利索-全球专利检索

  1. Login
  2. Sign Up

Search Results

23 records (took 0.015 seconds)

    Method and system for determining surface feature characteristics using slit detectors
    2.
    发明申请
    Method and system for determining surface feature characteristics using slit detectors 有权
    使用狭缝检测器确定表面特征特征的方法和系统

    公开(公告)号：US20050046829A1

    公开(公告)日：2005-03-03

    申请号：US10654242

    申请日：2003-09-03

    Applicant: Bryan Clark ,  Andrei Brunfeld

    Inventor： Bryan Clark ,  Andrei Brunfeld

    IPC: G01N21/00 ,  G01N21/47 ,  G01N21/89 ,  G01N21/95

    CPC classification number: G01N21/9501 ,  G01N21/47 ,  G01N2021/8905

    Abstract: A method and system for determining surface feature characteristics (including position and dimensions) using slit detectors provides a low-cost and high-speed measurement system for inspecting a surface. The system includes multiple slit detectors positioned so that a feature on a surface scanned by the system is detected by at least two detectors that are rotationally offset from each other and from the direction of scanning, a scanning control system for providing motion to the surface of interest in relation to the detectors, and an electronic analyzer for computing characteristics (including position and dimensions) of surface features. The location of surface features along an axis perpendicular to the direction of motion of the surface is determined from the relative timing between the presence of surface feature within the slit detector fields and the dimension of surface features in a direction crossing the short axis of a slit detector field is determined from the relative length of time the features remain in the slit detector field.

    Abstract translation: 使用狭缝检测器确定表面特征特征（包括位置和尺寸）的方法和系统提供了用于检查表面的低成本和高速测量系统。 该系统包括多个狭缝检测器，其定位成使得由系统扫描的表面上的特征由至少两个彼此旋转偏离并且与扫描方向相互偏移的检测器检测，用于向扫描方向提供运动的扫描控制系统 对检测器的兴趣，以及用于计算表面特征的特征（包括位置和尺寸）的电子分析器。 表面特征沿着垂直于表面运动方向的轴的位置由狭缝检测器场中的表面特征的存在与在狭缝的短轴交叉的方向上的表面特征的尺寸之间的相对定时确定 检测器场由特征保留在狭缝检测器场中的相对时间长度确定。

    Surface inspection apparatus and method
    3.
    发明授权
    Surface inspection apparatus and method 失效
    表面检查装置及方法

    公开(公告)号：US5225890A

    公开(公告)日：1993-07-06

    申请号：US783949

    申请日：1991-10-28

    Applicant: Ching-Chih Lee ,  James F. Roach

    Inventor： Ching-Chih Lee ,  James F. Roach

    IPC: G01N21/88 ,  G01N21/89

    CPC classification number: G01N21/8806 ,  G01N2021/4783 ,  G01N2021/8905 ,  G01N21/8803

    Abstract: An apparatus for inspecting a reflective surface of an article for defects includes a point light source for generally uniformly illuminating the entire surface of the article under inspection, and a diffusing screen for intercepting the light rays reflected from the surface under inspection of the article. The intercepted light rays produce a high resolution image on the screen consisting of bright and dark areas or spots corresponding to surface defects in the article under inspection.

    Abstract translation: 用于检查用于缺陷的物品的反射表面的装置包括用于大体上均匀地照射被检查物品的整个表面的点光源和用于截取从物品检查的表面反射的光线的漫射屏。 截取的光线在屏幕上产生高分辨率图像，该图像由明暗区域或对应于被检查物品中的表面缺陷的斑点产生。

    Massively parallel inspection and imaging system
    5.
    发明申请
    Massively parallel inspection and imaging system 有权

    公开(公告)号：US20010048521A1

    公开(公告)日：2001-12-06

    申请号：US09819347

    申请日：2001-03-27

    Applicant: KLA-Tencor Corporation

    Inventor： Mehdi Vaez-Iravani

    IPC: G01N021/00

    CPC classification number: G01N21/956 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/8905

    Abstract: A massively parallel inspection and imaging system is provided which employs multiple focused beams to illuminate a specimen. Laser light energy passes through a relatively low resolution diffraction grating or digital optical element, which is either one or two dimensional, and concentrates the transmitted energy into multiple discrete directions or orders. The beams split by the diffraction grating pass through a beam expander or telescope and are recombined onto an optical element and diverted toward the specimen. On reflection toward the specimen, the beams diverge again toward a focusing objective. The resultant light thus comprises multiple focused beams, and a relatively large area of the specimen is illuminated simultaneously by these beams. Upon reflection of the light from the sample, light passes back through the focusing objective in multiple beams, and the beams converge toward the optical element and diverge outward in collimated beams. The collimated beams pass through a focusing lens, which brings all beams onto foci on a detector array. Scanning of patterned wafers by the system may occur using coordinated motion of both the scanning beam and the wafer. To achieve proper orientation and observation, the stage speed in the cross direction is set at the ratio of the distance between the first and last lines divided by the period of the scanner.

    Surface state inspecting device for inspecting the state of parallel first and second surfaces
    7.
    发明授权
    Surface state inspecting device for inspecting the state of parallel first and second surfaces 失效
    表面状态检查装置，用于检查平行的第一和第二表面的状态

    公开(公告)号：US4999511A

    公开(公告)日：1991-03-12

    申请号：US493438

    申请日：1990-03-14

    Applicant: Michio Kohno

    Inventor： Michio Kohno

    IPC: G01N21/88 ,  G01N21/89 ,  G01N21/94 ,  G01N21/956 ,  G03F1/84 ,  H01L21/027 ,  H01L21/30

    CPC classification number: G01N21/94 ,  G01N2021/887 ,  G01N2021/8905 ,  G01N2021/95676 ,  G01N21/8851

    Abstract: A surface state inspecting device, usable with a sample having substantially parallel first and second surfaces coupled by a side wall, for inspecting the state of each of the surfaces, is disclosed. The device includes a light irradiating system for projecting light obliquely to the sample, from the first surface side; an inspecting system for receiving light from the first surface irradiated by the irradiating system and light from the second surface irradiated with the light passed through the first surface, for inspecting the first and second surfaces; and an inspection control system effective to set a time zone for inspection of the first surface so that it does not overlap with the moment at which light impinges on a boundary between the second surface and the side wall.

    Abstract translation: 公开了一种表面状态检查装置，其可用于具有大致平行的第一和第二表面的样品，该第一和第二表面通过侧壁联接，用于检查每个表面的状态。 该装置包括从第一表面侧将光倾斜地投射到样品的光照射系统; 用于接收由照射系统照射的第一表面的光和来自第二表面的光的检查系统，所述光穿过第一表面，用于检查第一和第二表面; 以及检查控制系统，其有效地设置用于检查第一表面的时间段，使得其不与光照射在第二表面和侧壁之间的边界上的时刻重叠。

    Optical sensor and method for optically inspecting surfaces
    9.
    发明授权
    Optical sensor and method for optically inspecting surfaces 失效
    用于光学检测表面的光学传感器和方法

    公开(公告)号：US07538866B2

    公开(公告)日：2009-05-26

    申请号：US11789228

    申请日：2007-04-24

    Applicant: Wolfgang Heine ,  Dieter Spriegel ,  Michael Stockmann ,  Martin Weber

    Inventor： Wolfgang Heine ,  Dieter Spriegel ,  Michael Stockmann ,  Martin Weber

    IPC: G01N21/88

    CPC classification number: G01N21/896 ,  G01N21/8901 ,  G01N21/958 ,  G01N33/386 ,  G01N2021/4716 ,  G01N2021/4735 ,  G01N2021/8905 ,  G01N2201/0642 ,  G01N2201/1042

    Abstract: In one aspect, an optical sensor is used to detect defects, which can appear on smooth surfaces, is provided. The sensor includes a telecentric laser scanner and a detection unit. The scanner includes a laser for the approximately perpendicular illumination of a smooth surface, a scanning mirror, and a telecentric optical system for guiding illumination and detection beams the detection unit includes an optical detector system, a central diaphragm, which is concentrically positioned in the vicinity of the optical detector system in the direction toward the telecentric laser scanner, a highly sensitive photomultiplier for detecting scattered light, which emanates from defects on smooth surfaces, and a slit diaphragm arranged upstream of the photomultiplier.

    Abstract translation: 在一个方面，提供光学传感器来检测出现在光滑表面上的缺陷。 传感器包括远心激光扫描仪和检测单元。 扫描器包括用于光滑表面的大致垂直照明的激光器，扫描镜和用于引导照射和检测光束的远心光学系统，该检测单元包括光学检测器系统，中心光阑，其同心地位于附近 的光检测器系统朝向远心激光扫描器的方向，用于检测由平滑表面上的缺陷产生的散射光的高灵敏度光电倍增器和布置在光电倍增管上游的狭缝光阑。

    APPARATUS FOR DETECTION OF THE ACCURACY OF FORMAT OF A WEB OF CORRUGATED CARDBOARD
    10.
    发明申请
    APPARATUS FOR DETECTION OF THE ACCURACY OF FORMAT OF A WEB OF CORRUGATED CARDBOARD 有权
    检测已修改卡片格式的格式的装置

    公开(公告)号：US20090091761A1

    公开(公告)日：2009-04-09

    申请号：US12247537

    申请日：2008-10-08

    Applicant: Helmut KRAUS ,  Markus HAUSNER

    Inventor： Helmut KRAUS ,  Markus HAUSNER

    IPC: G01N21/89

    CPC classification number: B31F1/2831 ,  G01B11/24 ,  G01N21/8901 ,  G01N2021/8905

    Abstract: An apparatus for detection of the accuracy of format of a web of corrugated cardboard moved in a conveying direction comprises a light source which emits a light band to the surface of the web of corrugated cardboard in a direction crosswise of the conveying direction and at an angle to the web of corrugated cardboard. A measuring camera detects the different light intensities of the light reflected by the plane portions and the profiled patterns of the web of corrugated cardboard. This electronic image in the camera is evaluated by an evaluation device for determining the distance of the profiled patterns from each other.

    Abstract translation: 用于检测在输送方向上移动的瓦楞纸板的幅材的格式精度的装置包括光源，该光源在与输送方向交叉的方向上以一定角度向波纹纸板的幅面发射光带 到瓦楞纸板网。 测量摄像机检测由平面部分反射的光的不同光强度和瓦楞纸板幅材的异形图案。 相机中的该电子图像由用于确定异型图案的距离彼此的评估装置进行评估。

Patent Agency Ranking