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公开(公告)号：US5149659A
公开(公告)日：1992-09-22
申请号：US666691
申请日：1991-03-05
申请人： Kohzo Hakuta , Minoru Aramaki , Takashi Suen. A , Mitsuo Kodama , Hisaji Nakano , Shinsuke Nakagawa
发明人： Kohzo Hakuta , Minoru Aramaki , Takashi Suen. A , Mitsuo Kodama , Hisaji Nakano , Shinsuke Nakagawa
CPC分类号： H01S3/104 , G01N31/005 , G01N33/0052 , H01S3/225 , Y10T436/12 , Y10T436/19 , Y10T436/204998 , Y10T436/207497
摘要： The concentration of molecular fluorine in a mixed gas such as an excimer laser gas can be determined easily, quickly and accurately by passing the mixed gas through a column packed with an alkali metal or alkaline earth metal compound which has no halogen atom and reacts with fluorine to form a solid fluoride together with molecular oxygen and/or carbon dioxide and measuring the concentration of oxygen or carbon dioxide in the fluorine-free gas flowed out of the packed column. If the mixed gas initially contains molecular oxygen or carbon dioxide, its concentration is measured separately after fixing fluorine in another column packed with an element which forms a fluoride. This analyzing method can be used in a feedback control system for controlling the concentration of fluorine in an excimer laser gas during operation of the laser to thereby stabilize the laser output power.
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公开(公告)号：US5017499A
公开(公告)日：1991-05-21
申请号：US330898
申请日：1989-03-31
申请人： Kohzo Hakuta , Minoru Aramaki , Takashi Suenaga , Mitsuo Kodama , Hisaji Nakano , Shinsuke Nakagawa
发明人： Kohzo Hakuta , Minoru Aramaki , Takashi Suenaga , Mitsuo Kodama , Hisaji Nakano , Shinsuke Nakagawa
CPC分类号： H01S3/104 , G01N31/005 , G01N33/0052 , H01S3/225 , Y10T436/12 , Y10T436/19 , Y10T436/204998 , Y10T436/207497
摘要： The concentration of molecular fluorine in a mixed gas such as an excimer laser gas can be determined easily, quickly and accurately by passing the mixed gas through a column packed with an alakli metal or alkaline earth metal compound which has no halogen atom and reacts with fluorine to form a solid fluoride together with molecular oxygen and/or carbon dioxide and measuring the concentration of oxygen or carbon dioxide in the fluorine-free gas flowed out of the packed column. If the mixed gas initially contains molecular oxygen or carbon dioxide, its concentration is measured separately after fixing fluorine in another column packed with an element which forms a fluoride. This analyzing method can be used in a feedback control system for controlling the concentration of fluorine in an excimer laser gas during operation of the laser to thereby stabilize the laser output power.
摘要翻译： 混合气体如准分子激光气体中的分子氟的浓度可以通过使混合气体通过填充有不含卤素原子并与氟反应的碱金属或碱土金属化合物的柱而容易，准确地测定 与分子氧和/或二氧化碳一起形成固体氟化物，并测量从填充塔流出的无氟气体中的氧气或二氧化碳的浓度。 如果混合气体最初含有分子氧或二氧化碳，则在将氟固定在填充有形成氟化物的元素的另一柱中后，分别测量其浓度。 该分析方法可以用于反馈控制系统，用于在激光器的操作期间控制准分子激光气体中的氟浓度，从而稳定激光输出功率。
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公开(公告)号：US08385696B2
公开(公告)日：2013-02-26
申请号：US12945036
申请日：2010-11-12
申请人： Kohzo Hakuta , Kien Le Pham
发明人： Kohzo Hakuta , Kien Le Pham
CPC分类号： G02B6/0229 , G02B6/107 , G02B6/29319 , G02B6/29356 , G02B6/4287 , G02B6/4291
摘要： To provide an optical nanofiber resonator having an optical waveguide whose diameter is equal to or smaller than the wavelength of a propagation light, a light emitter disposed at a predetermined position of the optical waveguide, and a first reflector and a second reflector formed in the optical waveguide with the light emitter interposed therebetween, wherein at least one of the first reflector and the second reflector transmits a part of the propagation light. With such a configuration, the channeling efficiency of the light emitted from the light emitter and the propagation mode of the optical waveguide is dramatically improved.
摘要翻译： 为了提供具有直径等于或小于传播光的波长的光波导的光学纳米纤维谐振器，设置在光波导的预定位置处的发光体，以及形成在光学器件中的第一反射器和第二反射器 波导，其间具有发光体，其中第一反射器和第二反射器中的至少一个透射传播光的一部分。 通过这样的结构，从发光体发射的光和光波导的传播模式的沟道效率显着提高。
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公开(公告)号：US20120121221A1
公开(公告)日：2012-05-17
申请号：US12945036
申请日：2010-11-12
申请人： Kohzo HAKUTA , Kien Le Pham
发明人： Kohzo HAKUTA , Kien Le Pham
IPC分类号： G02B6/34
CPC分类号： G02B6/0229 , G02B6/107 , G02B6/29319 , G02B6/29356 , G02B6/4287 , G02B6/4291
摘要： To provide an optical nanofiber resonator having an optical waveguide whose diameter is equal to or smaller than the wavelength of a propagation light, a light emitter disposed at a predetermined position of the optical waveguide, and a first reflector and a second reflector formed in the optical waveguide with the light emitter interposed therebetween, wherein at least one of the first reflector and the second reflector transmits a part of the propagation light. With such a configuration, the channeling efficiency of the light emitted from the light emitter and the propagation mode of the optical waveguide is dramatically improved.
摘要翻译： 为了提供具有直径等于或小于传播光的波长的光波导的光学纳米纤维谐振器，设置在光波导的预定位置处的发光体，以及形成在光学器件中的第一反射器和第二反射器 波导，其间具有发光体，其中第一反射器和第二反射器中的至少一个透射传播光的一部分。 通过这样的结构，从发光体发射的光和光波导的传播模式的沟道效率显着提高。
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公开(公告)号：US4740982A
公开(公告)日：1988-04-26
申请号：US909702
申请日：1986-09-22
申请人： Kohzo Hakuta , Minoru Aramaki , Takashi Suenaga
发明人： Kohzo Hakuta , Minoru Aramaki , Takashi Suenaga
摘要： A laser gas used in a rare gas halide excimer laser is efficiently refined with little loss of the essential rare gas such as Kr, Ar or Xe by contact of the laser gas with a solid alkaline compound, e.g. Ca(OH).sub.2, for conversion of acidic impurities and also the halogen source gas such as F.sub.2 or HCl into solid metal halides and contact of the remaining gas with zeolite which is adsorbent of the remaining impurities. When the halogen source gas comprises a highly oxidizing fluorine matter the laser gas is first brought into contact with a reactive metal, e.g. Si or Fe, to convert the oxidizing fluorine matter into metal fluorides to thereby prevent formation of O.sub.2, which is obstructive to the laser operation, by reaction of the oxidizing matter with the alkaline compound. The halogen source gas too can be recovered by initially cooling the laser gas so as to cause condensation of the rare gas and impurities having relatively high boiling points and leave the halogen source gas, which is lower in boiling point, in gas phase.
摘要翻译： 在稀有气体卤化物准分子激光器中使用的激光气体通过激光气体与固体碱性化合物的接触，如Kr，Ar或Xe等几乎不损失基本稀有气体而被有效地精炼。 Ca（OH）2，用于将酸性杂质以及卤素源气体如F2或HCl转化成固体金属卤化物，并将剩余气体与作为其余杂质的吸附剂的沸石接触。 当卤素源气体包含高度氧化的氟物质时，激光气体首先与反应性金属接触，例如， Si或Fe，将氧化性氟物质转化为金属氟化物，由此氧化物质与碱性化合物的反应，可以防止形成对激光作业产生阻碍的O 2。 卤素源气体也可以通过初始冷却激光气体来回收，以使稀有气体和沸点相对较高的杂质冷凝，并且在气相中留下沸点较低的卤素源气体。
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