Method of polishing copper layer of substrate
    3.
    发明授权
    Method of polishing copper layer of substrate 失效
    抛光衬底铜层的方法

    公开(公告)号:US06797626B2

    公开(公告)日:2004-09-28

    申请号:US10331070

    申请日:2002-12-27

    IPC分类号: H01L21302

    摘要: The method of polishing a copper layer of a substrate is capable of improving a stock removal rate, etc. The method comprises the steps of: supplying a substrate onto an polishing pad of an polishing plate with a copper layer facing the polishing pad; pressing the substrate onto the polishing pad, with a backing pad, by a press head; relatively rotating the press head with respect to the polishing plate, with supplying polishing slurry onto the polishing pad. The backing pad is made of a material whose Asker C hardness is 75-95 and whose compressibility is 10% or less. The polishing slurry includes a chelating agent for chelating copper, an etching agent for etching the surface of copper layer, an oxidizing agent for oxidizing the surface of copper layer, and water.

    摘要翻译: 抛光基板的铜层的方法能够提高原料去除率等。该方法包括以下步骤:将基板供给到具有面向抛光垫的铜层的抛光板的抛光垫上; 用衬垫将衬底用衬垫压入抛光垫上; 相对于抛光板相对地旋转压头,同时将抛光浆料供应到抛光垫上。 衬垫由Asker C硬度为75-95且压缩率为10%以下的材料制成。 抛光浆料包括用于螯合铜的螯合剂,用于蚀刻铜层表面的蚀刻剂,用于氧化铜层表面的氧化剂和水。