Method for making a slant-surface silicon wafer having a reconstructed
atomic-level stepped surface structure
    4.
    发明授权
    Method for making a slant-surface silicon wafer having a reconstructed atomic-level stepped surface structure 有权
    制造具有重构的原子级台阶表面结构的倾斜表面硅晶片的方法

    公开(公告)号:US5966625A

    公开(公告)日:1999-10-12

    申请号:US187038

    申请日:1998-11-06

    摘要: A single crystal silicon wafer is sliced off so as to have a slant surface that is inclined from plane (001) such that the normal of the slant surface is inclined by 0.01.degree. to 0.2.degree. from direction [001] toward direction [110]. After being cleaned, the silicon wafer is heat-treated at 600-1,300.degree. C. for not less than 1 minute in an ultrapure argon or hydrogen atmosphere containing nitrogen at not more than 0.1 ppm, to thereby cause the slant surface to have a stepped crystal surface structure. The stepped crystal surface structure is constituted of step walls Sa and Sb when it has been formed by a heat treatment in an argon atmosphere, and substantially all of its step walls are of a type Sb when it has been formed by a heat treatment in a hydrogen atmosphere.

    摘要翻译: 将单晶硅晶片切割成具有从平面(001)倾斜的倾斜表面,使得倾斜表面的法线从方向[001]朝向[110]方向倾斜0.01°至0.2°。 在清洁后,在含有不大于0.1ppm的氮气的超纯氩或氢气氛中,在600-1300℃下对硅晶片进行不少于1分钟的热处理,从而使倾斜表面具有阶梯状 晶体表面结构。 当在氩气气氛中通过热处理形成阶梯状的晶体表面结构时,由阶梯壁Sa和Sb构成,当通过热处理形成Sb时,基本上所有的台阶壁都是Sb型 氢气氛。