公开(公告)号：US20090074141A1

公开(公告)日：2009-03-19

申请号：US12232259

申请日：2008-09-12

Applicant: Isaac Mazor ,  Alex Dikopoltsev ,  Boris Yokhin ,  Dileep Agnihotri ,  Tzachi Rafaeli ,  Alex Tokar ,  David Berman ,  Moshe Beylin

Inventor： Isaac Mazor ,  Alex Dikopoltsev ,  Boris Yokhin ,  Dileep Agnihotri ,  Tzachi Rafaeli ,  Alex Tokar ,  David Berman ,  Moshe Beylin

IPC: G01N23/201 ,  H01L21/02 ,  B05C11/00

CPC classification number: G01N23/201 ,  G01N2223/052

Abstract: A computer-implemented method for inspection of a sample includes defining a plurality of locations on a surface of the sample, irradiating the surface at each of the locations with a beam of X-rays, and measuring an angular distribution of the X-rays that are emitted from the surface responsively to the beam, so as to produce a respective plurality of X-ray spectra. The X-ray spectra are analyzed to produce respective figures-of-merit indicative of a measurement quality of the X-ray spectra at the respective locations. One or more locations are selected out of the plurality of locations responsively to the figures-of-merit, and a property of the sample is estimated using the X-ray spectra measured at the selected locations.

Abstract translation: 用于检查样品的计算机实现的方法包括在样品的表面上限定多个位置，用X射线照射每个位置处的表面，并测量X射线的角度分布， 响应于光束从表面发射，以产生相应的多个X射线光谱。 分析X射线光谱以产生各自的相应的品质指数，表示在各个位置处的X射线光谱的测量质量。 响应于品质因数从多个位置中选择一个或多个位置，并且使用在所选择的位置处测量的X射线光谱来估计样品的性质。

公开(公告)号：US20070274447A1

公开(公告)日：2007-11-29

申请号：US11798617

申请日：2007-05-15

Applicant: Isaac Mazor ,  Alex Dikopoltsev ,  Boris Yokhin ,  Tzachi Rafaeli ,  Alex Tokar ,  David Berman ,  Moshe Beylin

Inventor： Isaac Mazor ,  Alex Dikopoltsev ,  Boris Yokhin ,  Tzachi Rafaeli ,  Alex Tokar ,  David Berman ,  Moshe Beylin

IPC: G01N23/20

CPC classification number: G01N23/201 ,  G01N2223/052

Abstract: A computer-implemented method for inspection of a sample includes defining a plurality of locations on a surface of the sample, irradiating the surface at each of the locations with a beam of X-rays, and measuring an angular distribution of the X-rays that are emitted from the surface responsively to the beam, so as to produce a respective plurality of X-ray spectra. The X-ray spectra are analyzed to produce respective figures-of-merit indicative of a measurement quality of the X-ray spectra at the respective locations. One or more locations are selected out of the plurality of locations responsively to the figures-of-merit, and a property of the sample is estimated using the X-ray spectra measured at the selected locations.

Abstract translation: 用于检查样品的计算机实现的方法包括在样品的表面上限定多个位置，用X射线照射每个位置处的表面，并测量X射线的角度分布， 响应于光束从表面发射，以产生相应的多个X射线光谱。 分析X射线光谱以产生各自的相应的品质指数，表示在各个位置处的X射线光谱的测量质量。 响应于品质因数从多个位置中选择一个或多个位置，并且使用在所选择的位置处测量的X射线光谱来估计样品的性质。

公开(公告)号：US07649978B2

公开(公告)日：2010-01-19

申请号：US12232259

申请日：2008-09-12

Applicant: Isaac Mazor ,  Alex Dikopoltsev ,  Boris Yokhin ,  Dileep Agnihotri ,  Tzachi Rafaeli ,  Alex Tokar ,  David Berman ,  Moshe Beylin

Inventor： Isaac Mazor ,  Alex Dikopoltsev ,  Boris Yokhin ,  Dileep Agnihotri ,  Tzachi Rafaeli ,  Alex Tokar ,  David Berman ,  Moshe Beylin

IPC: G01B15/02

CPC classification number: G01N23/201 ,  G01N2223/052

Abstract: The computer-implemented method for inspection of a sample includes defining a plurality of locations on a surface of the sample, irradiating the surface at each of the locations with a beam of X-rays, and measuring an angular distribution of the X-rays that are emitted from the surface responsively to the beam, so as to produce a respective plurality of X-ray spectra. The X-ray spectra are analyzed to produce respective figures-of-merit indicative of a measurement quality of the X-ray spectra at the respective location. One or more locations are selected out of the plurality of locations responsively to the figures-of-merit, and a property of the sample is estimated using the X-ray spectra measured at the selected location.

Abstract translation: 用于检查样品的计算机实现的方法包括在样品的表面上限定多个位置，用X射线照射每个位置处的表面，并测量X射线的角度分布， 响应于光束从表面发射，以产生相应的多个X射线光谱。 分析X射线光谱以产生各自的相应的品质因数，表明在相应位置处的X射线光谱的测量质量。 响应于品质因数从多个位置中选择一个或多个位置，并且使用在所选择的位置处测量的X射线光谱来估计样品的性质。