公开(公告)号：US4820928A

公开(公告)日：1989-04-11

申请号：US106499

申请日：1987-10-09

Applicant: Mitsuo Ooyama ,  Kimiaki Ando ,  Yoshio Kawamura ,  Norio Saitou ,  Takanori Simura ,  Hiroyuki Kohida

Inventor： Mitsuo Ooyama ,  Kimiaki Ando ,  Yoshio Kawamura ,  Norio Saitou ,  Takanori Simura ,  Hiroyuki Kohida

IPC: G02B5/18 ,  H01J37/302 ,  H01J37/305 ,  H01J37/317 ,  H01L21/027

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/302 ,  H01J37/3174 ,  H01J2237/31762

Abstract: A lithography apparatus in which a charged particle ray such as an electron beam or an ion beam is controlled to scan a desired region of a sample and thereby draw a pattern, including a framing pattern memory for storing therein closed framing lines of a pattern to be drawn in the form of dot images, a framing pattern generator for writing the framing lines of the pattern to be drawn into said framing pattern memory in the form of dot images, and a raster scanning circuit for scanning the framing pattern memory having stored therein closed framing lines of the pattern to be drawn and for generating a beam deflection address for drawing the pattern and a beam blanking control signal.

Abstract translation: 其中控制诸如电子束或离子束的带电粒子扫描样品的期望区域并由此绘制图案的光刻设备，包括用于存储图案的闭合框线的框架图案存储器 以点图像的形式绘制的帧图案生成器，用于以点图像的形式将要绘制的图案的成帧线写入所述成帧图案存储器的成像模式生成器，以及用于扫描已存储在其中的成帧模式存储器的光栅扫描电路闭合 要绘制的图案的成帧线和用于产生用于绘制图案的光束偏转地址和光束消隐控制信号。

公开(公告)号：US6094647A

公开(公告)日：2000-07-25

申请号：US839407

申请日：1997-04-11

Applicant: Kanji Kato ,  Hiromichi Fujisawa ,  Mitsuo Ooyama ,  Hisamitsu Kawaguchi ,  Atsushi Hatakeyama ,  Noriyuki Kaneoka ,  Mitsuru Akizawa ,  Masaaki Fujinawa ,  Hidefumi Masuzaki ,  Masaharu Murakami

Inventor： Kanji Kato ,  Hiromichi Fujisawa ,  Mitsuo Ooyama ,  Hisamitsu Kawaguchi ,  Atsushi Hatakeyama ,  Noriyuki Kaneoka ,  Mitsuru Akizawa ,  Masaaki Fujinawa ,  Hidefumi Masuzaki ,  Masaharu Murakami

IPC: G06F17/30 ,  G06K9/62 ,  G06K9/72

CPC classification number: G06F17/30675 ,  G06F17/30011 ,  G06F17/30982 ,  G06F17/30985 ,  G06K9/62 ,  G06K9/72 ,  G06K2209/01 ,  Y10S707/99932 ,  Y10S707/99935 ,  Y10S707/99936

Abstract: A method for making document information searches. In performing a document search with respect to the desired key word, two stages of presearch are carried out. In a first stage of presearch, a character component table in which an existence of character codes for every document is stated with respect to all the character codes contained in the group of document text data of stored documents is generated, and the character component table is searched for all the character strings constituting a desiredly designated search subject key word to thereby extract all the documents each containing all the character codes constituting the search subject key word. In a second stage of presearch, contracted text data for every document in which adjuncts and duplication of repeatedly stated words contained in advance in the text data are eliminated is generated, and the documents each containing the search subject key words by word are extracted from the documents extracted by the first presearch. After the second stage of presearch, text search is performed in accordance with a neighbor condition, a contextual condition, or the like.

Abstract translation: 一种用于制作文档信息搜索的方法。 在执行关于所需关键字的文档搜索时，执行两个阶段的预搜索。 在预搜索的第一阶段，生成字符分量表，其中针对包含在所存储的文档的文档文本数据组中的所有字符代码来说明每个文档的字符代码的存在，并且字符分量表是 搜索构成期望指定的搜索对象关键字的所有字符串，从而提取包含构成搜索对象关键字的所有字符代码的所有文档。 在第二阶段的研究中，生成了消除了在文本数据中预先包含重复提及的单词的附加和重复的每个文档的合约文本数据，并且从 第一次研究提取的文件。 在预搜索的第二阶段之后，根据邻居条件，上下文条件等执行文本搜索。

公开(公告)号：US4943729A

公开(公告)日：1990-07-24

申请号：US284733

申请日：1988-12-15

Applicant: Kimiaki Ando ,  Mitsuo Ooyama ,  Norio Saitou

Inventor： Kimiaki Ando ,  Mitsuo Ooyama ,  Norio Saitou

IPC: H01J37/302

CPC classification number: H01J37/3026

Abstract: An electron beam lithography system having a contour resolving circuit for resolving original pattern data which is transferred from a host computer into contour portion pattern data and inner portion pattern data in accordance with the designated dimension, for adding flag data to enable the contour portion pattern data and the inner portion pattern data to be discriminated to the resolved pattern data, and for outputting the resolved pattern data with the flag data. By adding the flag data, the contour portion pattern data and inner portion pattern data can be easily discriminated. The operation to change the electron beam irradiation dose in accordance with the contour portion pattern and inner portion pattern can be fairly easily executed. A pattern can be drawn at a high accuracy while preventing a deformation of the drawn figure due to the proximity effect. A data processing amount in the computer can be reduced. A data transfer amount from the host computer can be also reduced. Thus, an electron beam lithography system having a high throughput can be realized.

Abstract translation: 一种具有轮廓分解电路的电子束光刻系统，用于根据所指定的尺寸，将从主计算机传送到轮廓部分图形数据和内部部分图形数据的原始图案数据解析，以便添加标志数据以使轮廓部分图形数据 以及要被区分为分辨图案数据的内部部分图案数据，并且用于使用标志数据输出分辨的图案数据。 通过添加标志数据，可以容易地区分轮廓部分图形数据和内部部分图案数据。 可以相当容易地执行根据轮廓部分图形和内部部分图案改变电子束照射剂量的操作。 可以以高精度绘制图案，同时防止由于邻近效应引起的绘制图形的变形。 可以减少计算机中的数据处理量。 也可以减少来自主机的数据传送量。 因此，可以实现具有高通量的电子束光刻系统。

公开(公告)号：US4692579A

公开(公告)日：1987-09-08

申请号：US735184

申请日：1985-05-17

Applicant: Norio Saitou ,  Susumu Ozasa ,  Masahide Okumura ,  Mitsuo Ooyama ,  Tsutomu Komoda ,  Katsuhiro Harada ,  Minpei Fujinami ,  Kazumi Iwadate

Inventor： Norio Saitou ,  Susumu Ozasa ,  Masahide Okumura ,  Mitsuo Ooyama ,  Tsutomu Komoda ,  Katsuhiro Harada ,  Minpei Fujinami ,  Kazumi Iwadate

IPC: H01J37/317 ,  H01J37/00

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/3174 ,  H01J2237/30488 ,  H01J2237/31764

Abstract: An electron beam lithography apparatus comprises: a spot electron beam generator; device for exposing a desired pattern onto a wafer using the spot beam; device for dividing the pattern into small regions; and device for designating an origin of the small region and also digitally scanning the portion inside the small region by a fixed correction amount by use of the spot beam, and thereby to reduce the settling time of the D/A converter in association with the digital scanning.

Abstract translation: 电子束光刻设备包括：点电子束发生器; 使用点光束将期望图案曝光到晶片上的装置; 用于将图案分割成小区域的装置; 以及用于指定小区域的原点的装置，并且还通过使用点光束以固定的校正量对小区域内的部分进行数字扫描，从而减少D / A转换器与数字的相关的建立时间 扫描。

公开(公告)号：US4580236A

公开(公告)日：1986-04-01

申请号：US497575

申请日：1983-05-24

Applicant: Shigeo Tsujioka ,  Eiji Okamura ,  Mitsuo Ooyama ,  Kimiaki Ando ,  Seiichi Kanema ,  Mitsugu Yoneyama ,  Toshihisa Aoshima ,  Kiyoshi Umezawa

Inventor： Shigeo Tsujioka ,  Eiji Okamura ,  Mitsuo Ooyama ,  Kimiaki Ando ,  Seiichi Kanema ,  Mitsugu Yoneyama ,  Toshihisa Aoshima ,  Kiyoshi Umezawa

IPC: G06F9/22 ,  G06F12/02 ,  G06T11/20 ,  G09G5/20 ,  G06F3/00 ,  G09G1/06

CPC classification number: G09G5/20

Abstract: A graphic display apparatus for generating a vector comprises registers for storing a value R of a vector discrimination, a positive increment P and a negative increment N, and flip-flops for storing magnitude information of .DELTA.X, .DELTA.Y, and .DELTA.X and .DELTA.Y. An address counter of a refresh memory is counted up or down in accordance with the contents of those flip-flops. A control circuit for updating the value R of the vector discrimination is also provided, so that the vector can be generated at a high speed. The registers and the flip-flops are constructed in two stages so that data for generating the next vector can be prepared while the current vector is generated.

Abstract translation: 用于产生矢量的图形显示装置包括用于存储矢量鉴别值，正增量P和负增量N的值R的寄存器和用于存储DELTA X，DELTA Y和DELTA X和DELTA的幅度信息的触发器 根据这些触发器的内容，刷新存储器的地址计数器向上或向下计数。 还提供了用于更新矢量辨别值R的控制电路，使得能够以高速生成矢量。 寄存器和触发器被构造成两个阶段，使得可以在生成当前矢量的同时准备用于生成下一个矢量的数据。

公开(公告)号：US5903442A

公开(公告)日：1999-05-11

申请号：US696801

申请日：1996-08-14

Applicant: Hiroki Kanai ,  Mitsuo Ooyama ,  Yoshifumi Takamoto

Inventor： Hiroki Kanai ,  Mitsuo Ooyama ,  Yoshifumi Takamoto

IPC: G11B33/12 ,  G06F13/40 ,  G11B25/04 ,  H05K1/18

CPC classification number: G06F13/409

Abstract: When a plurality of hard disks are connected by using a backplane, in order to enable a low-noise installation of the bus and a high-density installation of the hard disk to be simultaneously realized, a signal line of the bus and connectors are installed to the backplane, slots are set to installing regions of the drives, wirings of the signal lines between the connectors are set to, for example, a U-character shape, and a length of signal lines between the connectors is set to be longer than a distance between the connectors adjacent to the bus.

公开(公告)号：US4829444A

公开(公告)日：1989-05-09

申请号：US922891

申请日：1986-10-24

Applicant: Norio Saitou ,  Masahide Okumura ,  Tsutomu Komoda ,  Mitsuo Ooyama

Inventor： Norio Saitou ,  Masahide Okumura ,  Tsutomu Komoda ,  Mitsuo Ooyama

IPC: H01J37/305 ,  H01J37/317 ,  H01L21/027

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/3177

Abstract: A charged particle beam lithography system has a high-throughput and inexpensive system configuration. The system configuration is constituted by a plurality of charged particle optical systems each adapted to focus and deflect a beam of charged particles and irradiate the beam onto a specimen so that the beam draws a desired pattern on the specimen, a plurality of deflection distortion correcting circuits each associated with each of the charged particle optical systems for correcting a deflection distortion of each charged particle optical system, and a common pattern data control circuit for supplying data of a pattern to be drawn to each of the plurality of deflection distortion correcting circuits.

Abstract translation: 带电粒子束光刻系统具有高通量和廉价的系统配置。 系统配置由多个带电粒子光学系统构成，每个充电粒子光学系统适于聚焦和偏转带电粒子束并将光束照射到样本上，使得光束在样本上画出期望的图案，多个偏转失真校正电路 每个与用于校正每个带电粒子光学系统的偏转失真的带电粒子光学系统相关联的每个带电粒子光学系统以及用于向多个偏转失真校正电路中的每一个提供要绘制的图案的数据的公共图案数据控制电路。

公开(公告)号：US6043988A

公开(公告)日：2000-03-28

申请号：US252811

申请日：1999-02-19

Applicant: Hiroki Kanai ,  Mitsuo Ooyama ,  Yoshifumi Takamoto

Inventor： Hiroki Kanai ,  Mitsuo Ooyama ,  Yoshifumi Takamoto

IPC: G06F13/40 ,  H05K1/02 ,  H05K1/14

CPC classification number: H05K1/0228 ,  G06F13/409 ,  H05K2201/044 ,  H05K2201/09236 ,  H05K2201/09263

Abstract: When a plurality of hard disks are connected by using a backplane, in order to enable a low-noise installation of the bus and a high-density installation of the hard disk to be simultaneously realized, a signal line of the bus and connectors are installed to the backplane, slots are set to installing regions of the drives, wirings of the signal lines between the connectors are set to, for example, a U-character shape, and a length of signal lines between the connectors is set to be longer than a distance between the connectors adjacent to the bus.

Abstract translation: 当通过使用背板连接多个硬盘时，为了实现总线的低噪声安装和同时实现硬盘的高密度安装，总线和连接器的信号线被安装 将插槽设置​​为安装驱动器的区域，将连接器之间的信号线的布线设置为例如U字形，并且将连接器之间的信号线的长度设置为长于 邻近总线的连接器之间的距离。

公开(公告)号：US5519857A

公开(公告)日：1996-05-21

申请号：US985795

申请日：1992-11-30

Applicant: Kanji Kato ,  Hiromichi Fujisawa ,  Mitsuo Ooyama ,  Hisamitsu Kawaguchi ,  Atsushi Hatakeyama ,  Noriyuki Kaneoka ,  Mitsuru Akizawa ,  Masaaki Fujinawa ,  Hidefumi Masuzaki ,  Masaharu Murakami

Inventor： Kanji Kato ,  Hiromichi Fujisawa ,  Mitsuo Ooyama ,  Hisamitsu Kawaguchi ,  Atsushi Hatakeyama ,  Noriyuki Kaneoka ,  Mitsuru Akizawa ,  Masaaki Fujinawa ,  Hidefumi Masuzaki ,  Masaharu Murakami

IPC: G06F17/30 ,  G06K9/62 ,  G06K9/72

CPC classification number: G06F17/30675 ,  G06F17/30011 ,  G06F17/30982 ,  G06F17/30985 ,  G06K9/62 ,  G06K9/72 ,  G06K2209/01 ,  Y10S707/99932 ,  Y10S707/99935 ,  Y10S707/99936

Abstract: A method and apparatus for performing a document information search to uncover specified text data containing a given search subject key word from a group of document text data stored in a memory. In the document information search method, two stages of presearch are carried out to perform the document search with respect to a desired subject key word. In a first stage of presearch, a character component table is generated in which the existence of character codes for every document is set forth with respect to all the character codes contained in the group of document text data of stored documents. The character component table is searched for all the character codes comprising a designated search subject key word to thereby extract all documents containing all the character codes comprising the search subject key word. Further, in the presearch step, all texts without the possibility of containing the search subject key word are eliminated. A comprehensive, narrowed text search is thereby performed in accordance with the search subject key word.

Abstract translation: 一种用于执行文档信息搜索以从存储在存储器中的一组文档文本数据中发现包含给定搜索主题关键字的指定文本数据的方法和装置。 在文档信息搜索方法中，进行两个阶段的预搜索以对所需的主题关键字执行文档搜索。 在预搜索的第一阶段，生成字符分量表，其中针对包含在所存储的文档的文档文本数据组中的所有字符代码设置每个文档的字符代码的存在。 搜索包括指定搜索主题关键字的所有字符代码的字符分量表，从而提取包含包括搜索对象关键字的所有字符代码的所有文档。 此外，在预览步骤中，消除了没有包含搜索主题关键字的可能性的所有文本。 由此，根据搜索主题关键词进行全面，狭窄的文本搜索。

公开(公告)号：US5168533A

公开(公告)日：1992-12-01

申请号：US555483

申请日：1990-08-09

Applicant: Kanji Kato ,  Hiromichi Fujisawa ,  Mitsuo Ooyama ,  Hisamitsu Kawaguchi ,  Atsushi Hatakeyama ,  Noriyuki Kaneoka ,  Mitsuru Akizawa ,  Masaaki Fujinawa ,  Hidefumi Masuzaki ,  Masaharu Murakami

Inventor： Kanji Kato ,  Hiromichi Fujisawa ,  Mitsuo Ooyama ,  Hisamitsu Kawaguchi ,  Atsushi Hatakeyama ,  Noriyuki Kaneoka ,  Mitsuru Akizawa ,  Masaaki Fujinawa ,  Hidefumi Masuzaki ,  Masaharu Murakami

IPC: G06F17/30 ,  G06K9/62 ,  G06K9/72

CPC classification number: G06F17/30675 ,  G06F17/30011 ,  G06F17/30982 ,  G06F17/30985 ,  G06K9/62 ,  G06K9/72 ,  G06K2209/01 ,  Y10S707/99932 ,  Y10S707/99935 ,  Y10S707/99936

Abstract: A method and apparatus for making document information search and a magnetic disk unit to be used for realizing the method and apparatus. In the document information search method, in performing document search with respect to a desired subject key word, two stages of presearch are carried out. In a first stage of presearch (step 402), a character component table (500) in which existence of character codes for every document is stated with respect to all the character codes contained in the group of document text data of stored documents is generated, and the character component table is searched for all the character codes constituting a desiredly designated search subject key word to thereby extract all the documents each containing all the character codes constituting the search subject key word. In a second stage of presearch step 403), contracted text data for every document in which adjuncts and duplication of repeatedly stated words contained in advance in the text data are eliminated is generated, and the documents each containing the search subject key words by word are extracted from the documents extracted by the first presearch. After the second stage of presearch, text search is performed in accordance with a neighbor condition, a contextual condition, or the like (step 404). Further, as a term comparator means, hardware (1106) for exclusive use for term comparison in accordance with a finite automation is employed. Further, as for different notation and synonym, inputted terms are once subject to different notation development in a different notation development processing portion (2601), each of the different-notation developed terms is subject to synonym development in a synonym development processing portion (2602) while referring to a synonym dictionary, and then the results of synonym development are further subject to different notation development in a different notation development processing portion (2603) in accordance with a conversion rule table (2603).