公开(公告)号：US20120100298A1

公开(公告)日：2012-04-26

申请号：US13380630

申请日：2010-06-24

申请人： Reiko Moriyama ,  Hideo Saito ,  Syouzou Takada ,  Ichirou Doi

发明人： Reiko Moriyama ,  Hideo Saito ,  Syouzou Takada ,  Ichirou Doi

IPC分类号： B05D5/00 ,  C08K5/05 ,  B05D3/00 ,  C08K5/07 ,  C08K5/10 ,  C08L83/04 ,  C08K5/06

CPC分类号： C08L83/04 ,  C08G77/02 ,  C08G77/04 ,  C08K3/36 ,  C08K2201/016 ,  H01L21/02123 ,  H01L21/02208 ,  H01L21/02282 ,  H01L21/3121 ,  H01L51/448 ,  Y10T428/31663 ,  C08L83/00

摘要： Provided is a condensation reaction product solution which is particularly suitable for filling a trench formed on a substrate having a narrow width and a high aspect ratio. The condensation reaction product solution has a long pot life, superior trench-filling when used for trench-filling, and a low cure shrinkage, an excellent crack resistance and a HF resistance when cured and converted into silicon oxide. The condensation reaction product solution comprises (I) a condensation reaction product obtained by condensation reaction from a condensation component comprising (i) 40% by mass or more and 99% by mass or less in equivalent of condensate of polysiloxane compound derived from silane compounds represented by the general formula (1): R1nSiX14-n (wherein n is an integer of 0 to 3, R1 is hydrogen atom or a C1-10 hydrocarbon group, and X1 is a halogen atom, a C1-6 alkoxy group or acetoxy group) and (ii) 1% by mass or more and 60% by mass or less of silica particles, and (II) a solvent, wherein the silane compounds represented by the general formula (1) are two or more types of silane compounds comprising a tetrafunctional silane compound which corresponds to the case of n=0 in the general formula (1) and a trifunctional silane compound which corresponds to the case of n=1 in the general formula (1).

摘要翻译： 提供了一种缩合反应产物溶液，其特别适用于填充形成在具有窄宽度和高纵横比的基底上的沟槽。 缩合反应产物溶液具有长的适用期，用于沟槽填充时具有优异的沟槽填充性，并且固化和转化为氧化硅时具有低固化收缩率，优异的抗裂性和耐HF性。 缩合反应产物溶液包含（I）通过缩合反应得到的缩合反应产物，该缩合反应产物包含（i）40质量％以上且99质量％以下，相当于衍生自表示的硅烷化合物的聚硅氧烷化合物的缩合物 通式（1）表示：R1nSiX14-n（其中n为0〜3的整数，R1为氢原子或C1-10烃基，X1为卤素原子，C1-6烷氧基或乙酰氧基） ）和（ii）1质量％以上且60质量％以下的二氧化硅颗粒，和（II）溶剂，其中由通式（1）表示的硅烷化合物是两种或更多种类型的硅烷化合物，其包含 对应于通式（1）中n = 0的情况的四官能硅烷化合物和通式（1）中n = 1的情况下的三官能性硅烷化合物。

公开(公告)号：US08906153B2

公开(公告)日：2014-12-09

申请号：US13380630

申请日：2010-06-24

申请人： Reiko Moriyama ,  Hideo Saito ,  Syouzou Takada ,  Ichirou Doi

发明人： Reiko Moriyama ,  Hideo Saito ,  Syouzou Takada ,  Ichirou Doi

IPC分类号： C09D183/04 ,  C08L83/04 ,  H01L21/312 ,  H01L21/02 ,  C08G77/04 ,  C08K3/36 ,  C08G77/02 ,  H01L51/44

CPC分类号： C08L83/04 ,  C08G77/02 ,  C08G77/04 ,  C08K3/36 ,  C08K2201/016 ,  H01L21/02123 ,  H01L21/02208 ,  H01L21/02282 ,  H01L21/3121 ,  H01L51/448 ,  Y10T428/31663 ,  C08L83/00

摘要： Provided is a condensation reaction product solution which is particularly suitable for filling a trench formed on a substrate having a narrow width and a high aspect ratio. The condensation reaction product solution has a long pot life, superior trench-filling when used for trench-filling, and a low cure shrinkage, an excellent crack resistance and a HF resistance when cured and converted into silicon oxide. The condensation reaction product solution comprises (I) a condensation reaction product obtained by condensation reaction from a condensation component comprising (i) 40% by mass or more and 99% by mass or less in equivalent of condensate of polysiloxane compound derived from silane compounds represented by the general formula (1): R1nSiX14-n (wherein n is an integer of 0 to 3, R1 is hydrogen atom or a C1-10 hydrocarbon group, and X1 is a halogen atom, a C1-6 alkoxy group or acetoxy group) and (ii) 1% by mass or more and 60% by mass or less of silica particles, and (II) a solvent, wherein the silane compounds represented by the general formula (1) are two or more types of silane compounds comprising a tetrafunctional silane compound which corresponds to the case of n=0 in the general formula (1) and a trifunctional silane compound which corresponds to the case of n=1 in the general formula (1).

摘要翻译： 提供了一种缩合反应产物溶液，其特别适用于填充形成在具有窄宽度和高纵横比的基底上的沟槽。 缩合反应产物溶液具有长的适用期，用于沟槽填充时具有优异的沟槽填充性，并且固化和转化为氧化硅时具有低固化收缩率，优异的抗裂性和耐HF性。 缩合反应产物溶液包含（I）通过缩合反应得到的缩合反应产物，该缩合反应产物包含（i）40质量％以上且99质量％以下，相当于衍生自表示的硅烷化合物的聚硅氧烷化合物的缩合物 通式（1）表示：R1nSiX14-n（其中n为0〜3的整数，R1为氢原子或C1-10烃基，X1为卤素原子，C1-6烷氧基或乙酰氧基） ）和（ii）1质量％以上且60质量％以下的二氧化硅颗粒，和（II）溶剂，其中由通式（1）表示的硅烷化合物是两种或更多种类型的硅烷化合物，其包含 对应于通式（1）中n = 0的情况的四官能硅烷化合物和通式（1）中n = 1的情况下的三官能性硅烷化合物。