公开(公告)号：US08793811B1

公开(公告)日：2014-07-29

申请号：US13835312

申请日：2013-03-15

申请人： Craig Prater ,  Markus B. Raschke ,  Sam Berweger

发明人： Craig Prater ,  Markus B. Raschke ,  Sam Berweger

IPC分类号： G01Q30/02

CPC分类号： G01Q20/02 ,  G01Q30/02 ,  G01Q60/22

摘要： This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques.

摘要翻译： 本发明涉及通过近场光学显微镜（s-SNOM）附近的红外散射扫描测量具有亚微米空间分辨率的材料的光学性质。 具体地，本发明通过实现高信噪比，高测量速度和高的光学幅度和相位精度来提供比现有技术更大的改进。 此外，它不需要原位参考来计算光学相位或吸收光谱的波长相关光谱。 这些目标通过改进的不对称干涉测量来实现，其中近场散射光被干涉仪中的参考光束干扰。 本发明通过布置比背景散射辐射强得多的参考光束来实现背景抑制的显着改进。 结合频率选择解调技术，可以高效，准确地区分近场散射光与背景散射光。 这些目标通过一系列改进实现，包括大型动态范围检测器，仔细控制相对光束强度和高带宽解调技术。

公开(公告)号：US20180059137A1

公开(公告)日：2018-03-01

申请号：US15249433

申请日：2016-08-28

申请人： Craig Prater

发明人： Craig Prater

IPC分类号： G01Q60/18

CPC分类号： G01Q60/18 ,  G01Q30/02 ,  G01Q60/06 ,  G02B21/002

摘要： Systems and methods that enable both spectroscopy and rapid chemical and/or optical imaging using a broadband light source. Broadband light sources may be advantageous for spectroscopy as they simultaneously illuminate a sample with a plurality of wavelengths and use interferometric techniques to determine a material response as a function of wavelength (or equivalently wavenumber). Some embodiments may enable the same radiation sources to be used to efficiently map the spatial distribution of chemical species or optical property variations. This may be achieved via selection of specific optical phase delays within an interferometer that are selected to maximize the contrast between different absorption bands or resonances within the sample. By optimally selecting specific interferometer phases it may be possible to construct images that substantially represent the material response to a specific wavelength excitation, without the necessity to obtain entire spectra at each sample location. This can provide orders of magnitude improvements in the measurement speed for required with a broadband source to provide compositional/optical property mapping.

公开(公告)号：US08646319B2

公开(公告)日：2014-02-11

申请号：US12660266

申请日：2010-02-23

申请人： Craig Prater ,  Kevin Kjoller

发明人： Craig Prater ,  Kevin Kjoller

IPC分类号： G01B5/28 ,  G01N21/84

CPC分类号： G01Q30/02

摘要： Dynamic IR radiation power control for use in a nanoscale IR spectroscopy system based on an Atomic Force Microscope. During illumination from an IR source, an AFM probe tip interaction with a sample due to local IR sample absorption is monitored. The power of the illumination at the sample is dynamically decreased to minimize sample overheating in locations/wavelengths where absorption is high and increased in locations/wavelengths where absorption is low to maintain signal to noise.

摘要翻译： 动态红外辐射功率控制，用于基于原子力显微镜的纳米级红外光谱系统。 在来自IR源的照射期间，监测由于局部IR样品吸收而导致的AFM探针尖端与样品的相互作用。 动态地降低样品照度的功率，以使吸收率高的位置/波长处的样品过热度最小化，吸收低的位置/波长增加，以保持信噪比。

公开(公告)号：US08418538B2

公开(公告)日：2013-04-16

申请号：US13289640

申请日：2011-11-04

申请人： A. Dazzi Dazzi ,  Clotilde Policar ,  Kevin Kjoller ,  Michael Reading ,  Konstantin Vodopyanov ,  Craig Prater

发明人： A. Dazzi Dazzi ,  Clotilde Policar ,  Kevin Kjoller ,  Michael Reading ,  Konstantin Vodopyanov ,  Craig Prater

IPC分类号： G01B5/28 ,  G01Q60/34 ,  G01N21/84

CPC分类号： G01Q30/02 ,  G01N21/3563 ,  G01Q60/32

摘要： An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Significant issues as to size, cost of implementation, and repeatability/robustness of results exist in commercializing the technique. The invention addresses many of these issues thereby producing a version of the analytical technique that can be made generally available to the scientific community.

公开(公告)号：US20110061452A1

公开(公告)日：2011-03-17

申请号：US12558150

申请日：2009-09-11

申请人： William P. King ,  Jonathan R. Felts ,  Craig Prater ,  Kevin Kjoller

发明人： William P. King ,  Jonathan R. Felts ,  Craig Prater ,  Kevin Kjoller

IPC分类号： G01B5/28

CPC分类号： G01Q60/38 ,  G01Q60/32

摘要： Described herein are devices and methods for sensing pulsed forces. Some of the described devices and methods are also useful for measuring infrared absorbances and compiling spectral and chemical maps of surfaces. Also described are microcantilever having reduced harmonic frequencies when operating in contact mode. Some of the described microcantilevers comprise an internal resonator configured to vibrate substantially independent of friction between the microcantilever tip and a surface when the microcantilever operates in contact mode. A number of the described devices and methods are useful for monitoring pulsed forces with enhanced sensitivity.

摘要翻译： 这里描述了用于感测脉冲力的装置和方法。 所描述的装置和方法中的一些也可用于测量红外吸收和编辑表面的光谱和化学图谱。 还描述了当在接触模式下操作时具有降低的谐波频率的微型悬臂梁。 所描述的微悬臂梁中的一些包括内部谐振器，其构造成当微悬臂操作在接触模式时基本上独立于微悬臂尖端和表面之间的摩擦而振动。 所描述的装置和方法中的许多用于以增强的灵敏度监测脉冲力。

公开(公告)号：US07770231B2

公开(公告)日：2010-08-03

申请号：US11832881

申请日：2007-08-02

申请人： Craig Prater ,  Chanmin Su ,  Nghi Phan ,  Jeffrey M. Markakis ,  Craig Cusworth ,  Jian Shi ,  Johannes H. Kindt ,  Steven F. Nagle ,  Wenjun Fan

发明人： Craig Prater ,  Chanmin Su ,  Nghi Phan ,  Jeffrey M. Markakis ,  Craig Cusworth ,  Jian Shi ,  Johannes H. Kindt ,  Steven F. Nagle ,  Wenjun Fan

IPC分类号： G01N23/00

CPC分类号： G01Q10/04 ,  G01Q10/065 ,  G01Q20/02 ,  G01Q60/38

摘要： A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.

摘要翻译： 提供一种具有在力控制反馈下快速扫描任意特征的大样本的能力的方法和装置，因此必须获得高分辨率图像。 该方法包括在SPM的探针和样品之间产生相对扫描运动，以至少以30线/秒的速率扫描探针至少4微米的扫描范围，并且控制与力控制回转的探针 - 样品相互作用 速率至少为1毫米/秒。 能够实现这些结果的优选SPM具有力控制器，其具有至少10kHz的至少闭环带宽的力控制带宽。

公开(公告)号：US20100042356A1

公开(公告)日：2010-02-18

申请号：US12228877

申请日：2008-08-15

申请人： Kevin Kjoller ,  Khoren Sahagian ,  Doug Gotthard ,  Anthony Kurtz ,  Craig Prater ,  Roshan Shetty ,  Michael Reading

发明人： Kevin Kjoller ,  Khoren Sahagian ,  Doug Gotthard ,  Anthony Kurtz ,  Craig Prater ,  Roshan Shetty ,  Michael Reading

IPC分类号： G01N25/02

CPC分类号： G01Q60/58 ,  G01Q30/04

摘要： A system and method for automatic analysis of temperature transition data over an area of a sample surface. The system relies on the use of a microfabricated probe, which can be rapidly heated and cooled and has a sharp tip to provide high spatial resolution. The system also has fast x-y-z positioners, data collection, and algorithms that allow automatic analysis of and visualization of temperature transition data.

摘要翻译： 用于在样品表面的区域上自动分析温度转变数据的系统和方法。 该系统依赖于使用微加工探针，其可以被快速加热和冷却，并且具有尖锐的尖端以提供高的空间分辨率。 该系统还具有快速的x-y-z定位器，数据采集和算法，可以自动分析和可视化温度转换数据。

公开(公告)号：US20080011065A1

公开(公告)日：2008-01-17

申请号：US11457079

申请日：2006-07-12

申请人： Chanmin Su ,  Robert C. Daniels ,  Craig Prater

发明人： Chanmin Su ,  Robert C. Daniels ,  Craig Prater

IPC分类号： G01B5/28

CPC分类号： G01Q10/045

摘要： A drive actuator for a measurement instrument having a probe, the drive actuator including a heating element in a thermally conductive relationship with the probe such that application of electric current to the heating element modifies a characteristic of the probe. The probe device includes a probe including a cantilever having a lever made of a material having a selected thermal expansivity and a drive actuator in operable cooperation with the cantilever lever made of a material having a thermal expansivity different than the thermal expansivity of the material of which the cantilever lever is made.

摘要翻译： 一种用于具有探针的测量仪器的驱动致动器，所述驱动致动器包括与所述探针具有导热关系的加热元件，使得向所述加热元件施加电流以改变所述探针的特性。 探针装置包括探针，其包括具有由具有选定的热膨胀性的材料制成的杆的悬臂，以及与由具有不同于其材料的热膨胀性的热膨胀性的材料制成的悬臂的可操作配合的驱动致动器 制作悬臂。

公开(公告)号：US20060000263A1

公开(公告)日：2006-01-05

申请号：US11106366

申请日：2005-04-14

申请人： Chanmin Su ,  Nghi Phan ,  Craig Prater

发明人： Chanmin Su ,  Nghi Phan ,  Craig Prater

IPC分类号： G01B5/28

CPC分类号： G01Q10/065 ,  G01Q60/366

摘要： A cantilever probe-based instrument is controlled to counteract the lateral loads imposed on the probe as a result of probe sample interaction. The probe preferably includes an active cantilever, such as a so-called bimorph cantilever. Force counteraction is preferably achieved by monitoring a lateral force-dependent property of probe operation such as cantilever free end deflection angle and applying a voltage to at least one of the cantilever and one or more separate actuators under feedback to maintain that property constant as the probe-sample spacing decreases. The probe could further uses at least one of contact flexural and torsional resonances characteristics to determine contact and release points. With the knowledge of the tip profile, quantitative mechanical data for probe sample interaction can be obtained.

公开(公告)号：US20160003868A1

公开(公告)日：2016-01-07

申请号：US14322768

申请日：2014-07-02

申请人： Craig Prater

发明人： Craig Prater

IPC分类号： G01Q60/18 ,  G01N21/47

CPC分类号： G01N21/47 ,  G01Q30/02 ,  G01Q60/22

摘要： This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it some embodiments, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near-field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques. In other embodiments, phase and amplitude stability are improved with a novel s-SNOM configuration.

摘要翻译： 本发明涉及通过近场光学显微镜（s-SNOM）附近的红外散射扫描测量具有亚微米空间分辨率的材料的光学性质。 具体地，本发明通过实现高信噪比，高测量速度和高的光学幅度和相位精度来提供比现有技术更大的改进。 另外，在一些实施例中，它消除了对原位参考以计算光学相位或吸收光谱的波长相关光谱的需要。 这些目标通过改进的不对称干涉测量来实现，其中近场散射光被干涉仪中的参考光束干扰。 本发明通过布置比背景散射辐射强得多的参考光束来实现背景抑制的显着改进。 结合频率选择解调技术，可以高效，准确地区分近场散射光与背景散射光。 这些目标通过一系列改进实现，包括大型动态范围检测器，仔细控制相对光束强度和高带宽解调技术。 在其他实施例中，利用新颖的s-SNOM配置来提高相位和幅度稳定性。