公开(公告)号：US06177661B1

公开(公告)日：2001-01-23

申请号：US08959860

申请日：1997-10-29

申请人： Joung-Sun Lee ,  Tae-hyup Kim

发明人： Joung-Sun Lee ,  Tae-hyup Kim

IPC分类号： H05B610

CPC分类号： H01L21/67103

摘要： A wafer holding stage used during a semiconductor device fabricating process decreases the number of particles that accumulate on a wafer. The wafer holding stage includes a stage having an upper surface for holding a wafer and a heating element disposed inside the stage for raising temperatures of the upper surface to a holding temperature above an ambient temperature. The heating element may be a heating wire for producing heat when supplied with a electric current or a heat exchange tube for carrying a heated fluid. The wafer holding stage may further comprise a low temperature particle collector, having a surface maintained at a collecting temperature below the ambient temperature, spaced apart a small distance from the stage.

摘要翻译： 在半导体器件制造工艺期间使用的晶片保持台减少在晶片上积聚的颗粒的数量。 晶片保持台包括具有用于保持晶片的上表面的台和设置在该台的内部的加热元件，用于将上表面的温度升高到高于环境温度的保持温度。 加热元件可以是用于在供应电流时产生热量的加热丝或用于承载加热流体的热交换管。 晶片保持阶段可以进一步包括低温颗粒收集器，其具有保持在低于环境温度的收集温度的表面，与所述平台隔开一小段距离。

公开(公告)号：US5746652A

公开(公告)日：1998-05-05

申请号：US771775

申请日：1996-12-20

申请人： Joung-Sun Lee ,  Dae-Yul Kim ,  Yo-Han An ,  Jae-Kang Jun

发明人： Joung-Sun Lee ,  Dae-Yul Kim ,  Yo-Han An ,  Jae-Kang Jun

IPC分类号： H01L21/02 ,  B08B5/02 ,  B08B15/02 ,  F24F3/16 ,  F24F7/007 ,  F24F7/06 ,  B01L1/04

CPC分类号： B08B5/02 ,  F24F3/161

摘要： An activated air showering system for a clean room includes a plurality of shower disks provided on a floor of the clean room, where each of the disks is formed with a plurality of exhaust holes for exhausting particles released from a worker. A sensing device senses the presence of the worker on the shower disk and a driving device drives the shower disk in response to a signal from the sensing device. Air sprayers emit air when the shower disk is driven by the driving device to remove foreign particles from the worker.

摘要翻译： 一种用于洁净室的活动式空气淋浴系统，包括设置在洁净室的地板上的多个淋浴盘，其中每个盘形成有用于排出从工人释放的颗粒的多个排气孔。 感测装置感测工作人员在淋浴盘上的存在，并且驱动装置响应于来自感测装置的信号驱动淋浴盘。 当喷淋盘由驱动装置驱动时，空气喷雾器排出空气，以从工人中除去外来颗粒。

公开(公告)号：US6082179A

公开(公告)日：2000-07-04

申请号：US912431

申请日：1997-08-18

申请人： Jae Kang Jeon ,  Joung Sun Lee ,  Jae Heung Choi ,  Dong Young Kim

发明人： Jae Kang Jeon ,  Joung Sun Lee ,  Jae Heung Choi ,  Dong Young Kim

IPC分类号： G01N15/14 ,  G01N1/02 ,  G01N1/22 ,  G01N1/24 ,  G01N15/02 ,  H01L21/66 ,  G01N15/06

CPC分类号： G01N1/2211 ,  G01N1/24 ,  G01N15/02 ,  G01N2001/2223

摘要： A particle measurer used in a semiconductor clean room includes a funnel-shaped collector for facilitating the measurement of a particle level of an air sample in the clean room. The particle measurer is arranged so that a narrow end part of the funnel-shaped collector is connected to an intake of the particle measurer. A wide end of the funnel-shaped connector receives the air sample through a sample air pipe. A pump is used for suctioning the air sample through the intake of said particle counter and for discharging the air sample through an exhaust.

摘要翻译： 在半导体洁净室中使用的粒子测量器包括漏斗形收集器，用于便于测量洁净室中的空气样品的颗粒水平。 颗粒测量器被布置成使得漏斗形收集器的窄端部分连接到颗粒测量器的入口。 漏斗形连接器的宽端通过样品空气管接收空气样品。 泵用于通过所述颗粒计数器的入口抽吸空气样品并通过排气排出空气样品。

公开(公告)号：US5792226A

公开(公告)日：1998-08-11

申请号：US752385

申请日：1996-11-20

申请人： Joung-sun Lee ,  Jae-jun Ruy ,  Kun-hyung Lee ,  Sang-young Mun

发明人： Joung-sun Lee ,  Jae-jun Ruy ,  Kun-hyung Lee ,  Sang-young Mun

IPC分类号： F24F7/06 ,  F24F3/16 ,  F24F13/075 ,  H01L21/00 ,  B01D46/10 ,  B01L1/04

CPC分类号： F24F3/161

摘要： An air current controlling device for a clean room having a high efficiency particle filter, a housing cap for the filter, and an air current directional controller provided between the filter and the housing cap. The controller has a shaft extending therefrom, which extends through a central opening in the bottom of the housing cap. The controller includes a plurality of extendable and retractable blades, each being connected to a square plate that is in turn connected to the shaft. A clean room having the above air current controlling device installed in each air inlet is capable of widely distributing the clean air in the clean room. The wide air distribution reduces the temperature difference in the clean room, while optimizing the relative humidity and thereby reducing the electrostatic level of the clean room.

摘要翻译： 一种用于洁净室的气流控制装置，其具有高效率粒子滤波器，用于过滤器的壳体盖，以及设置在过滤器和壳体盖之间的气流定向控制器。 控制器具有从其延伸的轴，其延伸穿过壳体盖的底部中的中心开口。 控制器包括多个可伸缩和可缩回的叶片，每个叶片连接到正方形板，该方板又连接到轴上。 具有安装在每个空气入口中的上述气流控制装置的洁净室能够将清洁空气广泛地分布在洁净室中。 广泛的空气分布降低了洁净室中的温差，同时优化了相对湿度，从而降低了洁净室的静电电平。

公开(公告)号：US6074463A

公开(公告)日：2000-06-13

申请号：US3523

申请日：1998-01-06

申请人： Joung-sun Lee ,  Ki-whan Lim

发明人： Joung-sun Lee ,  Ki-whan Lim

IPC分类号： F24F7/06 ,  B01D46/00 ,  B01D46/42 ,  B01D46/44 ,  F24F11/02 ,  H01L21/02 ,  H01L21/68 ,  B01D35/143

CPC分类号： B01D46/0086 ,  B01D46/4254 ,  B01D2273/30 ,  Y10S116/25 ,  Y10S55/34

摘要： A fan filter unit has a blower, a motor, a filter and a charge induction sensor installed on the ceiling of a clean room. The charge induction sensor is movable between a drive stopped position at which the sensor can be seen with the naked eye and a normal drive position at which the sensor can not be discriminated from the bottom of the filter. The direction of air passing through the filter and static charges prevailing in the unit dictate the position assumed by the sensor.

摘要翻译： 风扇过滤器单元具有安装在洁净室的天花板上的鼓风机，电动机，过滤器和电荷感应传感器。 电荷感应传感器可以在用肉眼观察传感器的驱动停止位置与传感器不能从过滤器的底部区分开的正常驱动位置之间移动。 通过过滤器的空气的方向和单元中的静电荷指示传感器假设的位置。

公开(公告)号：US5856623A

公开(公告)日：1999-01-05

申请号：US946172

申请日：1997-10-07

申请人： Yo-han Ahn ,  Tac-ho Kim ,  Jae-jun Ryu ,  Joung-sun Lee

发明人： Yo-han Ahn ,  Tac-ho Kim ,  Jae-jun Ryu ,  Joung-sun Lee

IPC分类号： G01N15/14 ,  G01N1/02 ,  G01N1/22 ,  H01L21/66 ,  G01N27/00

CPC分类号： G01N1/2247 ,  G01N1/2202 ,  G01N2001/2223 ,  G01N2001/225 ,  G01N2001/2285

摘要： A particle counter for counting a number of particles in an air sample includes a sampling probe connected to a counter body with an intake section of the sampling probe having an adjustable area. The intake section is constructed of a plurality of telescopically interconnected shaped pieces that slide within one another to permit lengthening and shortening. The degree of lengthening or shortening determines the adjustable area of the sampling probe, which corresponds to an air speed of the air sample to provide precise particle measurements.

摘要翻译： 用于对空气样品中的颗粒数进行计数的颗粒计数器包括连接到对置体的采样探针，其中采样探针的进气部分具有可调节区域。 进气部分由多个可伸缩互连的成形件构成，其彼此滑动以允许延长和缩短。 延长或缩短的程度决定了采样探针的可调节面积，这对应于空气样品的空气速度以提供精确的粒子测量。

公开(公告)号：US06257073B1

公开(公告)日：2001-07-10

申请号：US09118868

申请日：1998-07-20

申请人： Joung-Sun Lee ,  Jung-Eun Kim

发明人： Joung-Sun Lee ,  Jung-Eun Kim

IPC分类号： G01F110

CPC分类号： G01F1/10

摘要： The present invention relates to a cyclone turbine flowmeter for extracting information about a flow rate or measuring the quantity of flow flowing in production facilities. The cyclone turbine flowmeter includes a cyclone turbine formed with flow channels for allowing liquids flowing in from the outside to receive rotary power, a rotor rotated by the liquids passed through the flow channels of the cyclone turbine, a turbine bearing manufactured so as to minimize frictional forces and at the same time, to have durability and resistance to chemicals, and a vibration isolation bearing constructed in such a manner of enclosing the turbine bearing and its turbine axle to prevent vibration.

摘要翻译： 本发明涉及一种用于提取关于流量的信息或测量在生产设备中流动的流量的旋风涡轮流量计。 旋风涡轮流量计包括形成有流动通道的旋风涡轮机，用于允许液体从外部流入以接收旋转动力，由穿过旋风涡轮机的流动通道的液体旋转的转子，制造成使摩擦力最小化的涡轮轴承 并且同时具有耐久性和抗化学物质，以及以这样一种方式构造的隔振轴承，该轴承包围涡轮机轴承及其涡轮轴以防止振动。

公开(公告)号：US5692954A

公开(公告)日：1997-12-02

申请号：US434005

申请日：1995-05-03

申请人： Joung Sun Lee ,  Je Ku Park ,  Je Kang Jun ,  Sang Bong Choi

发明人： Joung Sun Lee ,  Je Ku Park ,  Je Kang Jun ,  Sang Bong Choi

IPC分类号： F24F7/06 ,  B01D46/00 ,  B08B5/02 ,  F24F3/16

CPC分类号： F24F3/161 ,  B08B5/02

摘要： An air shower system which includes an air shower room, an underground region in fluid communication with a clean room, an air supply chamber surrounding the sidewalls and ceiling of the air shower room, the air supply chamber having an intake portion in fluid communication with the underground region, a plurality of air supply nozzles provided in the sidewalls and ceiling of the air shower room, a plurality of air discharge holes provided in the floor of the air shower room, the air discharge holes being in fluid communication with the underground region, a plurality of filters provided in side portions of the air supply chamber disposed alongside the sidewalls of the air shower room, and, a plurality of blowers provided in the side portions of the air supply chamber for forcing air from the underground region through the filters and thence, through the air supply nozzles, into the interior of the air shower room, for blowing particulate matter off of a person situated in the interior of the shower room, the air containing the particulate matter being discharged through the air discharge holes into the underground region.

摘要翻译： 一种空气淋浴系统，包括空气淋浴房，与洁净室流体连通的地下区域，围绕所述空气淋浴房的侧壁和天花板的供气室，所述空气供应室具有与所述空气淋浴室流体连通的进气部分 地下区域，设置在空气淋浴房的侧壁和天花板中的多个供气喷嘴，设置在空气淋浴房的地板中的多个排气孔，排气孔与地下区域流体连通， 设置在沿着空气淋浴房的侧壁配置的供气室的侧部的多个过滤器，以及设置在供气室的侧部的多个鼓风机，用于迫使来自地下区域的空气通过过滤器， 然后通过供气喷嘴进入空气淋浴房的内部，从位于内部的人员吹出颗粒物质 淋浴室内的空气通过排气孔排出到地下区域。