公开(公告)号：US08994916B2

公开(公告)日：2015-03-31

申请号：US13523924

申请日：2012-06-15

Applicant: Wenhui Mei ,  Weichong Du ,  Lujie Qu

Inventor： Wenhui Mei ,  Weichong Du ,  Lujie Qu

IPC: G03F7/20 ,  G03F9/00

CPC classification number: G03F7/2032 ,  G03F7/2057 ,  G03F7/70275 ,  G03F7/70291 ,  G03F7/70425 ,  G03F9/00 ,  G03F9/7088

Abstract: A double-sided maskless exposure system and method consists of light sources which includes two light wavelength segments, maskless optical engines in which a 2D spatial light modulation (spatial light modulator) device, such as DMD, is generating a plurality of pixel array of the pattern, vision system, moving substrate and computer control system. The double-sided maskless exposure system at least includes two maskless optical engines with auto-calibration function which can correct any alignment error in-line. Each optical engine is for each side of the substrate. The optical engines are aligned each other in pairs and are simultaneously patterning on each side of the moving substrate. The system also includes a manipulator for moving, stepping or scanning the optical engines, relative to the substrate so that it can create a contiguous whole image on the both sides of the subject.

Abstract translation: 双面无掩模曝光系统和方法由包括两个光波长段的光源组成，其中2D空间光调制（空间光调制器）设备（诸如DMD）正在产生多个像素阵列的无掩模光学引擎 图案，视觉系统，移动基板和计算机控制系统。 双面无掩模曝光系统至少包括具有自动校正功能的两个无掩模光学引擎，可以校正任何对准误差。 每个光学引擎用于衬底的每一侧。 光学引擎成对地彼此对准，并且在移动的基板的每一侧上同时进行图案化。 该系统还包括用于相对于基板移动，步进或扫描光学引擎的操纵器，使得其可以在对象的两侧上创建连续的整个图像。

公开(公告)号：US20110051093A1

公开(公告)日：2011-03-03

申请号：US12547890

申请日：2009-08-26

Applicant: Lujie Qu

Inventor： Lujie Qu

IPC: G02B27/28 ,  G03B21/14

CPC classification number: G02B27/285 ,  G03B21/2073

Abstract: A polarization conversion apparatus capable of converting natural incident light into linear light with single polarization for emission includes a plurality of prisms arrayed as a whole component, a plurality of half-wave plates arranged at emission surfaces of some of the prisms, and a plurality of faying surfaces defined inside and a plurality of side surfaces defined outside. Some of the faying surfaces include polarization beam splitting films formed thereon to form polarization beam splitting surfaces, and one faying surface and the side surfaces include total reflection films formed thereon to form total reflection surfaces.

Abstract translation: 能够将单个发光的自然入射光转换为线性光的偏振光转换装置包括排列成整体的多个棱镜，排列在一些棱镜的发射面的多个半波片，以及多个 限定在内部的接合表面和限定在外侧的多个侧表面。 一些配合面包括形成在其上的偏振分束膜，以形成偏振分束表面，并且一个贴合表面和侧表面包括形成在其上的全反射膜以形成全反射面。

公开(公告)号：US08403496B2

公开(公告)日：2013-03-26

申请号：US12831483

申请日：2010-07-07

Applicant: Lujie Qu ,  Guoxin Gao ,  Jing Lin ,  Jianhang He ,  Xin Wang

Inventor： Lujie Qu ,  Guoxin Gao ,  Jing Lin ,  Jianhang He ,  Xin Wang

IPC: G03B21/36

CPC classification number: H04N9/3173 ,  G02B13/16 ,  G02B27/1006 ,  H04N9/3111 ,  H04N9/315

Abstract: A high efficiency micro projection optical engine includes a light source module, a lens assembly, a micro display panel and a projection lens. An image of the luminous surface of light emitting elements of the light source module is formed in the vicinity of the micro display panel. The micro display panel is arranged on the path of emission light of the lens assembly to modulate incident light and obtain image light with image information. The projection lens is used to project the image information on the micro display panel and form an image onto a screen. The optical engine enhances efficiency by means of critical illumination.

Abstract translation: 高效微投影光学引擎包括光源模块，透镜组件，微显示面板和投影透镜。 光源模块的发光元件的发光面的图像形成在微显示面板的附近。 微型显示面板布置在透镜组件的发射光的路径上以调制入射光并获得具有图像信息的图像光。 投影透镜用于将图像信息投影到微显示面板上并在屏幕上形成图像。 光学引擎通过临界照明提高效率。

公开(公告)号：US20130088704A1

公开(公告)日：2013-04-11

申请号：US13648944

申请日：2012-10-10

Applicant: Wenhui Mei ,  Weichong Du ,  Lujie Qu

Inventor： Wenhui Mei ,  Weichong Du ,  Lujie Qu

IPC: G03B27/58

CPC classification number: G03F7/20 ,  G03F7/70275 ,  G03F7/70291 ,  G03F7/70358 ,  G03F7/70725 ,  G03F7/70791

Abstract: A maskless exposure system that has multiple maskless optical engines arranged in an (N×M) matrix that form and project a pattern onto a substrate. A first stage system is capable of driving the maskless optical engines in a first direction, a second stage system capable of holding and moving the substrate in a second direction perpendicular to the first direction. A control system that processes data and synchronizing movement of the first and second stage systems and a vision system that detects the positions of the second stage system to synchronize movements with the multiple optical engines.

Abstract translation: 一种无掩模曝光系统，其具有以（N×M）矩阵排列的多个无掩模光学引擎，其形成并将图案投影到基板上。 第一级系统能够在第一方向上驱动无掩模光学引擎，第二级系统能够在垂直于第一方向的第二方向上保持和移动衬底。 一种控制系统，其处理第一和第二平台系统的数据和同步运动，以及视觉系统，其检测第二平台系统的位置以与多个光学引擎同步运动。

公开(公告)号：US20130044300A1

公开(公告)日：2013-02-21

申请号：US13523924

申请日：2012-06-15

Applicant: Wenhui Mei ,  Weichong Du ,  Lujie Qu

Inventor： Wenhui Mei ,  Weichong Du ,  Lujie Qu

IPC: G03B27/68

CPC classification number: G03F7/2032 ,  G03F7/2057 ,  G03F7/70275 ,  G03F7/70291 ,  G03F7/70425 ,  G03F9/00 ,  G03F9/7088

Abstract: A double-sided maskless exposure system and method consists of light sources which includes two light wavelength segments, maskless optical engines in which a 2D spatial light modulation(spatial light modulator) device, such as DMD, is generating a plurality of pixel array of the pattern, vision system, moving substrate and computer control system. The double-sided maskless exposure system at least includes two maskless optical engines with auto-calibration function which can correct any alignment error in-line. Each optical engine is for each side of the substrate. The optical engines are aligned each other in pairs and are simultaneously patterning on each side of the moving substrate. The system also includes a manipulator for moving, stepping or scanning the optical engines, relative to the substrate so that it can create a contiguous whole image on the both sides of the subject.

Abstract translation: 双面无掩模曝光系统和方法由包括两个光波长段的光源组成，其中2D空间光调制（空间光调制器）设备（诸如DMD）正在产生多个像素阵列的无掩模光学引擎 图案，视觉系统，移动基板和计算机控制系统。 双面无掩模曝光系统至少包括具有自动校正功能的两个无掩模光学引擎，可以校正任何对准误差。 每个光学引擎用于衬底的每一侧。 光学引擎成对地彼此对准，并且在移动的基板的每一侧上同时进行图案化。 该系统还包括用于相对于基板移动，步进或扫描光学引擎的操纵器，使得其可以在对象的两侧上创建连续的整个图像。

公开(公告)号：US20090279003A1

公开(公告)日：2009-11-12

申请号：US12351104

申请日：2009-01-09

Applicant: Lujie QU ,  Rengui WANG

Inventor： Lujie QU ,  Rengui WANG

IPC: G02F1/13357

CPC classification number: G02B27/283

Abstract: A liquid-crystal projection system includes a light source emitting unpolarized light, a polarizing beam splitter, a single liquid crystal panel receiving polarized light P from said polarizing be m splitter, a projection lens, and a pre-polarizer placed between said light source and said polarizing beam splitter for polarizing said unpolarized light. The pre-polarizer includes a plurality of prisms combined together in succession, in which a plurality of inclined planes formed and connected continuously with each other, and a polarizing beam splitting film attached to said inclined plane configuring a polarizing beam splitting surface.

Abstract translation: 液晶投影系统包括发射非偏振光的光源，偏振分束器，从所述偏振分光器接收偏振光P的单个液晶面板，投影透镜和放置在所述光源和 所述偏振分束器用于偏振所述非偏振光。 预偏振器包括多个棱镜，其连续组合在一起，其中多个倾斜平面彼此连续形成和连接，以及偏振分束膜，附着到构成偏振分束表面的所述倾斜平面。

公开(公告)号：US09001305B2

公开(公告)日：2015-04-07

申请号：US13648944

申请日：2012-10-10

Applicant: Wenhui Mei ,  Weichong Du ,  Lujie Qu

Inventor： Wenhui Mei ,  Weichong Du ,  Lujie Qu

IPC: G03B27/42 ,  G03B27/58 ,  G03F7/20

CPC classification number: G03F7/20 ,  G03F7/70275 ,  G03F7/70291 ,  G03F7/70358 ,  G03F7/70725 ,  G03F7/70791

Abstract: A maskless exposure system that has multiple maskless optical engines arranged in an (N×M) matrix that form and project a pattern onto a substrate. A first stage system is capable of driving the maskless optical engines in a first direction, a second stage system capable of holding and moving the substrate in a second direction perpendicular to the first direction. A control system that processes data and synchronizing movement of the first and second stage systems and a vision system that detects the positions of the second stage system to synchronize movements with the multiple optical engines.

Abstract translation: 一种无掩模曝光系统，其具有以（N×M）矩阵排列的多个无掩模光学引擎，其形成并将图案投影到基板上。 第一级系统能够在第一方向上驱动无掩模光学引擎，第二级系统能够在垂直于第一方向的第二方向上保持和移动衬底。 一种控制系统，其处理第一和第二平台系统的数据和同步运动，以及视觉系统，其检测第二平台系统的位置以与多个光学引擎同步运动。

公开(公告)号：US20110007240A1

公开(公告)日：2011-01-13

申请号：US12831483

申请日：2010-07-07

Applicant: Lujie Qu ,  Guoxin Gao ,  Jing Lin ,  Jianhang He ,  Xin Wang

Inventor： Lujie Qu ,  Guoxin Gao ,  Jing Lin ,  Jianhang He ,  Xin Wang

IPC: G02F1/1335 ,  G03B21/14

CPC classification number: H04N9/3173 ,  G02B13/16 ,  G02B27/1006 ,  H04N9/3111 ,  H04N9/315

Abstract: A high efficiency micro projection optical engine includes a light source module, a lens assembly, a micro display panel and a projection lens. Wherein the light source module includes light emitting elements and shaping lens module used to collect and shape the received light beams. The lens assembly is arranged on the path of the emission light of the shaping lens assembly. The shaping lens module and lens assembly form an image of the luminous surface of the light emitting elements in the vicinity of the micro display panel. The micro display panel which is arranged on the path of emission light of the lens assembly modulate incident light and image light with image information is obtained. The projection lens is used to project the image information on the micro display panel and form an image onto a screen. The optical engine of present invention enhances efficiency by means of critical illumination, furthermore, the whole optical engine only relates to illumination device, micro display panel and projection lens, so the optical system has the features that the design of light path is simple and advantage of compact structure and small size.

Abstract translation: 高效微投影光学引擎包括光源模块，透镜组件，微显示面板和投影透镜。 其中光源模块包括用于收集和成形所接收的光束的发光元件和成形透镜模块。 透镜组件布置在成形透镜组件的发射光的路径上。 整形透镜模块和透镜组件形成微显示面板附近的发光元件的发光表面的图像。 获得布置在透镜组件的发射光路径上的微显示面板，利用图像信息调制入射光和图像光。 投影透镜用于将图像信息投影到微显示面板上并在屏幕上形成图像。 本发明的光学引擎通过临界照明提高了效率，而且整个光学引擎仅涉及照明装置，微型显示面板和投影透镜，因此光学系统具有光路设计简单和优点的特点 结构紧凑，体积小。