利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

15 条记录 (耗时 0.014 秒)

    System and method for moving a component through a setpoint profile, lithographic apparatus and device manufacturing method
    1.
    发明授权
    System and method for moving a component through a setpoint profile, lithographic apparatus and device manufacturing method 有权
    通过设定点曲线移动组件的系统和方法，光刻设备和设备制造方法

    公开(公告)号：US07774287B2

    公开(公告)日：2010-08-10

    申请号：US11374416

    申请日：2006-03-14

    申请人： Marcel François Heertjes ,  Yin-Tim Tso ,  Edwin Teunis Van Donkelaar

    发明人： Marcel François Heertjes ,  Yin-Tim Tso ,  Edwin Teunis Van Donkelaar

    IPC分类号： G06F15/00 ,  G06F17/00

    CPC分类号： G05B19/371 ,  G05B2219/41451

    摘要： A system to move a component in accordance with a setpoint profile including a plurality of target states of the component, each of the plurality of target states to be substantially attained at one of a corresponding sequence of target times, is presented. The system includes a displacement device to move the component according to the setpoint profile; a storage device containing a library of feedforward data; a signal generating part configured to identify a plurality of time segments of the setpoint profile that correspond to entries in the library of feedforward data, and access the entries in order to construct a feedforward signal; and a feedforward control system to control the operation of the displacement device by reference to the feedforward signal constructed by the signal generating part.

    摘要翻译： 呈现了根据包括组件的多个目标状态的设定曲线移动组件的系统，其中多个目标状态中的每一个基本上在相应的目标时间序列之一上实现。 该系统包括一个移动装置，用于根据设定点轮廓移动该部件; 一个包含前馈数据库的存储设备; 信号产生部件，被配置为识别与所述前馈数据库中的条目相对应的所述设定点简档的多个时间段，并且访问所述条目以构造前馈信号; 以及前馈控制系统，通过参照由信号产生部构成的前馈信号来控制位移装置的动作。

    Vibration isolation system
    4.
    发明授权
    Vibration isolation system 有权
    隔振系统

    公开(公告)号：US07817243B2

    公开(公告)日：2010-10-19

    申请号：US10822139

    申请日：2004-04-12

    申请人： Marcel François Heertjes ,  Jan-Gerard Cornelis Van Der Toorn

    发明人： Marcel François Heertjes ,  Jan-Gerard Cornelis Van Der Toorn

    IPC分类号： G03B27/42

    CPC分类号： F16F15/02 ,  G03F7/709

    摘要： A vibration isolation system isolates a body from its surroundings with respect to vibrations. The vibration isolation system includes active isolator devices that isolate and damp the body in unstable directions. However, such active isolators may exert damping forces not only in the unstable direction, but simultaneously in other stable directions due to mechanical coupling of the stable and unstable directions. As a result the damping and isolation in the other stable directions may be deteriorated due to the active isolation and damping. Employing modal decoupling, i.e. decomposing any vibration into independent directions, and isolating and damping in the independent directions, enables compensation of any vibration in an unstable direction without influencing the isolation and damping performance in any other, possibly stable, direction.

    摘要翻译： 振动隔离系统将身体与其周围环境相隔离。 隔振系统包括主动隔离装置，可在不稳定的方向隔离和潮湿身体。 然而，这种有源隔离器不仅可以在不稳定的方向施加阻尼力，而且可以由于稳定和不稳定方向的机械耦合而在其它稳定的方向上施加阻尼力。 结果，由于主动隔离和阻尼，其它稳定方向的阻尼和隔离可能会恶化。 采用模态去耦，即将任何振动分解为独立的方向，以及在独立方向上进行隔离和阻尼，可以补偿不稳定方向上的任何振动，而不会影响任何其他可能稳定的方向的隔离和阻尼性能。

    Lithographic apparatus and control system
    5.
    发明授权
    Lithographic apparatus and control system 有权
    平版印刷设备和控制系统

    公开(公告)号：US08373849B2

    公开(公告)日：2013-02-12

    申请号：US12580328

    申请日：2009-10-16

    申请人： Marcel François Heertjes

    发明人： Marcel François Heertjes

    IPC分类号： G03B27/58 ,  G03B27/62 ,  G03B27/42 ,  G03B27/32

    CPC分类号： G03F7/70758 ,  G03F7/70525

    摘要： A control system to control a position quantity of a movable object in dependency of signals provided by a sensor representing an actual position quantity of the moveable object, the control system being configured to provide a drive signal to an actuator which is able to apply forces to the moveable object, the control system including a set-point generator to provide a reference signal; a subtractor to provide an error signal, the error signal being the difference between the reference signal and the signals provided by the sensor; a control unit to provide a drive signal to the actuator in dependency of the error signal, wherein the control unit comprises a nonlinear controller to improve a low-frequency disturbance suppression, and wherein the control unit further includes a compensator to at least partially compensate the deterioration of the high-frequency behavior caused by the nonlinear controller.

    摘要翻译： 一种控制系统，用于根据表示可移动物体的实际位置量的传感器提供的信号来控制可移动物体的位置量，所述控制系统被配置为向能够施加力的致动器提供驱动信号 所述可移动物体，所述控制系统包括设定点发生器以提供参考信号; 提供误差信号的减法器，误差信号是参考信号和由传感器提供的信号之间的差; 控制单元，用于根据所述误差信号向所述致动器提供驱动信号，其中所述控制单元包括非线性控制器以改善低频干扰抑制，并且其中所述控制单元还包括补偿器，以至少部分地补偿 由非线性控制器引起的高频行为的恶化。

    CONTROL SYSTEM, LITHOGRAPHIC APPARATUS AND A METHOD TO CONTROL A POSITION QUANTITY OF A CONTROL LOCATION OF A MOVABLE OBJECT
    6.
    发明申请
    CONTROL SYSTEM, LITHOGRAPHIC APPARATUS AND A METHOD TO CONTROL A POSITION QUANTITY OF A CONTROL LOCATION OF A MOVABLE OBJECT 有权
    控制系统，光栅设备和控制可移动物体的控制位置的位置数量的方法

    公开(公告)号：US20100182585A1

    公开(公告)日：2010-07-22

    申请号：US12683228

    申请日：2010-01-06

    申请人： Marcel François HEERTJES ,  Daan Willem Theresia Hennekens

    发明人： Marcel François HEERTJES ,  Daan Willem Theresia Hennekens

    IPC分类号： G03B27/58 ,  G05B13/02

    CPC分类号： G03B27/58 ,  G03F7/70725

    摘要： A control system configured to position a control location of a movable object in two or more degrees of freedom with respect to another object, including a set-point generator, a position quantity measurement system, a controller including a single input-single output controller for each degree of freedom to control a position quantity of the control location, each controller providing a control signal in logical coordinates on the basis of the error signal; and a gain scheduling device to provide centre-of-gravity control signals in centre-of gravity coordinates on the basis of the control signals, wherein the gain scheduling device includes a static and a dynamic relationship between logical coordinates and centre-of-gravity coordinates of the movable object.

    摘要翻译： 一种控制系统，其被配置为将可移动物体的控制位置相对于另一物体定位在两个或更多个自由度，包括设定点发生器，位置量测量系统，包括单个输入单输出控制器 每个自由度控制控制位置的位置数量，每个控制器基于误差信号提供逻辑坐标中的控制信号; 以及增益调度装置，其基于所述控制信号提供重心坐标中的重心控制信号，其中所述增益调度装置包括逻辑坐标与重心坐标之间的静态和动态关系 的可移动物体。

    Lithographic Apparatus and Device Manufacturing Method
    8.
    发明申请
    Lithographic Apparatus and Device Manufacturing Method 有权
    光刻设备和器件制造方法

    公开(公告)号：US20120188528A1

    公开(公告)日：2012-07-26

    申请号：US13335212

    申请日：2011-12-22

    申请人： Marcus Joseph Elisabeth Godfried BREUKERS ,  Marcel François HEERTJES ,  Niels Johannes Maria BOSCH

    发明人： Marcus Joseph Elisabeth Godfried BREUKERS ,  Marcel François HEERTJES ,  Niels Johannes Maria BOSCH

    IPC分类号： G03B27/58

    CPC分类号： G03F7/70725 ,  G03F7/70733

    摘要： A lithographic apparatus comprises an object table for receiving an object, an actuator for moving the object table and a handler for transferring the object to or from the object table. The apparatus is provided with a controller operable connected with the actuator and/or the handler. The controller is programmed and/or arranged to drive the actuator and the handler so as to provide that the object table and the handler substantially follow each other in a direction perpendicular to a transfer direction during transfer in the transfer direction of the object to or from the object table.

    摘要翻译： 光刻设备包括用于接收物体的物体表，用于移动物体表的致动器和用于将物体传送到物体表的处理器。 该设备设置有可操作地与致动器和/或处理器连接的控制器。 控制器被编程和/或布置成驱动致动器和处理器，以便使物件台和处理器在物体的传送方向上或之间基本上沿着与传送方向垂直的方向彼此跟随 对象表。

    Method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
    10.
    发明授权
    Method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device 有权
    用于控制定位装置，定位装置和设置有定位装置的光刻设备的方法

    公开(公告)号：US07453228B2

    公开(公告)日：2008-11-18

    申请号：US11399589

    申请日：2006-04-07

    申请人： Marcel François Heertjes ,  Yin Tim Tso ,  Ramidin Izair Kamidi ,  Dennis Andreas Petrus Hubertina Houben

    发明人： Marcel François Heertjes ,  Yin Tim Tso ,  Ramidin Izair Kamidi ,  Dennis Andreas Petrus Hubertina Houben

    IPC分类号： G05B5/01

    CPC分类号： G05B19/19 ,  G05B2219/41029 ,  G05B2219/42249 ,  G05B2219/45031

    摘要： In a method for controlling a positioning device, the positioning device has a stator and mover, the mover being movable relative to the stator; a position sensor configured to generate a position signal indicative of a position of the mover relative to the stator; a controller configured to receive the position signal, compare it to a setpoint signal to obtain an error signal, and generate a mover control signal on the basis of a signal component of the position signal, the controller having a variable gain. The positioning device, including the position sensor and the controller, defines a control loop. For error signals having a magnitude in a predefined range, the gain is selectively set to a value higher than a value for error signals having a magnitude outside the range.

    摘要翻译： 在一种用于控制定位装置的方法中，所述定位装置具有定子和移动器，所述动子可相对于所述定子移动; 位置传感器，被配置为产生指示所述动子相对于所述定子的位置的位置信号; 控制器，被配置为接收所述位置信号，将其与设定点信号进行比较以获得误差信号，并且基于所述位置信号的信号分量，所述控制器具有可变增益来生成移动器控制信号。 定位装置，包括位置传感器和控制器，定义一个控制回路。 对于具有预定范围内的幅度的误差信号，增益被选择性地设置为高于具有在该范围之外的幅度的误差信号的值的值。