公开(公告)号：US20100045970A1

公开(公告)日：2010-02-25

申请号：US12228539

申请日：2008-08-12

申请人： Markus B. Raschke

发明人： Markus B. Raschke

IPC分类号： G01J3/443 ,  G01J3/00

CPC分类号： G01J3/02 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/108 ,  G01J3/36 ,  G01J3/42 ,  G01J3/453 ,  G01Q30/02 ,  G01Q60/58

摘要： A method for performing sub-micron optical spectroscopy, using a heated SPM probe and far-field collection optics is described. The enhanced emission characteristics at a sharp heated tip constitute a highly localized wideband IR source. Thus the IR absorption and emission properties of a sample surface adjacent can be observed and measured in the farfield even though the interaction region is sub-micron in scale. . . . providing spatial resolution mapping of sample composition.

摘要翻译： 描述了使用加热的SPM探针和远场收集光学器件执行亚微米光谱的方法。 在尖锐的加热尖端处的增强的发射特性构成高度局部化的宽带IR源。 因此，即使相互作用区域在亚微米级别，也可以在远场观察和测量邻近的样品表面的IR吸收和发射性质。 。 。 。 提供样品组成的空间分辨率映射。

公开(公告)号：US08793811B1

公开(公告)日：2014-07-29

申请号：US13835312

申请日：2013-03-15

申请人： Craig Prater ,  Markus B. Raschke ,  Sam Berweger

发明人： Craig Prater ,  Markus B. Raschke ,  Sam Berweger

IPC分类号： G01Q30/02

CPC分类号： G01Q20/02 ,  G01Q30/02 ,  G01Q60/22

摘要： This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques.

摘要翻译： 本发明涉及通过近场光学显微镜（s-SNOM）附近的红外散射扫描测量具有亚微米空间分辨率的材料的光学性质。 具体地，本发明通过实现高信噪比，高测量速度和高的光学幅度和相位精度来提供比现有技术更大的改进。 此外，它不需要原位参考来计算光学相位或吸收光谱的波长相关光谱。 这些目标通过改进的不对称干涉测量来实现，其中近场散射光被干涉仪中的参考光束干扰。 本发明通过布置比背景散射辐射强得多的参考光束来实现背景抑制的显着改进。 结合频率选择解调技术，可以高效，准确地区分近场散射光与背景散射光。 这些目标通过一系列改进实现，包括大型动态范围检测器，仔细控制相对光束强度和高带宽解调技术。

公开(公告)号：US07977636B2

公开(公告)日：2011-07-12

申请号：US12228539

申请日：2008-08-12

申请人： Markus B. Raschke

发明人： Markus B. Raschke

IPC分类号： G01J5/02

CPC分类号： G01J3/02 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/108 ,  G01J3/36 ,  G01J3/42 ,  G01J3/453 ,  G01Q30/02 ,  G01Q60/58

摘要： A method for performing sub-micron optical spectroscopy, using a heated SPM probe and far-field collection optics is described. The enhanced emission characteristics at a sharp heated tip constitute a highly localized wideband IR source. Thus the IR absorption and emission properties of a sample surface adjacent can be observed and measured in the farfield even though the interaction region is sub-micron in scale. . . . providing spatial resolution mapping of sample composition.

摘要翻译： 描述了使用加热的SPM探针和远场收集光学器件进行亚微米光谱的方法。 在尖锐的加热尖端处的增强的发射特性构成高度局部化的宽带IR源。 因此，即使相互作用区域在亚微米级别，也可以在远场观察和测量邻近的样品表面的IR吸收和发射性质。 。 。 。 提供样品组成的空间分辨率映射。