公开(公告)号：US09740184B2

公开(公告)日：2017-08-22

申请号：US12946423

申请日：2010-11-15

申请人： Youssef A. Loldj ,  Maxime Cayer ,  Tony Tong ,  Miroslav Gelo

发明人： Youssef A. Loldj ,  Maxime Cayer ,  Tony Tong ,  Miroslav Gelo

IPC分类号： G06F1/32 ,  G06F1/00 ,  G05B19/042 ,  G05B19/04 ,  G05B19/00

CPC分类号： G05B19/042 ,  G05B19/00 ,  G05B19/0405 ,  G05B2219/23316 ,  G05B2219/25286 ,  G05B2219/34306 ,  G05B2219/45031 ,  Y02P80/10 ,  Y02P80/114

摘要： Methods and apparatus for enhanced control over electronic device manufacturing systems are provided herein. In some embodiments, the integrated sub-fab system may employ Ethernet and/or RS232 Serial communications through an open platform of apparatus to achieve a reduced carbon footprint during electronic device manufacturing. For this example, the system could include a process tool set and controller linked by sensors or software interconnect with one or more sub-fab or local factory auxiliary systems that can be operated in one or more states of energy consumption. These one or more auxiliary systems can be switched between different levels of energy consumption, as required by the process, via the controller. For many auxiliary components or systems the integrated sub-fab system utilizes existing signal outputs, for others they may employ secondary sensors or monitors.

公开(公告)号：US20110118893A1

公开(公告)日：2011-05-19

申请号：US12946423

申请日：2010-11-15

申请人： YOUSSEF A. LOLDJ ,  MAXIME CAYER ,  TONY TONG ,  MIROSLAV GELO

发明人： YOUSSEF A. LOLDJ ,  MAXIME CAYER ,  TONY TONG ,  MIROSLAV GELO

IPC分类号： G06F1/26

CPC分类号： G05B19/042 ,  G05B19/00 ,  G05B19/0405 ,  G05B2219/23316 ,  G05B2219/25286 ,  G05B2219/34306 ,  G05B2219/45031 ,  Y02P80/10 ,  Y02P80/114

摘要： Methods and apparatus for enhanced control over electronic device manufacturing systems are provided herein. In some embodiments, the integrated sub-fab system may employ Ethernet and/or RS232 Serial communications through an open platform of apparatus to achieve a reduced carbon footprint during electronic device manufacturing. For this example, the system could include a process tool set and controller linked by sensors or software interconnect with one or more sub-fab or local factory auxiliary systems that can be operated in one or more states of energy consumption. These one or more auxiliary systems can be switched between different levels of energy consumption, as required by the process, via the controller. For many auxiliary components or systems the integrated sub-fab system utilizes existing signal outputs, for others they may employ secondary sensors or monitors.

摘要翻译： 本文提供了用于增强对电子设备制造系统的控制的方法和装置。 在一些实施例中，集成子晶圆系统可以通过设备的开放平台采用以太网和/或RS232串行通信，以在电子设备制造期间实现减少的碳足迹。 对于该示例，该系统可以包括通过传感器链接的过程工具集和控制器，或者可以在一个或多个能量消耗状态下操作的一个或多个子制造厂或本地工厂辅助系统进行软件互连。 这些一个或多个辅助系统可以通过控制器根据过程的要求在不同的能量消耗水平之间切换。 对于许多辅助部件或系统，集成子晶圆系统利用现有的信号输出，对于其他的，它们可以采用二次传感器或监视器。

公开(公告)号：US20090222128A1

公开(公告)日：2009-09-03

申请号：US12365894

申请日：2009-02-04

申请人： Daniel O. Clark ,  Phil Chandler ,  Shaun W. Crawford ,  Jay J. Jung ,  Youssef A. Loldj ,  Maxime Cayer

发明人： Daniel O. Clark ,  Phil Chandler ,  Shaun W. Crawford ,  Jay J. Jung ,  Youssef A. Loldj ,  Maxime Cayer

IPC分类号： G05B19/18

CPC分类号： G05B19/418 ,  G05B2219/31229 ,  Y02P90/02 ,  Y02P90/14

摘要： Methods and apparatus for efficiently operating an electronic device manufacturing system are provided. In one aspect, an electronic device manufacturing system is provided, including: a process tool; a process tool controller linked to the process tool, wherein the process tool controller is adapted to control the process tool; a first sub-fab auxiliary system linked to the process tool controller; wherein the first sub-fab auxiliary system is adapted to operate in a first operating mode and a second operating mode; and wherein the process tool controller is adapted to cause the first sub-fab auxiliary system to change from the first operating mode to the second operating mode.

摘要翻译： 提供了有效操作电子设备制造系统的方法和设备。 一方面，提供了一种电子设备制造系统，包括：处理工具; 与处理工具链接的过程工具控制器，其中所述过程工具控制器适于控制所述过程工具; 与处理工具控制器相连的第一子制造辅助系统; 其中所述第一子制造辅助系统适于在第一操作模式和第二操作模式中操作; 并且其中所述处理工具控制器适于使所述第一子制造辅助系统从所述第一操作模式改变到所述第二操作模式。

公开(公告)号：US09075408B2

公开(公告)日：2015-07-07

申请号：US12945869

申请日：2010-11-14

申请人： Youssef A. Loldj ,  Maxime Cayer ,  Jay J. Jung ,  Shaun Crawford ,  Dana Tribula ,  Daniel O. Clark

发明人： Youssef A. Loldj ,  Maxime Cayer ,  Jay J. Jung ,  Shaun Crawford ,  Dana Tribula ,  Daniel O. Clark

IPC分类号： G06F19/00 ,  G05B19/042 ,  G05B19/045

CPC分类号： G05B19/042 ,  G05B19/045 ,  G05B2219/23316 ,  G05B2219/2612

摘要： Methods and apparatus for enhanced control, monitoring and recording of incoming chemical and power use, and emissions of electronic device manufacturing systems are provided. In some embodiments, integrated sub-fab system systems may monitor the energy usage of the sub-fab equipment. The tool can enter many different depths of energy savings modes such as idle (shallow energy savings where production equipment can recover to normal production with no quality or throughput impact in seconds), sleep (deeper energy savings where production equipment can recover in minutes), or hibernate (where production equipment may require hours to recover not to have impact on quality, or throughput) for the system. In some embodiments, the system may monitor and display all gas emissions in a sub-fab as well as the Semi S23 method reporting of CO2 equivalent emission. The system may monitor effluent process gases and energy use from the process tool and sub-fab equipment.

摘要翻译： 提供了用于增强控制，监控和记录进入的化学和电力使用以及电子设备制造系统的排放的方法和装置。 在一些实施例中，集成子晶圆厂系统系统可以监视子晶圆厂设备的能量使用。 该工具可以进入许多不同深度的节能模式，例如空闲（生产设备可以恢复到正常生产，质量或吞吐量影响在几秒钟内）的轻微节能，睡眠（生产设备可以在几分钟内恢复更深的节能）， 或休眠（生产设备可能需要几个小时才能恢复，不影响质量或吞吐量）。 在一些实施例中，系统可以监测和显示子晶圆中的所有气体排放以及报告二氧化碳当量排放的半S23方法。 该系统可以从过程工具和辅助设备设备监测废气处理气体和能源使用。

公开(公告)号：US20110144791A1

公开(公告)日：2011-06-16

申请号：US12945869

申请日：2010-11-14

申请人： YOUSSEF A. LOLDJ ,  MAXIME CAYER ,  JAY J. JUNG ,  SHAUN CRAWFORD ,  DANA TRIBULA ,  DANIEL O. CLARK

发明人： YOUSSEF A. LOLDJ ,  MAXIME CAYER ,  JAY J. JUNG ,  SHAUN CRAWFORD ,  DANA TRIBULA ,  DANIEL O. CLARK

IPC分类号： G06F19/00

CPC分类号： G05B19/042 ,  G05B19/045 ,  G05B2219/23316 ,  G05B2219/2612

摘要： Methods and apparatus for enhanced control, monitoring and recording of incoming chemical and power use, and emissions of electronic device manufacturing systems are provided. In some embodiments, integrated sub-fab system systems may monitor the energy usage of the sub-fab equipment. The tool can enter many different depths of energy savings modes such as idle (shallow energy savings where production equipment can recover to normal production with no quality or throughput impact in seconds), sleep (deeper energy savings where production equipment can recover in minutes), or hibernate (where production equipment may require hours to recover not to have impact on quality, or throughput) for the system. In some embodiments, the system may monitor and display all gas emissions in a sub-fab as well as the Semi S23 method reporting of CO2 equivalent emission. The system may monitor effluent process gases and energy use from the process tool and sub-fab equipment.

摘要翻译： 提供了用于增强控制，监控和记录进入的化学和电力使用以及电子设备制造系统的排放的方法和装置。 在一些实施例中，集成子晶圆厂系统系统可以监视子晶圆厂设备的能量使用。 该工具可以进入许多不同深度的节能模式，例如空闲（生产设备可以恢复到正常生产，质量或吞吐量影响在几秒钟内）的轻微节能，睡眠（生产设备可以在几分钟内恢复更深的节能）， 或休眠（生产设备可能需要几个小时才能恢复，不影响质量或吞吐量）。 在一些实施例中，系统可以监测和显示子晶圆中的所有气体排放以及报告二氧化碳当量排放的半S23方法。 该系统可以从过程工具和辅助设备设备监测废气处理气体和能源使用。