Method for manufacturing surface acoustic wave device
    1.
    发明授权
    Method for manufacturing surface acoustic wave device 有权
    声表面波装置的制造方法

    公开(公告)号:US07513022B2

    公开(公告)日:2009-04-07

    申请号:US11445586

    申请日:2006-06-01

    IPC分类号: H04R17/00

    摘要: A surface acoustic wave device is disclosed, which comprises a surface acoustic wave element including a lithium tantalate piezoelectric substrate 10 with one principal surface thereof formed with an IDT electrode 11, a connector electrode 12 and a periphery sealing electrode 13, and a base substrate 2 formed with an electrode 21 for connection to the element connected to the connector electrode 12 through a solder bump component 3 and a periphery sealing conductor film 22 joined to the periphery sealing electrode 13 thorough a solder sealing component 4. For the solder bump component 3 and the solder sealing component 4, a Sn—Sb based or Sn—Ag based lead-free solder containing 90% or more Sn is used, and the thermal expansion coefficient of the base substrate 2 is set in the range of 9-20 pm/° C. The joining is accomplished with high stability resisting thermal stress due to a difference in thermal expansion coefficient, so that a surface acoustic wave device that can maintain stable connection for a long duration of time can be provided.

    摘要翻译: 公开了一种弹性表面波器件,它包括一个表面声波元件,它包括其一个主表面形成有IDT电极11的钽酸锂压电基片10,一个连接器电极12和一个周边密封电极13,以及一个基底基片2 形成有用于通过焊料凸块部件3连接到连接到连接器电极12的元件的电极21和通过焊接密封部件4接合到周围密封电极13的周围密封导体膜22.对于焊料凸块部件3和 使用焊料密封部件4,含有Sn含量为90%以上的Sn-Sb系或Sn-Ag系无铅焊料,将基底基板2的热膨胀系数设定在9〜20μm/ ℃。由于热膨胀系数的差异,接合实现了高稳定性,抗热应力,从而可以保持稳定的表面声波装置 可以提供长时间的连接。

    Method for manufacturing surface acoustic wave device
    2.
    发明申请
    Method for manufacturing surface acoustic wave device 有权
    声表面波装置的制造方法

    公开(公告)号:US20060220500A1

    公开(公告)日:2006-10-05

    申请号:US11445586

    申请日:2006-06-01

    IPC分类号: H03H9/25

    摘要: A surface acoustic wave device is disclosed, which comprises a surface acoustic wave element including a lithium tantalate piezoelectric substrate 10 with one principal surface thereof formed with an IDT electrode 11, a connector electrode 12 and a periphery sealing electrode 13, and a base substrate 2 formed with an electrode 21 for connection to the element connected to the connector electrode 12 through a solder bump component 3 and a periphery sealing conductor film 22 joined to the periphery sealing electrode 13 thorough a solder sealing component 4. For the solder bump component 3 and the solder sealing component 4, a Sn—Sb based or Sn—Ag based lead-free solder containing 90% or more Sn is used, and the thermal expansion coefficient of the base substrate 2 is set in the range of 9-20 pm/° C. The joining is accomplished with high stability resisting thermal stress due to a difference in thermal expansion coefficient, so that a surface acoustic wave device that can maintain stable connection for a long duration of time can be provided.

    摘要翻译: 公开了一种弹性表面波器件,它包括一个表面声波元件,它包括其一个主表面形成有IDT电极11的钽酸锂压电基片10,一个连接器电极12和一个周边密封电极13,以及一个基底基片2 形成有用于通过焊料凸块部件3连接到连接到连接器电极12的元件的电极21和通过焊料密封部件4接合到周围密封电极13的周围密封导体膜22。 对于焊料凸块部件3和焊料密封部件4,使用含有90%以上Sn的Sn-Sb系或Sn-Ag系无铅焊料,将基底基板2的热膨胀系数设定在 范围为9-20μm/℃。由于热膨胀系数的差异,能够以高稳定性抵抗热应力实现接合,从而可以提供能够长时间保持稳定连接的表面声波装置 。

    Acceleration sensor
    3.
    发明授权
    Acceleration sensor 有权
    加速度传感器

    公开(公告)号:US07942055B2

    公开(公告)日:2011-05-17

    申请号:US12088920

    申请日:2005-10-04

    IPC分类号: G01P15/09

    CPC分类号: G01P15/0922 G01P1/023

    摘要: Disclosed is an acceleration sensor having a small variation in detection sensitivity, in which one end portion of an oscillation detecting element is fixed so that the free length thereof does not vary. Supporting resins 4a, 4b are formed in one end portion of the oscillation detecting element 3. With the oscillation detecting element being inserted into a through hole 2h of a holding member 2 provided in a case 1, the supporting resins 4a, 4b are in close contact with the inner periphery of the through hole 2h. As a result, the oscillation detecting element 3 is fixed to and held by the holding member 2.

    摘要翻译: 公开了一种检测灵敏度变化小的加速度传感器,其中振动检测元件的一个端部固定成其自由长度不变化。 支撑树脂4a,4b形成在振动检测元件3的一个端部。当振动检测元件插入设置在壳体1中的保持构件2的通孔2h中时,支撑树脂4a,4b处于闭合状态 与通孔2h的内周接触。 结果,振动检测元件3被保持构件2固定并保持。

    Acceleration Sensor
    5.
    发明申请
    Acceleration Sensor 有权
    加速度传感器

    公开(公告)号:US20090151453A1

    公开(公告)日:2009-06-18

    申请号:US12088920

    申请日:2005-10-04

    IPC分类号: G01P15/09

    CPC分类号: G01P15/0922 G01P1/023

    摘要: Disclosed is an acceleration sensor having a small variation in detection sensitivity, in which one end portion of an oscillation detecting element is fixed so that the free length thereof does not vary. Supporting resins 4a, 4b are formed in one end portion of the oscillation detecting element 3. With the oscillation detecting element being inserted into a through hole 2h of a holding member 2 provided in a case 1, the supporting resins 4a, 4b are in close contact with the inner periphery of the through hole 2h. As a result, the oscillation detecting element 3 is fixed to and held by the holding member 2.

    摘要翻译: 公开了一种检测灵敏度变化小的加速度传感器,其中振动检测元件的一个端部固定成其自由长度不变化。 支撑树脂4a,4b形成在振动检测元件3的一个端部。当振动检测元件插入设置在壳体1中的保持构件2的通孔2h中时,支撑树脂4a,4b处于闭合状态 与通孔2h的内周接触。 结果,振动检测元件3被保持构件2固定并保持。