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公开(公告)号：US08023723B2
公开(公告)日：2011-09-20
申请号：US12268003
申请日：2008-11-10
申请人： Masamitsu Ito
发明人： Masamitsu Ito
IPC分类号： G06K9/00
CPC分类号： G06K9/4604 , G03F1/68 , G03F1/84 , G03F1/86 , G03F7/70625 , G06T7/0006 , G06T7/13 , G06T2207/10056 , G06T2207/30148 , H01L21/67265
摘要： A sidewall shape correction function is determined in advance which represents the relationship of the difference between contour positions of two or more items of pattern contour position data of different thresholds obtained from an SEM image and optical pattern contour positions determined through an optical method. Two or more items of pattern contour position data of different thresholds are obtained from SEM image data on which a lithographic simulation is to be conducted. Pseudo-optical pattern contour position data are determined from the contour position difference and the sidewall shape correction function. A lithographic simulation is conducted using the pseudo-optical pattern contour position data.
摘要翻译： 预先确定侧壁形状校正功能，其表示从SEM图像获得的不同阈值的两个或多个图案轮廓位置数据的轮廓位置之间的差异与通过光学方法确定的光学图案轮廓位置之间的差的关系。 从要进行光刻模拟的SEM图像数据获得不同阈值的两个或多个图案轮廓位置数据项。 根据轮廓位置差和侧壁形状校正功能确定伪光学轮廓位置数据。 使用伪光学图案轮廓位置数据进行光刻模拟。
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公开(公告)号：US20090160790A1
公开(公告)日：2009-06-25
申请号：US12142717
申请日：2008-06-19
IPC分类号： G06F3/041
CPC分类号： G01D5/2006 , G06F3/03545 , G06F3/046
摘要： A position detector is disclosed, which includes a sensor substrate having a sensor coil for receiving an electromagnetic wave output from a position indicator, and a magnetic path plate that has an area equal to or larger than an area in which the sensor coil is arranged on the sensor substrate. The magnetic path plate is formed by stacking an amorphous layer and a non-amorphous layer, which is formed of metal with relative magnetic permeability lower than that of the amorphous layer. Such magnetic path plate is arranged on a side of the sensor substrate opposite to a side facing the position indicator.
摘要翻译： 公开了一种位置检测器，其包括具有用于接收从位置指示器输出的电磁波的传感器线圈的传感器基板和具有等于或大于传感器线圈布置的区域的面积的磁路板 传感器基板。 磁路板是通过堆叠由相对磁导率低于非晶层的磁导率的金属形成的非晶层和非非晶层而形成的。 这样的磁路板被布置在传感器基板的与面向位置指示器的一侧相反的一侧。
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公开(公告)号：US07903085B2
公开(公告)日：2011-03-08
申请号：US11662839
申请日：2004-09-24
申请人： Sado Yamamoto , Masamitsu Ito , Yasuo Oda , Andrew Tozer , Ian Scholey
发明人： Sado Yamamoto , Masamitsu Ito , Yasuo Oda , Andrew Tozer , Ian Scholey
CPC分类号： G06F3/046 , G06F1/1613 , G06F1/3203
摘要： The present invention provides an electronic device comprising: —a position sensor (102; 302; 502), —a first integrated circuit component (106; 306; 506) coupled to the position sensor for acquisition of position data (112; 312), —a memory (114; 314) for storing the position data, a second integrated circuit component (108; 308), wherein the first integrated circuit component comprises means (110; 348) for signalling the acquisition of the position data to the second integrated circuit component, the second integrated circuit component comprising means (108; 364, 374) for reading the position data from the memory in response to the signalling.
摘要翻译： 本发明提供一种电子设备，包括： - 位置传感器（102; 302; 502）， - 耦合到所述位置传感器的用于采集位置数据（112; 312）的第一集成电路部件（106; 306; 506） - 用于存储位置数据的存储器（114; 314），第二集成电路部件（108; 308），其中所述第一集成电路部件包括用于发信号通知所述位置数据到所述第二集成电路 所述第二集成电路部件包括用于响应于所述信令从所述存储器读取位置数据的装置（108; 364,374）。
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公开(公告)号：US20090123058A1
公开(公告)日：2009-05-14
申请号：US12268003
申请日：2008-11-10
申请人： Masamitsu ITO
发明人： Masamitsu ITO
IPC分类号： G06K9/00 , G01N21/00 , G05B13/04 , G01N23/225
CPC分类号： G06K9/4604 , G03F1/68 , G03F1/84 , G03F1/86 , G03F7/70625 , G06T7/0006 , G06T7/13 , G06T2207/10056 , G06T2207/30148 , H01L21/67265
摘要： A sidewall shape correction function is determined in advance which represents the relationship of the difference between contour positions of two or more items of pattern contour position data of different thresholds obtained from an SEM image and optical pattern contour positions determined through an optical method. Two or more items of pattern contour position data of different thresholds are obtained from SEM image data on which a lithographic simulation is to be conducted. Pseudo-optical pattern contour position data are determined from the contour position difference and the sidewall shape correction function. A lithographic simulation is conducted using the pseudo-optical pattern contour position data.
摘要翻译： 预先确定侧壁形状校正功能，其表示从SEM图像获得的不同阈值的两个或多个图案轮廓位置数据的轮廓位置之间的差异与通过光学方法确定的光学图案轮廓位置之间的差的关系。 从要进行光刻模拟的SEM图像数据获得不同阈值的两个或多个图案轮廓位置数据项。 根据轮廓位置差和侧壁形状校正功能确定伪光学轮廓位置数据。 使用伪光学图案轮廓位置数据进行光刻模拟。
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公开(公告)号：US20080136793A1
公开(公告)日：2008-06-12
申请号：US11662839
申请日：2004-09-24
申请人： Sado Yamamoto , Masamitsu Ito , Yasuo Oda , Andrew Tozer , Ian Scholey
发明人： Sado Yamamoto , Masamitsu Ito , Yasuo Oda , Andrew Tozer , Ian Scholey
CPC分类号： G06F3/046 , G06F1/1613 , G06F1/3203
摘要： The present invention provides an electronic device comprising: —a position sensor (102; 302; 502), —a first integrated circuit component (106; 306; 506) coupled to the position sensor for acquisition of position data (112; 312), —a memory (114; 314) for storing the position data, a second integrated circuit component (108; 308), wherein the first integrated circuit component comprises means (110; 348) for signalling the acquisition of the position data to the second integrated circuit component, the second integrated circuit component comprising means (108; 364, 374) for reading the position data from the memory in response to the signalling.
摘要翻译： 本发明提供一种电子设备，包括： - 位置传感器（102; 302; 502）， - 耦合到所述位置传感器的用于采集位置数据（112; 312）的第一集成电路部件（106; 306; 506） - 用于存储位置数据的存储器（114; 314），第二集成电路部件（108; 308），其中所述第一集成电路部件包括用于发信号通知所述位置数据到所述第二集成电路 所述第二集成电路部件包括用于响应于所述信令从所述存储器读取位置数据的装置（108; 364,374）。
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6.发明授权公开(公告)号：US06928383B2
公开(公告)日：2005-08-09
申请号：US10736780
申请日：2003-12-17
申请人： Masamitsu Fukushima , Yasuo Oda , Masamitsu Ito
发明人： Masamitsu Fukushima , Yasuo Oda , Masamitsu Ito
CPC分类号： G08B13/26
摘要： A motion capture system includes a motion capture detecting device with sensor coils that are sequentially selected by a control section. Signals are communicated between respective input coils of input elements of an input device and the sensor coils by electromagnetic coupling. The signals received by each of the selected coils are detected by a detecting section. Three-dimensional coordinates and directions of each of the input elements are calculated by a control section so that the input elements become continuous, based on the detected signals by the detecting section.
摘要翻译： 运动捕捉系统包括具有由控制部分依次选择的传感器线圈的运动捕捉检测装置。 信号通过电磁耦合在输入装置的输入元件的各个输入线圈和传感器线圈之间传递。 由每个所选择的线圈接收的信号由检测部分检测。 基于检测部分的检测信号，通过控制部分计算每个输入元件的三维坐标和方向，使得输入元件变得连续。
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公开(公告)号：US08149220B2
公开(公告)日：2012-04-03
申请号：US12142717
申请日：2008-06-19
CPC分类号： G01D5/2006 , G06F3/03545 , G06F3/046
摘要： A position detector is disclosed, which includes a sensor substrate having a sensor coil for receiving an electromagnetic wave output from a position indicator, and a magnetic path plate that has an area equal to or larger than an area in which the sensor coil is arranged on the sensor substrate. The magnetic path plate is formed by stacking an amorphous layer and a non-amorphous layer, which is formed of metal with relative magnetic permeability lower than that of the amorphous layer. Such magnetic path plate is arranged on a side of the sensor substrate opposite to a side facing the position indicator.
摘要翻译： 公开了一种位置检测器，其包括具有用于接收从位置指示器输出的电磁波的传感器线圈的传感器基板和具有等于或大于传感器线圈布置的区域的面积的磁路板 传感器基板。 磁路板是通过堆叠由相对磁导率低于非晶层的磁导率的金属形成的非晶层和非非晶层而形成的。 这样的磁路板被布置在传感器基板的与面向位置指示器的一侧相反的一侧。
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8.发明授权Position detecting apparatus, position inputting apparatus, and computer including the same 有权位置检测装置，位置输入装置和包括该位置检测装置的计算机公开(公告)号：US08115738B2
公开(公告)日：2012-02-14
申请号：US11723200
申请日：2007-03-16
申请人： Masamitsu Ito
发明人： Masamitsu Ito
CPC分类号： G06F3/047 , G06F1/1616 , G06F1/1637 , G06F1/1643 , G06F3/03545 , G06F3/046
摘要： A position detecting apparatus includes a display apparatus having a screen for displaying images by changing states of a plurality of display elements arrayed in the screen along a predetermined direction which is parallel to a side boundary of the screen, and at least one detecting conductor disposed on the display apparatus to detect a position indicated on the display apparatus. The at least one detecting conductor is a loop coil having short sides and long sides, the long sides of the loop coil being arranged so as to cross the predetermined direction of the display elements.
摘要翻译： 位置检测装置包括具有屏幕的显示装置，该屏幕用于通过沿与屏幕的边界平行的预定方向改变排列在屏幕中的多个显示元件的状态来显示图像，以及至少一个检测导体设置在 所述显示装置检测所述显示装置上指示的位置。 所述至少一个检测导体是具有短边和长边的环形线圈，所述环形线圈的长边被布置成跨越所述显示元件的预定方向。
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公开(公告)号：US20090148782A1
公开(公告)日：2009-06-11
申请号：US12330653
申请日：2008-12-09
CPC分类号： G03F7/70433 , G03F7/70066 , G03F7/70425
摘要： An exposure method includes setting a photo mask into an exposure apparatus. The exposure apparatus includes an opening/closing unit configured to block a part of exposure light from a light source to the wafer. The photo mask having a product area in which a pattern to be used when a central part of a wafer is exposed is formed and peripheral exposure areas in each of which a pattern to be used when a peripheral area is exposed is formed. The peripheral exposure areas are formed to have a plurality of types of pattern densities. Then, a peripheral part of the wafer exposed. When exposing, the opening/closing unit is opened such that one or more of exposed photo mask areas selected from among the peripheral exposure areas has a pattern density corresponding to a shot position of the peripheral part.
摘要翻译： 曝光方法包括将光掩模设置到曝光装置中。 曝光装置包括：打开/关闭单元，被配置为将来自光源的曝光光的一部分阻挡到晶片。 形成具有当晶片的中心部分露出时要使用的图案的产品区域的光掩模，并且形成周边曝光区域，其中当外围区域暴露时使用的图案。 外围曝光区域形成为具有多种图案密度。 然后，晶片的周边部分暴露出来。 当曝光时，打开/关闭单元使得从外围曝光区域中选择的一个或多个曝光的光掩模区域具有与周边部分的拍摄位置对应的图案密度。
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10.发明授权公开(公告)号：US07428469B2
公开(公告)日：2008-09-23
申请号：US11252231
申请日：2005-10-18
申请人： Masamitsu Fukushima , Yasuo Oda , Masamitsu Ito , Toshihiko Horie
发明人： Masamitsu Fukushima , Yasuo Oda , Masamitsu Ito , Toshihiko Horie
CPC分类号： G06F3/046 , G06F3/0346
摘要： A three-dimensional-information detecting system includes a switching portion that sequentially selects sensor coils of a three-dimensional-information detecting device. Electromagnetic coupling is used to perform signal transmission and reception between the sensor coils and input coils in input elements of a three-dimensional-information inputting device which are mutually perpendicularly provided. A signal received by a selected sensor coil is detected by a detecting portion. From the detected signal, three-dimensional information, such as the position and attitude of the three-dimensional-information inputting device, is calculated by a control unit.
摘要翻译： 三维信息检测系统包括依次选择三维信息检测装置的传感器线圈的切换部分。 电磁耦合用于在相互垂直设置的三维信息输入装置的输入元件中的传感器线圈和输入线圈之间进行信号发送和接收。 由选择的传感器线圈接收的信号由检测部分检测。 由检测信号，通过控制单元计算三维信息输入装置的位置和姿态等三维信息。
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