isopropyl alcohol vapor, including an outer bath, an inner bath, a main water supply line, a supplementary water supply line, an inner bath drain line, and an outer bath drain line, is provided. After cleaning the inside of the vacuum dryer, the inner bath is filled with the supplied deionized water and the deionized water is continuously overflowed. Then, the semiconductor substrate is loaded into the inner bath of the vacuum dryer to which the deionized is continuously overflowed. The loaded semiconductor substrate is dried by supplying the isopropyl alcohol vapor to the inner bath into which the semiconductor substrate is loaded.

    Abstract translation: 提供一种真空干燥机和使用其的半导体装置的干燥方法。 在本发明中,提供了使用异丙醇蒸气的真空干燥机,包括外浴,内浴,主供水管,辅助供水管,内槽排水管,外槽排水管。 在清洁真空干燥器的内部后,内部的浴液被供应的去离子水填充,去离子水被连续溢出。 然后,将半导体衬底装载到去离子水不断溢出的真空干燥器的内槽中。 通过将异丙醇蒸气供给到其中加载半导体基板的内部浴中来干燥负载的半导体衬底。

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