公开(公告)号：US4569738A

公开(公告)日：1986-02-11

申请号：US606920

申请日：1984-05-04

申请人： Jorg Kieser ,  Michael Neusch

发明人： Jorg Kieser ,  Michael Neusch

IPC分类号： C23C16/50 ,  C03C17/22 ,  C23C16/02 ,  C23C16/26 ,  C23C16/511 ,  H01L23/29 ,  C01B31/00

CPC分类号： C23C16/511 ,  C03C17/22 ,  C23C16/0272 ,  C23C16/26 ,  H01L23/29 ,  C03C2217/282 ,  C03C2218/153 ,  H01L2924/0002 ,  Y10T428/30 ,  Y10T428/31645 ,  Y10T428/31663 ,  Y10T428/31696

摘要： A method for producing amorphous carbon coatings on substrates by degrading a gaseous hydrocarbon compound in an ionized gas atomsphere within a reaction chamber. An electromagnetic alternating field is used for the excitation of the plasma. To achieve the object of increasing the deposition rate and permitting substrates even of great surface area to be uniformly coated, the frequency of the electromagnetic alternating field is selected in the microwave region (915 to 2,540 MHz). Furthermore, the microwave energy is put into the gaseous atmosphere by means of at least one ladder-type waveguide situated outside of the reaction chamber. The invention also relates to a substrate provided with an amorphous carbon coating, in which an adhesion-mediating coating consisting of a polymer from the group of the siloxanes or silazanes is provided between the substrate and the amorphous carbon coating.

摘要翻译： 一种通过在反应室内离子化的气体原子中降解气态烃化合物来在基底上生产无定形碳涂层的方法。 电磁场用于等离子体的激发。 为了实现提高沉积速率并允许均匀涂覆大面积的基板的目的，在微波区域（915-2,540MHz）中选择电磁交变场的频率。 此外，通过位于反应室外部的至少一个梯形波导将微波能量放入气体气氛中。 本发明还涉及一种具有无定形碳涂层的基底，其中在基底和无定形碳涂层之间提供由来自硅氧烷或硅氮烷的聚合物组成的粘附介导涂层。

公开(公告)号：US5466180A

公开(公告)日：1995-11-14

申请号：US72834

申请日：1993-06-07

申请人： Joachim Hassler ,  Rudi Lenk ,  Michael Neusch

发明人： Joachim Hassler ,  Rudi Lenk ,  Michael Neusch

IPC分类号： H01J9/44 ,  H01J29/70 ,  H01J9/42

CPC分类号： H01J29/703 ,  H01J9/44

摘要： A calibration step is carried out on a calibration tube in which magnetizations which cause beam displacements in x and y directions are determined for all the magnet poles and beams, and the adjustments of sensitivity of each beam from the x/y values is determined. A beam deviation of a production tube is then adjusted by determining its initial error in x and y directions and then starting a calculation sequence in which the magnetization currents are calculated by linear superposition of the individual currents on the basis of the known adjustment sensitivities. An additional rotating and decreasing auxiliary field is active during the magnetization of the poles in the rings of the calibration tube and of the production tube. It is also possible to correct twist errors using the invention.

摘要翻译： 在校准管上执行校准步骤，其中对于所有磁极和光束确定在x和y方向上引起光束位移的磁化，并且确定来自x / y值的每个光束的灵敏度的调整。 然后通过确定其在x和y方向上的初始误差来调整生产管的波束偏离，然后开始计算顺序，其中通过基于已知的调节灵敏度的各个电流的线性叠加来计算磁化电流。 在校准管和生产管的环中的极的磁化期间，附加的旋转和减小的辅助场是有效的。 也可以使用本发明来矫正扭曲误差。

公开(公告)号：US4661409A

公开(公告)日：1987-04-28

申请号：US797635

申请日：1985-11-13

申请人： Jorg Kieser ,  Michael Neusch

发明人： Jorg Kieser ,  Michael Neusch

IPC分类号： C23C16/50 ,  C03C17/22 ,  C23C16/02 ,  C23C16/26 ,  C23C16/511 ,  H01L23/29 ,  B32B9/00 ,  C01B31/00

CPC分类号： C23C16/511 ,  C03C17/22 ,  C23C16/0272 ,  C23C16/26 ,  H01L23/29 ,  C03C2217/282 ,  C03C2218/153 ,  H01L2924/0002 ,  Y10T428/30 ,  Y10T428/31645 ,  Y10T428/31663 ,  Y10T428/31696

摘要： A method for producing amorphous carbon coatings on substrates by degrading a gaseous hydrocarbon compound in an ionized gas atmosphere within a reaction chamber. An electromagnetic alternating field is used for the excitation of the plasma. To achieve the object of increasing the deposition rate and permitting substrates even of great surface area to be uniformly coated, the frequency of the electromagnetic alternating field is selected in the microwave region (915 to 2,540 MHz). Furthermore, the microwave energy is put into the gaseous atmosphere by means of at least one ladder-type waveguide situated outside of the reaction chamber. The invention also relates to a substance provided with an amorphous carbon coating, in which an adhesion-mediating coating consisting of a polymer from the group of the siloxanes or silazanes is provided between the substrate and the amorphous carbon coating.

摘要翻译： 一种通过在反应室内的电离气体气氛中降解气态烃化合物来在基底上生产无定形碳涂层的方法。 电磁场用于等离子体的激发。 为了实现提高沉积速率并允许均匀涂覆大面积的基板的目的，在微波区域（915-2,540MHz）中选择电磁交变场的频率。 此外，通过位于反应室外部的至少一个梯形波导将微波能量放入气体气氛中。 本发明还涉及具有无定形碳涂层的物质，其中在基体和无定形碳涂层之间提供由来自硅氧烷或硅氮烷的聚合物组成的粘附介质涂层。