摘要:
A casting device in which refrigerant is pressure-fed to a cooling passage formed in a die, leakage of refrigerant in the die can be reliably detected in a short time without a significant modification applied to the conventional device. A casting device includes a pressure-feed device that pressure-feeds refrigerant to a cooling passage formed in a die, and a release agent coating applicator that applies a release agent to the die, and further includes a unit that mixes a fluorescent agent into the refrigerant (fluorescent agent tank), a unit that irradiates the die surface of the die with black light while the refrigerant containing the fluorescent agent mixed therein is pressure-fed to the die, and an imaging device that captures an image of the die surface. The imaging device is integrally assembled with the release agent coating applicator.
摘要:
An inspecting apparatus according to the present invention has: an imaging section 30 for obtaining images of a first range and a second range of an inspection target object; the first range being shifted from the first range in a prescribed direction, a differential processing section 44 for obtaining a difference between signals of the image of the first range and that of the second range; and an inspecting section 46 for inspecting the existence of a defect in the inspection target object, based on processing results obtained from the differential processing section 44.
摘要:
An edge inspection apparatus includes: an illumination means 5 that illuminates an edge of a flat subject with diffused light from a position other than directly above or directly below a surface or a reverse surface of the subject; an imaging means 4 that takes an image of the edge from a position in a direction perpendicular to a plane parallel to the surface or the reverse surface of the subject at the same time; and an inspection means 7 that inspects conditions of a portion of the edge, which is inclined with respect to the surface or the reverse surface using the image obtained by the imaging means.
摘要:
An edge inspection apparatus includes: an illumination means 5 that illuminates an edge of a flat subject with diffused light from a position other than directly above or directly below a surface or a reverse surface of the subject; an imaging means 4 that takes an image of the edge from a position in a direction perpendicular to a plane parallel to the surface or the reverse surface of the subject at the same time; and an inspection means 7 that inspects conditions of a portion of the edge, which is inclined with respect to the surface or the reverse surface using the image obtained by the imaging means.
摘要:
A surface inspection apparatus includes an illuminating part illuminating an edge part of a substrate from a direction deviated from a direction of normal line of the edge part by an angle being predetermined, the edge part being inclined and the substrate being an inspection target, an imaging optics forming an image from a diffracted light from a captured area of the edge part as a dark field image, an imaging part capturing the dark field image obtained by the imaging optics, and a detecting part detecting a defect based on whether or not a striated image appears on the dark field image corresponding to the edge part obtained by the imaging part.
摘要:
A casting device in which refrigerant is pressure-fed to a cooling passage formed in a die, leakage of refrigerant in the die can be reliably detected in a short time without a significant modification applied to the conventional device. A casting device includes a pressure-feed device that pressure-feeds refrigerant to a cooling passage formed in a die, and a release agent coating applicator that applies a release agent to the die, and further includes a unit that mixes a fluorescent agent into the refrigerant (fluorescent agent tank), a unit that irradiates the die surface of the die with black light while the refrigerant containing the fluorescent agent mixed therein is pressure-fed to the die, and an imaging device that captures an image of the die surface. The imaging device is integrally assembled with the release agent coating applicator.
摘要:
An observation device (1) for observing a portion near the end of a wafer (10), comprising an imaging section (40) for imaging an image near the end of a wafer (10) from the extending direction of the wafer (10), and an image processing section (50) for detecting the edge of a film formed on the surface of the wafer (10) is further provided, as an illumination section for illuminating a portion near the end of a wafer (10), with an epi-illumination source (48) for illuminating a portion near the end of a wafer (10) via an observation optical system (41), and a diffusion illumination source (31) arranged to face the surface of the wafer (10) and illuminate a portion near the end of a wafer (10) using diffused light.