公开(公告)号：US4763826A

公开(公告)日：1988-08-16

申请号：US862988

申请日：1986-05-14

申请人： Frederick W. Kulicke, Jr. ,  David A. Leonhardt ,  Robert B. Newsome ,  Richard D. Sadler ,  Gary S. Gillotti

发明人： Frederick W. Kulicke, Jr. ,  David A. Leonhardt ,  Robert B. Newsome ,  Richard D. Sadler ,  Gary S. Gillotti

IPC分类号： B23K20/00 ,  B23K37/00

CPC分类号： H01L24/78 ,  B23K20/005 ,  H01L2224/78313 ,  H01L2224/786 ,  H01L2224/851 ,  H01L2924/00014 ,  H01L2924/01023 ,  H01L2924/01033 ,  H01L2924/01082

摘要： An improved automatic wire feed system for supplying a fine wire to a capillary bonding tool or to a wedge bonding tool is provided. The wire feed system includes a novel wire feed slack loop device which is mounted on the wire bonder between the bonding tool and the source of fine wire. The novel wire feed slack loop device comprises a pair of sector plates which are closely spaced apart from each other to provide an air space therebetween for receiving the fine wire. Compressed air is supplied to the air space between the sector plates and is directed radially outward by a diffuser shim plate which forces the wire to form into a uniform circular shape in the air space. Sensor means are provided at the outer perimeter of the sector plates which sense the position of the fine wire and supplies a signal to control means which turns off the rotation of the drive motor. Turning off the gas provides a slack wire loop with sufficient fine wire to make an interconnection on a semiconductor device without creating tension or compression of the wire at the bonding tool.

摘要翻译： 提供了一种用于将细线供应到毛细管接合工具或楔形接合工具的改进的自动送丝系统。 送丝系统包括一种新颖的送丝松弛环装置，其安装在接合工具和细丝源之间的接线机上。 新颖的送丝松弛环装置包括彼此紧密间隔开的一对扇形板，以在其间提供用于接收细线的空气空间。 压缩空气被供给到扇形板之间的空气空间，并且通过扩散器垫片径向向外指向，该扩散板垫板迫使电线在空气空间中形成均匀的圆形形状。 传感器装置设置在扇形板的外周边，感测细线的位置，并将信号提供给控制装置，该控制装置关闭驱动电动机的旋转。 关闭气体提供具有足够细线的松弛线环，以在半导体器件上形成互连，而不会在焊接工具处产生电线的张力或压缩。

公开(公告)号：US4972311A

公开(公告)日：1990-11-20

申请号：US232003

申请日：1988-08-15

申请人： William J. Holdgrafer ,  Douglas L. Gauntt ,  Robert B. Newsome

发明人： William J. Holdgrafer ,  Douglas L. Gauntt ,  Robert B. Newsome

IPC分类号： H01L21/52 ,  G05D3/00 ,  G05D3/12 ,  H01L21/50 ,  H01L21/60 ,  H01L21/68

CPC分类号： H01L24/78 ,  H01L21/682 ,  G05B2219/37572 ,  G05B2219/37619 ,  G05B2219/41206 ,  G05B2219/49195 ,  H01L2224/78301 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01075 ,  H01L2924/01082 ,  H01L2924/12042

摘要： Apparatus and a method of correcting for repeatable positioning errors in an X-Y table is provided. An accurate mask is provided having a plurality of repetitive recognizable patterns thereon which is placed in the field of view of a pattern recognition system of a semiconductor processing machine to be calibrated. The semiconductor processing machine is programmed to perform a series of steps which steps the X-Y table to positions which are supposedly accurate relative to a fixed point. At each of the stepped points, the plurality of repetitive recognizable patterns on the mask are electronically scanned by the pattern recognition system and the deviation of the position of the pattern relative to the desired position is calculated to provide X and Y deviations from the theoretical position of the X-Y table. These deviations of points along a linear X and a linear Y axis are employed to calculate the actual deviations of other pattern points for all of the possible positions of movement along other X and Y axes.