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公开(公告)号：US07184207B1
公开(公告)日：2007-02-27
申请号：US11315415
申请日：2005-12-21
IPC分类号： H01S3/00
CPC分类号： G02B6/1228 , G02B6/2813 , G02F1/025 , G02F2001/217
摘要： An optical device comprises a semiconductor structure including first and second ridge waveguides, each waveguide comprising a ridge extending across a surface of the semiconductor structure. The ridge of the first waveguide has a first height above a first region of the surface, and the ridge of the second waveguide has a second, greater, height above a second region of the surface. The semiconductor structure includes a multimode interference (MMI) region situated between the first and second ridge waveguides, which provides a transition between them. At least a part of the MMI region is tapered in width and/or at least a part of the first and/or second ridge waveguide is tapered in width in a direction extending away from the MMI region.
摘要翻译： 光学装置包括包括第一和第二脊状波导的半导体结构，每个波导包括跨越半导体结构的表面延伸的脊。 第一波导的脊具有在表面的第一区域之上的第一高度，并且第二波导的脊在表面的第二区域之上具有第二较高的高度。 半导体结构包括位于第一和第二脊波导之间的多模干涉（MMI）区域，其提供它们之间的转变。 MMI区域的至少一部分在宽度上呈锥形，并且/或第一和/或第二脊形波导的至少一部分在远离MMI区域的方向上在宽度上逐渐变细。
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公开(公告)号：US07204932B2
公开(公告)日：2007-04-17
申请号：US10973568
申请日：2004-10-26
IPC分类号： B29D11/00
CPC分类号： G02B6/136 , G02B6/1228 , G02B6/126 , G02B2006/12097
摘要： An improved method is provided for fabricating a polarisation rotator in a rib waveguide having a propagation axis and opposite side walls. The method includes etching a pit in the substrate surface to form a recess in one of the side walls of the waveguide, during formation of the waveguide on the substrate surface, so as to provide an asymmetric waveguide section for imparting polarisation rotation to radiation propagated along the propagation axis. Preferably the pit is formed by a wet etching step forming an upper side surface within the recess that is inclined relative the waveguide side walls, and the waveguide side walls are formed by a dry etching step to extend perpendicularly to the substrate surface. In addition the dry etching step forms a lower side surface adjoining the upper side surface within the recess and tilted relative to the upper side surface. Such a method is significantly simplified as compared with prior art production methods, as well as providing greater yield and more predictable device performance since mask alignment errors no longer affect the design parameters of the rotator.
摘要翻译： 提供了一种用于在具有传播轴和相对侧壁的肋波导中制造偏振旋转器的改进方法。 该方法包括在衬底表面上形成波导期间蚀刻衬底表面中的凹坑以在波导的一个侧壁中形成凹陷，以便提供用于使波长旋转对沿着 传播轴。 优选地，通过湿蚀刻步骤形成凹坑，该凹蚀形成在凹槽内相对于波导侧壁倾斜的上侧表面，并且波导侧壁通过干蚀刻步骤形成，以垂直于基底表面延伸。 此外，干蚀刻步骤形成与凹部内的上侧表面相邻并且相对于上侧表面倾斜的下侧表面。 与现有技术的制造方法相比，这种方法被显着简化，并且由于掩模对准误差不再影响转子的设计参数，因此提供更大的产量和更可预测的装置性能。
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公开(公告)号：US07174080B2
公开(公告)日：2007-02-06
申请号：US10398830
申请日：2001-10-08
申请人： Robert Graham Walker
发明人： Robert Graham Walker
CPC分类号： G02B6/14 , G02B6/125 , G02B6/136 , G02B6/2813 , G02B2006/12097 , G02B2006/12109 , G02B2006/12173 , G02B2006/12178
摘要： The invention concerns a guided wave spatial filter (300) for receiving input radiation and outputting corresponding filtered output radiation, the filter comprising first and second waveguide sections (30, L3, L5) connected in series, the sections: (a) mutually matched for transmitting fundamental mode radiation components present in the input radiation therethrough to provide the output radiation; and (b) mutually mismatched for hindering higher-order mode radiation components present in the input radiation from propagating therethrough and contributing to the output radiation. The spatial filter (300) is implemented using rib waveguides (30) for the sections with associated relatively deeply and relatively shallowly etched structures (20, 310, 320) for imparting to the sections their radiation mode filtration characteristics. The spatial filter according to the invention can be incorporated into optical splitters and optical modulators to enhance their performance and desensitise them to higher-order mode radiation injected thereinto.
摘要翻译： 本发明涉及一种用于接收输入辐射并输出相应的滤波输出辐射的导波空间滤波器（300），该滤波器包括串联连接的第一和第二波导部分（30，L 3，L 5），部分：（a）相互 匹配用于传输存在于输入辐射中的基本模式辐射分量，以提供输出辐射; 和（b）相互错配用于阻止存在于输入辐射中的高阶模辐射分量传播通过并有助于输出辐射。 空间滤波器（300）使用用于具有相关联的相对较深和相对浅蚀刻的结构（20,310,320）的部分的肋波导（30）来实现，以向该部分赋予它们的辐射模式滤波特性。 根据本发明的空间滤波器可以并入到光分路器和光调制器中以增强其性能并使其对于注入到其中的高阶模式辐射脱敏。
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公开(公告)号：US07082237B2
公开(公告)日：2006-07-25
申请号：US10501807
申请日：2003-01-20
CPC分类号： G02F1/2257 , G02F1/218 , G02F1/2255 , G02F2001/212 , G02F2201/126 , G02F2202/101
摘要： A Mach-Zehnder interferometer modulator for modulating a beam of laser light includes a pair of separate waveguides through which the laser light is passed after splitting in a splitting zone and after which the light is recombined in a merge zone. The waveguides are formed in a semiconductor material with one of the electrodes of each pair being formed in a doped layer while the other electrode, the top electrode, is a surface metalisation. The doped layer is trenched so that adjacent electrodes in the doped layer are electrically isolated from one another so that one of the electrodes in the doped layer can be connected with a different electrical polarity to the other electrode in the doped layer thereby permitting the connection of the pairs of electrodes in parallel anti-phase mode.
摘要翻译： 用于调制激光束的马赫 - 策德尔干涉仪调制器包括一对分离的波导，激光在分裂区域中分裂后通过该波导通过，之后光在合并区域中重新组合。 波导形成在半导体材料中，每对电极中的一个电极形成在掺杂层中，而另一个电极，顶部电极是表面金属化。 掺杂层被沟槽化，使得掺杂层中的相邻电极彼此电绝缘，使得掺杂层中的一个电极可以与掺杂层中的另一个电极的不同的电极连接，从而允许 电极对成并联反相模式。
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公开(公告)号：US07035486B2
公开(公告)日：2006-04-25
申请号：US10497470
申请日：2002-11-29
CPC分类号： G02F1/2257 , G02B6/125 , G02F2001/212 , H04B10/505 , H04B10/5051
摘要： A photonic integrated device having a substrate layer, epitaxial layers formed on said substrate layer and a guiding layer formed by one of the epitaxial layers. An optical waveguide is formed within the guiding layer. In the waveguide are a splitter (4) having at least two outputs, each output being transmitted to a Mach-Zehnder modulator (6, 8), the phase of the output of at least one modulator being shiftable, the signals being recombined to provide an optical phase shift key (PSK) output (14) wherein a trench is etched into the substrate layer between each pair of modulators to isolate the modulators from one another.
摘要翻译： 一种具有衬底层，形成在所述衬底层上的外延层和由一个外延层形成的引导层的光子集成器件。 导光层内形成有光波导。 在波导管中具有至少两个输出的分离器（4），每个输出传输到马赫 - 曾德调制器（6,8），至少一个调制器的输出相位是可移位的，该信号被重组以提供 光学相移键（PSK）输出（14），其中沟槽被蚀刻到每对调制器之间的衬底层中以将调制器彼此隔离。
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