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公开(公告)号：US5149659A
公开(公告)日：1992-09-22
申请号：US666691
申请日：1991-03-05
申请人： Kohzo Hakuta , Minoru Aramaki , Takashi Suen. A , Mitsuo Kodama , Hisaji Nakano , Shinsuke Nakagawa
发明人： Kohzo Hakuta , Minoru Aramaki , Takashi Suen. A , Mitsuo Kodama , Hisaji Nakano , Shinsuke Nakagawa
CPC分类号： H01S3/104 , G01N31/005 , G01N33/0052 , H01S3/225 , Y10T436/12 , Y10T436/19 , Y10T436/204998 , Y10T436/207497
摘要： The concentration of molecular fluorine in a mixed gas such as an excimer laser gas can be determined easily, quickly and accurately by passing the mixed gas through a column packed with an alkali metal or alkaline earth metal compound which has no halogen atom and reacts with fluorine to form a solid fluoride together with molecular oxygen and/or carbon dioxide and measuring the concentration of oxygen or carbon dioxide in the fluorine-free gas flowed out of the packed column. If the mixed gas initially contains molecular oxygen or carbon dioxide, its concentration is measured separately after fixing fluorine in another column packed with an element which forms a fluoride. This analyzing method can be used in a feedback control system for controlling the concentration of fluorine in an excimer laser gas during operation of the laser to thereby stabilize the laser output power.
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公开(公告)号：US5017499A
公开(公告)日：1991-05-21
申请号：US330898
申请日：1989-03-31
申请人： Kohzo Hakuta , Minoru Aramaki , Takashi Suenaga , Mitsuo Kodama , Hisaji Nakano , Shinsuke Nakagawa
发明人： Kohzo Hakuta , Minoru Aramaki , Takashi Suenaga , Mitsuo Kodama , Hisaji Nakano , Shinsuke Nakagawa
CPC分类号： H01S3/104 , G01N31/005 , G01N33/0052 , H01S3/225 , Y10T436/12 , Y10T436/19 , Y10T436/204998 , Y10T436/207497
摘要： The concentration of molecular fluorine in a mixed gas such as an excimer laser gas can be determined easily, quickly and accurately by passing the mixed gas through a column packed with an alakli metal or alkaline earth metal compound which has no halogen atom and reacts with fluorine to form a solid fluoride together with molecular oxygen and/or carbon dioxide and measuring the concentration of oxygen or carbon dioxide in the fluorine-free gas flowed out of the packed column. If the mixed gas initially contains molecular oxygen or carbon dioxide, its concentration is measured separately after fixing fluorine in another column packed with an element which forms a fluoride. This analyzing method can be used in a feedback control system for controlling the concentration of fluorine in an excimer laser gas during operation of the laser to thereby stabilize the laser output power.
摘要翻译： 混合气体如准分子激光气体中的分子氟的浓度可以通过使混合气体通过填充有不含卤素原子并与氟反应的碱金属或碱土金属化合物的柱而容易，准确地测定 与分子氧和/或二氧化碳一起形成固体氟化物，并测量从填充塔流出的无氟气体中的氧气或二氧化碳的浓度。 如果混合气体最初含有分子氧或二氧化碳，则在将氟固定在填充有形成氟化物的元素的另一柱中后，分别测量其浓度。 该分析方法可以用于反馈控制系统，用于在激光器的操作期间控制准分子激光气体中的氟浓度，从而稳定激光输出功率。
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公开(公告)号：US4964137A
公开(公告)日：1990-10-16
申请号：US466930
申请日：1990-01-18
摘要： A laser gas used in a rare gas fluoride excimer laser is efficiently refined with little loss of the principal rare gas such as Ar, Kr or Xe by sequential contact of the laser gas first with a reactive metal, e.g. Si or Fe, for conversion of the fluorine source gas such as F.sub.2 or NF.sub.3 to a metal fluoride, then with a solid alkaline compound, e.g. Ca(OH).sub.2, for conversion of gaseous fluorides to solid metal fluorides, next with zeolite which is adsorbent of most of the remaining impurities and finally with an alkaline metal, e.g. Ca or Na, for decomposition of CF.sub.4 to form a solid metal fluoride and carbon. CF.sub.4 is formed during operation of the excimer laser by reaction of fluorine with a fluororesin used as electrical insulator in the laser apparatus, and accumulation of CF.sub.4 in the laser gas caused significal lowering of the laser output power.
摘要翻译： 在稀有气体氟化物准分子激光器中使用的激光气体通过先将激光气体与活性金属例如反应性金属顺序接触而有效地精制而不损失诸如Ar，Kr或Xe的主要稀有气体。 Si或Fe，用于将氟源气体如F2或NF3转化为金属氟化物，然后用固体碱性化合物，例如， Ca（OH）2，用于将气态氟化物转化为固体金属氟化物，接下来是沸石，其是大部分剩余杂质的吸附剂，最后是碱金属，例如碱金属。 Ca或Na，用于分解CF4以形成固体金属氟化物和碳。 在激光装置中通过氟与用作电绝缘体的氟树脂反应而在准分子激光器的操作期间形成CF4，并且CF4在激光气体中的积聚导致激光输出功率的显着降低。
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公开(公告)号：US4740982A
公开(公告)日：1988-04-26
申请号：US909702
申请日：1986-09-22
申请人： Kohzo Hakuta , Minoru Aramaki , Takashi Suenaga
发明人： Kohzo Hakuta , Minoru Aramaki , Takashi Suenaga
摘要： A laser gas used in a rare gas halide excimer laser is efficiently refined with little loss of the essential rare gas such as Kr, Ar or Xe by contact of the laser gas with a solid alkaline compound, e.g. Ca(OH).sub.2, for conversion of acidic impurities and also the halogen source gas such as F.sub.2 or HCl into solid metal halides and contact of the remaining gas with zeolite which is adsorbent of the remaining impurities. When the halogen source gas comprises a highly oxidizing fluorine matter the laser gas is first brought into contact with a reactive metal, e.g. Si or Fe, to convert the oxidizing fluorine matter into metal fluorides to thereby prevent formation of O.sub.2, which is obstructive to the laser operation, by reaction of the oxidizing matter with the alkaline compound. The halogen source gas too can be recovered by initially cooling the laser gas so as to cause condensation of the rare gas and impurities having relatively high boiling points and leave the halogen source gas, which is lower in boiling point, in gas phase.
摘要翻译： 在稀有气体卤化物准分子激光器中使用的激光气体通过激光气体与固体碱性化合物的接触，如Kr，Ar或Xe等几乎不损失基本稀有气体而被有效地精炼。 Ca（OH）2，用于将酸性杂质以及卤素源气体如F2或HCl转化成固体金属卤化物，并将剩余气体与作为其余杂质的吸附剂的沸石接触。 当卤素源气体包含高度氧化的氟物质时，激光气体首先与反应性金属接触，例如， Si或Fe，将氧化性氟物质转化为金属氟化物，由此氧化物质与碱性化合物的反应，可以防止形成对激光作业产生阻碍的O 2。 卤素源气体也可以通过初始冷却激光气体来回收，以使稀有气体和沸点相对较高的杂质冷凝，并且在气相中留下沸点较低的卤素源气体。
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5.发明授权
公开(公告)号：US4863762A
公开(公告)日：1989-09-05
申请号：US169834
申请日：1988-03-18
CPC分类号： B05D1/60
摘要： In forming a coating film of a fluororesin, e.g. polytetrafluoroethylene, on a metallic or nonmetallic surface by a physical vapor deposition technique, problems attributed to the necessity of intensely heating or bombarding the fluororesin as the evaporating source or target material are solved by using a molecular weight reduced fluororesin not higher than 5000 in molecular weight. It is best to use a low molecular weight fluororesin powder obtained by heating a high molecular weight fluororesin in presence of a fluorine source and precipitating the molecular weight reduced polymer from the reaction gas.
摘要翻译： 在形成氟树脂的涂膜时，例如， 聚四氟乙烯通过物理气相沉积技术在金属或非金属表面上，通过使用分子量不高于5000的分子量降低的氟树脂来解决归因于强烈加热或轰击氟树脂作为蒸发源或靶材料的问题 。 最好使用通过在氟源存在下加热高分子量氟树脂而得到的低分子量氟树脂粉末，并从反应气体中沉淀分子量降低的聚合物。
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公开(公告)号：US4543242A
公开(公告)日：1985-09-24
申请号：US651944
申请日：1984-09-19
IPC分类号： C01B21/083
CPC分类号： C01B21/0835
摘要： NF.sub.3 is prepared with good yields by reaction between fluorine gas and an ammonium complex of a metal fluoride, such as (NH.sub.4).sub.3 AlF.sub.6, in solid phase. The metal flouride ammonium complex may be one additionally containing an alkali metal, such as (NH.sub.4).sub.2 NaAlF.sub.6. The gas-solid reaction is carried out preferably at temperatures above 80.degree. C. and at relatively low partial pressures of fluorine in the gas phase of the reaction system, so that the reaction is easy to control.
摘要翻译： 通过氟气与诸如（NH 4）3 AlF 6等金属氟化物的铵络合物的固相反应制备NF 3。 金属氟化铵络合物可以另外含有碱金属如（NH 4）2 NaAlF 6。 气固反应优选在高于80℃的温度和在反应体系的气相中相对较低的氟分压下进行，使得反应易于控制。
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7.发明授权Method for preparation of graphite fluoride by contact reaction between carbon and fluorine gas 失效通过碳氟与氟气接触反应制备氟化石墨的方法
公开(公告)号：US4438086A
公开(公告)日：1984-03-20
申请号：US413889
申请日：1982-09-01
申请人： Minoru Aramaki , Yasushi Kita , Hishagi Nakano , Shiro Moroi
发明人： Minoru Aramaki , Yasushi Kita , Hishagi Nakano , Shiro Moroi
CPC分类号： B01J8/02 , C01B31/005 , B01J2208/00194 , B01J2208/00407 , B01J2208/0053 , B01J2208/00548 , B01J2219/182
摘要： A method and apparatus for preparation of a graphite fluoride such as (CF).sub.n or (C.sub.2 F).sub.n by heterogeneous contact reaction between a carbon material such as graphite or petroleum coke and fluorine gas at about 200.degree.-550.degree. C. The carbon material in the form of small pieces such as granules or powder particles is kept in a holder having a number of openings so as to form a carbon material layer in the holder, which is placed in a reactor so as to leave gas passages around the holder. With heating, fluorine gas is forcibly passed through the gas passages without agitating the carbon material in the holder. The openings of the holder are shaped and arranged such that the fluorine gas permeates through the carbon material layer in the holder. For example, the holder is an open-type box made of either a wire screen or a perforated metal plate, or a conveyor belt made of a wire screen. This method is effective for prevention of spontaneous decomposition of the formed graphite fluoride attributed to accumulation of the heat of reaction within the reacting carbon material layer and/or mechanical shocks or vibrations to the fluorinated carbon.
摘要翻译： 一种用于在约200-550℃之间的诸如石墨或石油焦炭等碳材料与氟气之间的非均相接触反应来制备（CF）n或（C2F）n等氟化石墨的方法和装置。 将小颗粒或粉末颗粒的形式保持在具有多个开口的保持器中，以便在保持器中形成碳材料层，该碳材料层放置在反应器中，以使得气体通道围绕保持器。 通过加热，氟气被强制地通过气体通道，而不会搅动保持器中的碳材料。 保持器的开口被成形和布置成使得氟气渗透通过保持器中的碳材料层。 例如，保持器是由丝网或穿孔金属板或由丝网制成的输送带制成的开放式箱体。 该方法对于防止由于反应碳材料层内的反应热的积累和/或对氟化碳的机械冲击或振动而导致的形成的氟化石墨的自发分解是有效的。
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公开(公告)号：US4160012A
公开(公告)日：1979-07-03
申请号：US856134
申请日：1977-11-30
申请人： Tetsuhiro Ono , Minoru Aramaki , Tamotsu Mizuno , Masao Fujinaga
发明人： Tetsuhiro Ono , Minoru Aramaki , Tamotsu Mizuno , Masao Fujinaga
IPC分类号： C01B33/10
CPC分类号： C01B33/103
摘要： Crude sodium hexafluorosilicate containing gypsum as a principal impurity can be refined economically with a minimized loss of fluorine by first making the crude fluorosilicate in the form of an aqueous slurry react with an alkali metal compound such as sodium carbonate or sodium hydroxide to form a soluble sulfate, and then treating the solid component of the reaction product with an acid solution in the presence of sodium ion, preferably at elevated temperatures near boiling point, to form a soluble calcium salt and crystallize sodium hexafluorosilicate. Sea water may be used both as the aqueous medium for the slurry in the first step and as the source of the sodium ions in the second step.
摘要翻译： 含有石膏作为主要杂质的六氟硅酸钠可以通过首先使含水浆料形式的粗制氟硅酸盐与碱金属化合物如碳酸钠或氢氧化钠反应形成可溶性硫酸盐 然后在钠离子存在下用酸溶液处理反应产物的固体组分，优选在沸点附近的升高的温度下，形成可溶性钙盐并结晶六氟硅酸钠。 海水可以同时用作第一步中浆料的水性介质和第二步中钠离子的来源。
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9.发明授权Process for the preparation of fluorine-rich organic compounds containing one or two carbon atoms 失效制备含有一个或两个碳原子的富含氟有机化合物的方法
公开(公告)号：US4069266A
公开(公告)日：1978-01-17
申请号：US762339
申请日：1977-01-25
IPC分类号： C07C17/20 , B01J27/125 , C07B61/00 , C07C17/00 , C07C17/37 , C07C19/08 , C07C19/10 , C07C19/12 , C07C67/00
摘要： A process for preparing fluorine-rich organic compounds containing one or two carbon atoms from organic fluoro compounds of lower fluorine content in which starting partially or completely halogenated fluoro carbon compounds having at least one halogen atom other than fluorine, e.g., CHCl.sub.2 F, CHClF.sub.2, CCl.sub.2 F.sub.2, CCl.sub.3 F, C.sub.2 Cl.sub.3 F.sub.3, C.sub.2 Cl.sub.2 F.sub.4 and C.sub.2 Cl.sub.4 F.sub.2, are contacted under disproportionation conditions with a catalyst system of a specific type which comprises 0.1 - 5% by weight, as metal, of a nickel(II) halide, titanium(III) chloride or titanium(III) fluoride and a balance of an aluminum compound such as activated alumina, silica, alumina or aluminum fluoride.
摘要翻译： 一种制备含氟低级有机化合物的方法，该有机氟化合物含氟低于氟含量的有机氟化合物，其中起始部分或完全卤代氟化碳具有至少一个除氟以外的卤素原子，例如CHCl 2 F，CHClF 2，CCl 2 F 2 ，CCl 3 F，C 2 Cl 3 F 3，C 2 Cl 2 F 4和C 2 Cl 4 F 2在歧化条件下与特定类型的催化剂体系接触，所述催化剂体系包含0.1-5重量％的金属，卤化镍（II），氯化钛（III） III）氟化物和余量的铝化合物如活性氧化铝，二氧化硅，氧化铝或氟化铝。
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公开(公告)号：US4057614A
公开(公告)日：1977-11-08
申请号：US738626
申请日：1976-11-03
申请人： Tetsuhiro Ono , Minoru Aramaki , Tamotsu Mizuno , Masao Fujinaga
发明人： Tetsuhiro Ono , Minoru Aramaki , Tamotsu Mizuno , Masao Fujinaga
CPC分类号： C01D3/02 , C01B33/103 , C01B33/186 , C01C1/162 , C01P2006/80 , C01P2006/82
摘要： A process for producing sodium fluoride from sodium silicofluoride in which sodium silicofluoride is added to an ammonium fluoride solution for double decomposition reaction to obtain a slurry containing sodium fluoride as crystals and ammonium silicofluoride in dissolved form, and the solution from which the sodium fluoride crystals have been removed is added with ammonia to decompose the ammonium silicofluoride into silica and ammonium fluoride. The ammonium fluoride obtained by the decomposition is recycled to the double decomposition step. Alternatively, the ammonium fluoride is reacted with a sodium salt for recovery as sodium fluoride.
摘要翻译： 一种从氟硅化钠中生产氟化钠的方法，其中将氟化钠加入到氟化氢溶液中用于双重分解反应，得到溶解形式的含有氟化钠和含氟硅酸铵的浆料，以及氟化钠晶体具有的溶液 加入氨，将硅酸铵分解成二氧化硅和氟化铵。 通过分解得到的氟化铵被再循环到双重分解步骤。 或者，氟化铵与钠盐反应，作为氟化钠回收。
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