公开(公告)号：US20050199983A1

公开(公告)日：2005-09-15

申请号：US11100285

申请日：2005-04-06

申请人： Masao Marunaka ,  Toshiya Doi ,  Kouichi Nose ,  Shirou Takigawa ,  Kiyoshi Otake

发明人： Masao Marunaka ,  Toshiya Doi ,  Kouichi Nose ,  Shirou Takigawa ,  Kiyoshi Otake

IPC分类号： C23C14/24 ,  C23C14/32 ,  C23C14/54 ,  H01J37/32 ,  H01L21/02 ,  H01L21/28 ,  H01L21/285 ,  H01L21/3205 ,  H01L21/768 ,  H01L29/06

CPC分类号： H01J37/32422 ,  C23C14/32 ,  C23C14/546 ,  H01J37/32082 ,  H01L21/76877

摘要： A vacuum chamber the inside of which can be maintained in a substantially vacuum condition is used; a wafer in which a semiconductor wiring film is to be formed is held by a wafer substrate holder disposed in the vacuum chamber; the material of the semiconductor wiring film is evaporated by an evaporation source disposed in the vacuum chamber; and a high frequency electric power for generating a plasma in the vacuum chamber, making use of the substrate holder as an electrode is supplied from a high frequency power source.

摘要翻译： 使用其内部可以保持在基本真空条件下的真空室; 其中要形成半导体布线膜的晶片由设置在真空室中的晶片衬底保持架保持; 半导体布线膜的材料被设置在真空室中的蒸发源蒸发; 并且从高频电源供给用于在真空室中产生等离子体的高频电力，利用基板保持器作为电极。

公开(公告)号：US5507623A

公开(公告)日：1996-04-16

申请号：US286787

申请日：1994-04-04

申请人： Yoshitaka Kojima ,  Kiyoshi Otake ,  Akira Mebata ,  Hideyuki Arikawa ,  Tetsuo Sasada ,  Hajime Toriya

发明人： Yoshitaka Kojima ,  Kiyoshi Otake ,  Akira Mebata ,  Hideyuki Arikawa ,  Tetsuo Sasada ,  Hajime Toriya

IPC分类号： C22C19/05 ,  C22C19/07 ,  C23C4/02 ,  C23C4/18 ,  C23C10/02 ,  C23C10/48 ,  C23C28/02 ,  F01D5/28 ,  F01D9/02

CPC分类号： C23C4/02 ,  C23C10/02 ,  C23C10/48 ,  C23C4/18 ,  F01D5/286 ,  F01D5/288 ,  Y10T428/12458 ,  Y10T428/1275 ,  Y10T428/12944

摘要： A coated layer of this invention is composed of a lower alloy-coated layer 2 formed of an MCrAlY alloy whose principal element is Co or Co and Ni, an upper alloy-coated layer 1 formed of an MCrAlY alloy whose principal element is Ni and a portion 4 in which an Al content of the surface portion of the upper coated layer 1 is largest and is reduced gradually towards a more internal part. Manufacturing thereof involves the steps of forming the lower and upper coated layers and effecting an Al diffusion treatment into the upper coated layer. The upper coated layer having the portion which exhibits the large Al content contributes to a high-temperature anticorrosive property. A gas turbine blade is provided with the alloy-coated layer, wherein the lower coated layer incorporates a composite function to prevent a high-temperature corrosion of a base material when cracks are caused in the upper coated layer due to thermal stress. The gas turbine blade exhibits effects of improving the reliability and increasing a life-time.

摘要翻译： 本发明的涂层由主要元素为Co或Co和Ni的MCrAlY合金形成的下合金涂层2，由主要元素为Ni的MCrAlY合金形成的上合金涂层1和 部分4，其中上涂层1的表面部分的Al含量最大并且朝向更内部的部分逐渐减小。 其制造包括形成下涂层和上涂层并对Al涂层进行Al扩散处理的步骤。 具有大Al含量的部分的上涂层有助于高温防腐蚀性能。 燃气轮机叶片具有合金涂层，其中下涂层具有复合功能，以防止由于热应力在上涂层中引起裂纹时基体材料的高温腐蚀。 燃气轮机叶片具有提高可靠性和延长使用寿命的效果。