Method for the decoupled control of the quadrature and the resonance frequency of a micro-mechanical gyroscope
    2.
    发明授权
    Method for the decoupled control of the quadrature and the resonance frequency of a micro-mechanical gyroscope 有权
    微机械陀螺仪的正交解耦控制和谐振频率的方法

    公开(公告)号:US09377483B2

    公开(公告)日:2016-06-28

    申请号:US13634301

    申请日:2011-03-17

    摘要: A method for the precise measuring operation of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (qi) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between said trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (ũT, ŨT,0), a quadrature variable (ũT, ŨT,0) and a restoring variable (ũS).

    摘要翻译: 一种用于微机械转速传感器的精确测量操作的方法,包括至少一个地震质量,用于驱动主模式(qi)中的地震质量的至少一个驱动装置和共同地至少三个修整电极元件 与地震质量直接或间接相关。 在所述修整电极元件和地震块之间分别设置修整电压(u1,u2,u3,u4)。 根据谐振频率变量(ũT,ŨT,0),正交变量(ũT,ŨT,0)和恢复变量(ũS))调整每个微调电压(u1,u2,u3,u4)。

    METHOD FOR THE DECOUPLED CONTROL OF THE QUADRATURE AND THE RESONANCE FREQUENCY OF A MICRO-MECHANICAL GYROSCOPE
    4.
    发明申请
    METHOD FOR THE DECOUPLED CONTROL OF THE QUADRATURE AND THE RESONANCE FREQUENCY OF A MICRO-MECHANICAL GYROSCOPE 有权
    微机械陀螺仪的平移和谐振频率的解耦控制方法

    公开(公告)号:US20130199263A1

    公开(公告)日:2013-08-08

    申请号:US13634301

    申请日:2011-03-17

    IPC分类号: G01P15/125

    摘要: A method for the precise measuring operation of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (qi) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between said trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (ũT, ŨT,0), a quadrature variable (ũT, ŨT,0) and a restoring variable (ũS).

    摘要翻译: 一种用于微机械转速传感器的精确测量操作的方法,包括至少一个地震质量,用于驱动主模式(qi)中的地震质量的至少一个驱动装置和共同地至少三个修整电极元件 与地震质量直接或间接相关。 在所述修整电极元件和地震块之间分别设置修整电压(u1,u2,u3,u4)。 根据谐振频率变量(uT,UT,0),正交变量(uT,UT,0)和恢复变量(uS)来调整每个修整电压(u1,u2,u3,u4)。