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公开(公告)号:US07541275B2
公开(公告)日:2009-06-02
申请号:US10828592
申请日:2004-04-21
申请人: Betty Shu Mercer , Erika Leigh Shoemaker , Byron Lovell Williams , Laurinda W. Ng , Alec J. Morton , C. Matthew Thompson
发明人: Betty Shu Mercer , Erika Leigh Shoemaker , Byron Lovell Williams , Laurinda W. Ng , Alec J. Morton , C. Matthew Thompson
IPC分类号: H01L21/44
CPC分类号: H01L24/11 , H01L2224/039 , H01L2224/03912 , H01L2224/0401 , H01L2224/05005 , H01L2224/05027 , H01L2224/05124 , H01L2224/05147 , H01L2224/05166 , H01L2224/05171 , H01L2224/0518 , H01L2224/05184 , H01L2224/05572 , H01L2224/05647 , H01L2224/1147 , H01L2224/13007 , H01L2224/13022 , H01L2224/13099 , H01L2924/0002 , H01L2924/01006 , H01L2924/01013 , H01L2924/01018 , H01L2924/01022 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/01042 , H01L2924/01046 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/14 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/30105 , H01L2224/05552 , H01L2924/00014 , H01L2924/013
摘要: The present invention provides an interconnect for use in an integrated circuit, a method for manufacturing the interconnect, and a method for manufacturing an integrated circuit including the interconnect. The interconnect (100), among other elements, includes a surface conductive lead (160) located in an opening formed within a protective overcoat (110), and a barrier layer (140) located between the protective overcoat (110) and the surface conductive lead (160), a portion of the barrier layer (140) forming a skirt (145) that extends outside a footprint of the surface conductive lead (160).
摘要翻译: 本发明提供了一种用于集成电路的互连,一种用于制造该互连的方法,以及一种用于制造包括该互连的集成电路的方法。 除了其它元件之外,互连(100)包括位于形成在保护外涂层(110)内的开口中的表面导电引线(160)和位于保护外涂层(110)和表面导电 导线(160),阻挡层(140)的形成裙部(145)的部分延伸到表面导电引线(160)的覆盖区外部。
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公开(公告)号:US06657832B2
公开(公告)日:2003-12-02
申请号:US09843395
申请日:2001-04-26
IPC分类号: H01G212
CPC分类号: H01H59/0009 , H01G5/16 , H01H2059/0072
摘要: The present invention includes an integrated circuit switch including a membrane supported over a first conductor on a substrate, a conductive region on the membrane and connecting to the first conductor on the substrate, a pulldown electrode on the substrate and under the membrane and a pillar to support the membrane after the pulldown threshold has been reached. A voltage greater than a pulldown threshold is applied between the membrane and the pulldown electrode will pull the membrane down to make a capacitive coupling to the first conductor. The addition of the pillars increases the upward restoring force when the activation voltage is removed.
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