公开(公告)号：US4807296A

公开(公告)日：1989-02-21

申请号：US743790

申请日：1985-06-12

申请人： Masaaki Ando ,  Masaaki Matsuzaka

发明人： Masaaki Ando ,  Masaaki Matsuzaka

IPC分类号： H05K3/00 ,  B23B39/04 ,  B23Q15/00 ,  G01B11/24 ,  G05B19/408 ,  G05B19/42 ,  G06K9/00

CPC分类号： G05B19/408 ,  G05B19/4205 ,  G05B2219/36495 ,  G05B2219/45129 ,  Y10T408/175

摘要： An automatic pattern original reading apparatus is disclosed in which perforation position coordinate data of a pattern original indicating a perforation position of a printed substrate is stored beforehand, and a hole diameter indication sheet having a colored indication which discriminates perforation diameter and which is located at a position corresponding to the perforation position of the pattern original is placed on a table. The table and an optical system for optically reading reflected light from the color indication through color filters are moved relatively to each other by position control circuits to the perforation position. The color detection output from the optical system is discriminated with respect to color by a color discrimination circuit, and the color discrimination output is stored in a memory as hole diameter information in a corresponding relationship with the perforation position coordinate data.

摘要翻译： 公开了一种自动图案原稿读取装置，其中预先存储表示印刷基板的穿孔位置的图案原稿的穿孔位置坐标数据，以及具有区分穿孔直径并位于其上的着色指示的孔径指示片 对应于图案原稿的穿孔位置的位置放在桌子上。 用于通过彩色滤光器从彩色指示光学读取反射光的工作台和光学系统通过位置控制电路相对于彼此移动到穿孔位置。 通过颜色鉴别电路鉴别来自光学系统的颜色检测输出，并将颜色鉴别输出作为与穿孔位置坐标数据对应关系的孔径信息存储在存储器中。

公开(公告)号：US5012105A

公开(公告)日：1991-04-30

申请号：US471280

申请日：1990-01-26

申请人： Masaaki Ando ,  Masaaki Matsuzaka ,  Masahiro Saita

发明人： Masaaki Ando ,  Masaaki Matsuzaka ,  Masahiro Saita

IPC分类号： H01J37/30 ,  H01J37/317

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/3007 ,  H01J37/3177

摘要： A multiple-imaging charged particle-beam exposure system includes a charged particle beam source, and a screen lens having lens apertures therein. A charged particle beam is emitted from the charged particle beam source. A beam emerging from each of the lens apertures of the screen lens is irradiated on an object to be exposed, to effect exposure on the object. An image forming electrode is interposed between the screen lens and the object for focusing beams emerging from the screen lens to form images at the image forming electrode. An acceleration/deceleration correcting lens is interposed between the image forming electrode and the object for limiting divergency of the images formed at the image forming electrode. A bias voltage controller applies a bias voltage relative to a potential at the image forming electrode to a surface of the object. Alternatively, a beam limiting aperture plate having beam limiting apertures therein is interposed between the charged particle beam source and the screen lens. A deflector, is interposed between the beam limiting aperture plate and the screen lens, individually deflects charged particle beams emerging from the beam limiting apertures. Alternatively, a limiting aperture shapes the charged particle beam emitted from the charged particle beam source. A drawing electrode takes out the charged particle beam via the limiting aperture, and a deflector deflects the charged particle beam. An Einzel lens is interposed between the drawing electrode and the deflector.

摘要翻译： 多成像带电粒子束曝光系统包括带电粒子束源和其中具有透镜孔的屏幕透镜。 带电粒子束从带电粒子束源发射。 从屏幕透镜的每个透镜孔径出射的光束照射在要曝光的物体上，以对物体进行曝光。 在屏幕透镜和物体之间插入图像形成电极，用于聚焦从屏幕透镜出射的光束，以在图像形成电极处形成图像。 在图像形成电极和物体之间插入加速/减速校正透镜，用于限制形成在图像形成电极处的图像的发散性。 偏置电压控制器将相对于图像形成电极处的电位的偏置电压施加到对象的表面。 或者，其中具有光束限制孔的光束限制孔板插入在带电粒子束源和屏幕透镜之间。 偏转器介于光束限制孔板和屏幕透镜之间，单独地偏转从光束限制孔出射的带电粒子束。 或者，限制孔形成从带电粒子束源发射的带电粒子束。 拉制电极通过限制孔取出带电粒子束，偏转器偏转带电粒子束。 一个Einzel透镜插在牵引电极和导流板之间。

公开(公告)号：US4659938A

公开(公告)日：1987-04-21

申请号：US654384

申请日：1984-09-25

申请人： Yoshiyuki Aoyama ,  Shuitsu Funabashi ,  Masaaki Matsuzaka

发明人： Yoshiyuki Aoyama ,  Shuitsu Funabashi ,  Masaaki Matsuzaka

IPC分类号： B23B39/08 ,  B23P19/00 ,  G05D3/12 ,  G06F17/50 ,  G06K7/12 ,  G06T1/00 ,  H05K1/02 ,  H05K1/11 ,  H05K3/00 ,  G06K7/10

CPC分类号： H05K3/0008 ,  G06K7/12 ,  H05K3/0002 ,  H05K1/0269 ,  H05K1/116 ,  H05K2203/056 ,  H05K2203/161 ,  H05K3/0047 ,  Y02T10/82

摘要： Hole diameter information is represented by color information. After detecting the color information, the detected color information is converted and generated into the hole diameter information. In this manner, a plurality of kinds of hole diameter information can be processed simultaneously, and efficiently with error reduction. The invention disclosed includes a pattern figure (2a) having a plurality of marks corresponding to holing positions of a printed board or the like and indicated by identification colors (3) corresponding to hole diameters of the holing positions. A detecting device 4 for generating detection signals corrsponding to the identification colors (2) of the marks in the pattern figure (2a), and hole diameter information generating means (6) for generating information representing the hole diameters by deciding the identification colors.

摘要翻译： 孔直径信息由颜色信息表示。 在检测到颜色信息之后，将检测到的颜色信息转换并生成到孔径信息中。 以这种方式，可以同时处理多种孔径信息，并且有效地进行误差减小。 所公开的发明包括具有对应于印刷板等的凹坑位置并由对应于孔位置的孔直径的识别颜色（3）表示的多个标记的图案图形（2a）。 一种检测装置4，用于产生响应于图形图（2a）中的标记的识别颜色（2）的检测信号，以及孔直径信息产生装置（6），用于通过确定识别颜色来产生表示孔直径的信息。