Porous gas sensors and method of preparation thereof
    2.
    发明申请
    Porous gas sensors and method of preparation thereof 有权
    多孔气体传感器及其制备方法

    公开(公告)号:US20050151214A1

    公开(公告)日:2005-07-14

    申请号:US11041358

    申请日:2005-01-24

    IPC分类号: H01L27/14

    CPC分类号: G01N27/127

    摘要: A sensor is disclosed. A representative sensor includes a silicon substrate having a porous silicon region. A portion of the porous silicon region has a front contact is disposed thereon. The contact resistance between the porous silicon region and the front contact is between about 10 ohms and 100 ohms.

    摘要翻译: 公开了一种传感器。 代表性的传感器包括具有多孔硅区域的硅衬底。 多孔硅区域的一部分设置有前触点。 多孔硅区域和前端接触点之间的接触电阻介于约10欧姆与100欧姆之间。

    High-pressure quartz crystal microbalance
    3.
    发明授权
    High-pressure quartz crystal microbalance 有权
    高压石英晶体微量天平

    公开(公告)号:US08718956B2

    公开(公告)日:2014-05-06

    申请号:US13208842

    申请日:2011-08-12

    摘要: Described is an apparatus for measuring mass change under high pressure, comprising: a high pressure cell comprising a reference quartz crystal microbalance sensor and a sample quartz crystal microbalance sensor, wherein the sample quartz crystal microbalance sensor is coated with a test sample selected from the group consisting of nanoporous materials and metal-organic frameworks; a pressure sensor operatively connected to the high pressure cell; a thermocouple operatively connected to the high pressure cell, wherein the high pressure cell is maintained at a pre-selected temperature; a gas inlet fluidly connected to the high pressure cell; and a gas outlet fluidly connected to the high pressure cell. Also described are methods of making and using the apparatus.

    摘要翻译: 描述了一种用于测量高压下的质量变化的装置,包括:包括参考石英晶体微量天平传感器和样品石英晶体微量天平传感器的高压电池,其中所述样品石英晶体微量天平传感器涂覆有选自所述组 由纳米多孔材料和金属 - 有机骨架构成; 操作地连接到高压电池的压力传感器; 可操作地连接到高压电池的热电偶,其中高压电池保持在预选温度; 流体连接到高压电池的气体入口; 以及流体连接到高压电池的气体出口。 还描述了制造和使用该装置的方法。

    Pin array assembly and method of manufacture
    5.
    发明授权
    Pin array assembly and method of manufacture 失效
    针阵列组装及制造方法

    公开(公告)号:US06455352B1

    公开(公告)日:2002-09-24

    申请号:US09653672

    申请日:2000-09-01

    IPC分类号: H01L2144

    摘要: An improved pin array assembly and method of manufacture of the pin array assembly are provided. A pin array assembly includes a single crystal silicon wafer. The single crystal silicon wafer is formed to define a base and an array of pins. Each of the pins has a shaft and a tip surface. The pin shaft is hydrophobic and the pin tip surface is hydrophilic. The method of manufacture of the pin array assembly includes the steps of forming an initial shape of a single crystal silicon wafer to define a base and an array of pins. The initial shape of a single crystal silicon wafer is etched and the array of pins is polished. The step of forming an initial shape of a single crystal silicon wafer to define a base and an array of pins includes mechanically sawing the single crystal silicon wafer to define a base and an array of pins. Chemical treatment of the pins is performed to make the shaft of the pins hydrophobic and to make the pin tip surfaces hydrophilic.

    摘要翻译: 提供了一种改进的针阵列组件以及销阵列组件的制造方法。 针阵列组件包括单晶硅晶片。 形成单晶硅晶片以限定基部和引脚阵列。 每个销具有轴和尖端表面。 针轴是疏水的,针尖表面是亲水的。 引脚阵列组件的制造方法包括以下步骤:形成单晶硅晶片的初始形状以限定基座和引脚阵列。 蚀刻单晶硅晶片的初始形状并抛光销的阵列。 形成单晶硅晶片的初始形状以限定基部和引脚阵列的步骤包括机械地锯切单晶硅晶片以限定基部和引脚阵列。 执行销的化学处理以使销的轴疏水并使销尖表面亲水。

    Miniature optically coupled electrically isolated ultrasensitive dynamic pressure detector
    7.
    发明授权
    Miniature optically coupled electrically isolated ultrasensitive dynamic pressure detector 有权
    微型光耦电电隔离超灵敏动态压力检测器

    公开(公告)号:US07392707B2

    公开(公告)日:2008-07-01

    申请号:US10546966

    申请日:2004-02-19

    IPC分类号: G01L7/08

    摘要: A system for monitoring low dynamic pressures in confined spaces, such system comprising a catheter, a multilayered corrugated membrane of diameter less than 2 mm with a reflective inner layer mounted within said catheter; a set of optical fibers comprising one or more illuminating fibers and two or more detecting fibers which are contained within said catheter and whose ends are set at differing distances from the membrane; an illuminating system coupled to said illuminating fibers; and a detection system coupled to said illuminating fibers.

    摘要翻译: 一种用于在密闭空间中监测低动态压力的系统,该系统包括导管,直径小于2mm的多层波纹膜,反射内层安装在所述导管内; 一组光纤,其包括一个或多个照明纤维和两个或更多个检测纤维,其包含在所述导管内并且其端部设置在与所述膜不同的距离处; 耦合到所述照明光纤的照明系统; 以及耦合到所述照明光纤的检测系统。

    Compliant Rotary Mechanism and Method
    9.
    发明申请
    Compliant Rotary Mechanism and Method 有权
    符合旋转机构和方法

    公开(公告)号:US20060254362A1

    公开(公告)日:2006-11-16

    申请号:US11380448

    申请日:2006-04-27

    IPC分类号: G01H11/00

    CPC分类号: G01H13/00 G01H11/02

    摘要: Disclosed are various systems and methods to generate rotary motion. In one embodiment, a system is provided, which comprises one or more anchors, and a mass configured for rotary motion. Also, one or more compliant two-position mechanisms are attached to the mass and to the one or more anchors. The compliant two-position mechanisms restrict the rotary motion of the mass from a first angular position to a second angular position.

    摘要翻译: 公开了产生旋转运动的各种系统和方法。 在一个实施例中,提供了一种系统,其包括一个或多个锚定件和构造成用于旋转运动的质量。 此外,一个或多个顺从的两位置机构附接到质量块和一个或多个锚固件。 柔顺的双位置机构将质量的旋转运动从第一角位置限制到第二角位置。

    Miniature optically coupled electrically isolated ultrasensitive dynamic pressure detector
    10.
    发明申请
    Miniature optically coupled electrically isolated ultrasensitive dynamic pressure detector 有权
    微型光耦电电隔离超灵敏动态压力检测器

    公开(公告)号:US20060225510A1

    公开(公告)日:2006-10-12

    申请号:US10546966

    申请日:2004-02-19

    IPC分类号: G01L9/00

    摘要: A system for monitoring low dynamic pressures in confined spaces, such system comprising a catheter, a multilayered corrugated membrane of diameter less than 2 mm with a reflective inner layer mounted within said catheter; a set of optical fibers comprising one or more illuminating fibers and two or more detecting fibers which are contained within said catheter and whose ends are set at differing distances from the membrane; an illuminating system coupled to said illuminating fibers; and a detection system coupled to said illuminating fibers.

    摘要翻译: 一种用于在密闭空间中监测低动态压力的系统,该系统包括导管,直径小于2mm的多层波纹膜,反射内层安装在所述导管内; 一组光纤,其包括一个或多个照明纤维和两个或更多个检测纤维,其包含在所述导管内并且其端部设置在与所述膜不同的距离处; 耦合到所述照明光纤的照明系统; 以及耦合到所述照明光纤的检测系统。