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公开(公告)号：US07927466B2
公开(公告)日：2011-04-19
申请号：US11525368
申请日：2006-09-22
申请人： Mihai Ganciu-Petcu , Michel Hecq , Jean-Pierre Dauchot , Stephanos Konstantinidis , Jean Bretagne , Ludovic De Poucques , Michel Touzeau
发明人： Mihai Ganciu-Petcu , Michel Hecq , Jean-Pierre Dauchot , Stephanos Konstantinidis , Jean Bretagne , Ludovic De Poucques , Michel Touzeau
CPC分类号： C23C14/35 , C23C14/358 , H01J37/3405 , H01J37/3444
摘要： The present invention relates to the deposition in a magnetron reactor (1) equipped with a magnetron cathode (MC) of at least one material on a substrate (11a), according to which process said material is vaporized by magnetron sputtering, using a gas that is ionized in pulsed mode. To this effect and in order to favour the formation of high current pulses of short duration while avoiding the formation of electric arcs and while enabling an effective ionisation of the sputtered vapour, a preionization of the said gas prior to the application of the main voltage pulse on the magnetron cathode (MC) is carried out in order to generate current pulses (CP) whose decay time (Td), after cut-off of the main voltage pulse (VP) is shorter than 5 μs.
摘要翻译： 本发明涉及在基板（11a）上配备有至少一种材料的磁控管阴极（MC）的磁控管反应器（1）中的沉积，根据该方法，所述材料通过磁控溅射蒸发，使用气体 以脉冲模式电离。 为此，为了有利于形成短持续时间的高电流脉冲，同时避免电弧的形成，并且同时能够有效地电离溅射的蒸汽，在施加主电压脉冲之前对所述气体进行预电离 执行磁控管阴极（MC），以产生在主电压脉冲（VP）截止后的衰减时间（Td）小于5μs的电流脉冲（CP）。
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公开(公告)号：US08581494B2
公开(公告)日：2013-11-12
申请号：US13147906
申请日：2010-02-10
IPC分类号： H01J7/24
摘要： A glow discharge spectrometer discharge lamp includes: a lamp body having a vacuum enclosure connected to pump elements and to injector elements for injecting an inert gas into the enclosure; a hollow cylindrical first electrode of longitudinal axis X-X′; a second electrode for receiving a sample for analysis and for holding the sample facing one end of the cylindrical electrode; electric field generator including an applicator for applying to the terminals of the electrodes an electric field that is continuous, pulsed, radiofrequency, or hybrid, and suitable for generating a glow discharge plasma in the presence of the gas; coupler elements for coupling the discharge lamp to a spectrometer suitable for measuring at least one component of the plasma; and magnetic field generator elements for generating a magnetic field having field lines oriented along the axis X-X′, the magnetic field being uniform in orientation and in intensity over an area of the sample that is not less than the inside area of the hollow cylindrical electrode as projected along the direction X-X′.
摘要翻译： 辉光放电光谱仪放电灯包括：具有连接到泵元件的真空外壳的灯体和用于将惰性气体注入外壳的注射器元件; 纵轴X-X'的中空圆柱形第一电极; 第二电极，用于接收用于分析的样品并保持面向所述圆柱形电极的一端的样品; 电场发生器，其包括用于向电极的端子施加连续，脉冲，射频或混合的电场的施加器，并且适用于在存在气体的情况下产生辉光放电等离子体; 用于将放电灯耦合到适于测量等离子体的至少一种组分的光谱仪的耦合器元件; 以及用于产生具有沿着X-X'轴定向的场线的磁场的磁场发生器元件，所述磁场在样品的区域上的取向均匀且强度不小于中空圆柱体的内部区域 电极沿X-X'方向投影。
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公开(公告)号：US20110291567A1
公开(公告)日：2011-12-01
申请号：US13147906
申请日：2010-02-10
摘要： A glow discharge spectrometer discharge lamp includes: a lamp body having a vacuum enclosure connected to pump elements and to injector elements for injecting an inert gas into the enclosure; a hollow cylindrical first electrode of longitudinal axis X-X′; a second electrode for receiving a sample for analysis and for holding the sample facing one end of the cylindrical electrode; electric field generator including an applicator for applying to the terminals of the electrodes an electric field that is continuous, pulsed, radiofrequency, or hybrid, and suitable for generating a glow discharge plasma in the presence of the gas; coupler elements for coupling the discharge lamp to a spectrometer suitable for measuring at least one component of the plasma; and magnetic field generator elements for generating a magnetic field having field lines oriented along the axis X-X′, the magnetic field being uniform in orientation and in intensity over an area of the sample that is not less than the inside area of the hollow cylindrical electrode as projected along the direction X-X′.
摘要翻译： 辉光放电光谱仪放电灯包括：具有连接到泵元件的真空外壳的灯体和用于将惰性气体注入外壳的注射器元件; 纵轴X-X'的中空圆柱形第一电极; 第二电极，用于接收用于分析的样品并保持面向所述圆柱形电极的一端的样品; 电场发生器，其包括用于向电极的端子施加连续，脉冲，射频或混合的电场的施加器，并且适用于在存在气体的情况下产生辉光放电等离子体; 用于将放电灯耦合到适于测量等离子体的至少一种组分的光谱仪的耦合器元件; 以及用于产生具有沿着轴线XX'定向的场线的磁场的磁场发生器元件，所述磁场在样品的不小于中空圆柱形电极的内部区域的取向和强度上是均匀的，作为 沿着XX'方向投影。
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公开(公告)号：US20070034498A1
公开(公告)日：2007-02-15
申请号：US11525368
申请日：2006-09-22
申请人： Mihai Ganciu-Petcu , Michel Hecq , Jean-Pierre Dauchot , Stephanos Konstantinidis , Jean Bretagne , Ludovic De Poucques , Michel Touzeau
发明人： Mihai Ganciu-Petcu , Michel Hecq , Jean-Pierre Dauchot , Stephanos Konstantinidis , Jean Bretagne , Ludovic De Poucques , Michel Touzeau
CPC分类号： C23C14/35 , C23C14/358 , H01J37/3405 , H01J37/3444
摘要： The present invention relates to the deposition in a magnetron reactor (1) equipped with a magnetron cathode (MC) of at least one material on a substrate (11a), according to which process said material is vaporized by magnetron sputtering, using a gas that is ionized in pulsed mode. To this effect and in order to favour the formation of high current pulses of short duration while avoiding the formation of electric arcs and while enabling an effective ionisation of the sputtered vapour, a preionization of the said gas prior to the application of the main voltage pulse on the magnetron cathode (MC) is carried out in order to generate current pulses (CP) whose decay time (Td), after cut-off of the main voltage pulse (VP) is shorter than 5 μs.
摘要翻译： 本发明涉及在基板（11a）上配备有至少一种材料的磁控管阴极（MC）的磁控管反应器（1）中的沉积，根据该方法，所述材料通过磁控溅射气化，使用气体 在脉冲模式下电离。 为此，为了有利于形成短持续时间的高电流脉冲，同时避免电弧的形成，并且同时能够有效地电离溅射的蒸汽，在施加主电压脉冲之前对所述气体进行预电离 在磁控管阴极（MC）上进行，以便在主电压脉冲（VP）的截止值小于5之后产生其衰减时间（T> D ）的电流脉冲（CP） 麝香
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