公开(公告)号：US08179523B2

公开(公告)日：2012-05-15

申请号：US13195593

申请日：2011-08-01

申请人： Yoshikazu Katou ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

发明人： Yoshikazu Katou ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

IPC分类号： G01N21/00

CPC分类号： G01N21/95607 ,  G01N2021/95676 ,  G03F1/84 ,  Y10T428/13

摘要： A resist inspection apparatus is provided which has a configuration in which a reticle is separated from a pellicle. A reticle cassette is made up of two pieces of plate members. A hollowed portion with a shape allowing the reticle to be inserted into the plate member. Another hollowed portion having a shape being slightly larger than that of the resist of the reticle is formed on the plate member. In the circumference of the hollowed portion is placed a pellicle frame on which a protective film is formed in a stretched manner. In the concave portion is housed in the reticle with a resist on the reticle directed toward the hollowed portion. The reticle is put in sealed space.

摘要翻译： 提供了具有将掩模版与防护薄膜分离的结构的抗蚀剂检查装置。 标线盒由两片板构件构成。 具有允许将标线插入板构件的形状的中空部分。 在板状部件上形成另一个具有略大于标线的抗蚀剂形状的中空部分。 在中空部分的圆周上放置防护薄膜组件框架，其上以拉伸方式形成保护膜。 在凹部中容纳在掩模版上，在掩模版上具有抵抗朝向中空部分的抗蚀剂。 将掩模版放在密封空间中。

公开(公告)号：US20090161098A1

公开(公告)日：2009-06-25

申请号：US12341208

申请日：2008-12-22

申请人： YOSHIKAZU KATOU ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

发明人： YOSHIKAZU KATOU ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

IPC分类号： G01N21/00 ,  B32B1/00

CPC分类号： G01N21/95607 ,  G01N2021/95676 ,  G03F1/84 ,  Y10T428/13

摘要： A resist inspection apparatus is provided which has a configuration in which a reticle is separated from a pellicle. A reticle cassette is made up of two pieces of plate members. A hollowed portion with a shape allowing the reticle to be inserted into the plate member. Another hollowed portion having a shape being slightly larger than that of the resist of the reticle is formed on the plate member. In the circumference of the hollowed portion is placed a pellicle frame on which a protective film is formed in a stretched manner. In the concave portion is housed in the reticle with a resist on the reticle directed toward the hollowed portion. The reticle is put in sealed space.

摘要翻译： 提供了具有将掩模版与防护薄膜分离的结构的抗蚀剂检查装置。 标线盒由两片板构件构成。 具有允许将标线插入板构件的形状的中空部分。 在板状部件上形成另一个具有略大于标线的抗蚀剂形状的中空部分。 在中空部分的圆周上放置防护薄膜组件框架，其上以拉伸方式形成保护膜。 在凹部中容纳在掩模版上，在掩模版上具有抵抗朝向中空部分的抗蚀剂。 将掩模版放在密封空间中。

公开(公告)号：US20110279816A1

公开(公告)日：2011-11-17

申请号：US13195593

申请日：2011-08-01

申请人： YOSHIKAZU KATOU ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

发明人： YOSHIKAZU KATOU ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

IPC分类号： G01N21/00 ,  B65D85/00

CPC分类号： G01N21/95607 ,  G01N2021/95676 ,  G03F1/84 ,  Y10T428/13

摘要： A resist inspection apparatus is provided which has a configuration in which a reticle is separated from a pellicle. A reticle cassette is made up of two pieces of plate members. A hollowed portion with a shape allowing the reticle to be inserted into the plate member. Another hollowed portion having a shape being slightly larger than that of the resist of the reticle is formed on the plate member. In the circumference of the hollowed portion is placed a pellicle frame on which a protective film is formed in a stretched manner. In the concave portion is housed in the reticle with a resist on the reticle directed toward the hollowed portion. The reticle is put in sealed space.

摘要翻译： 提供了具有将掩模版与防护薄膜分离的结构的抗蚀剂检查装置。 标线盒由两片板构件构成。 具有允许将标线插入板构件的形状的中空部分。 在板状部件上形成另一个具有略大于标线的抗蚀剂形状的中空部分。 在中空部分的圆周上放置防护薄膜组件框架，其上以拉伸方式形成保护膜。 在凹部中容纳在掩模版上，在掩模版上具有抵抗朝向中空部分的抗蚀剂。 将掩模版放在密封空间中。

公开(公告)号：US08009285B2

公开(公告)日：2011-08-30

申请号：US12341208

申请日：2008-12-22

申请人： Yoshikazu Katou ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

发明人： Yoshikazu Katou ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

IPC分类号： G01N21/00

CPC分类号： G01N21/95607 ,  G01N2021/95676 ,  G03F1/84 ,  Y10T428/13

摘要： A resist inspection apparatus is provided which has a configuration in which a reticle is separated from a pellicle. A reticle cassette is made up of two pieces of plate members. A hollowed portion with a shape allowing the reticle to be inserted into the plate member. Another hollowed portion having a shape being slightly larger than that of the resist of the reticle is formed on the plate member. In the circumference of the hollowed portion is placed a pellicle frame on which a protective film is formed in a stretched manner. In the concave portion is housed in the reticle with a resist on the reticle directed toward the hollowed portion. The reticle is put in sealed space.

摘要翻译： 提供了具有将掩模版与防护薄膜分离的结构的抗蚀剂检查装置。 标线盒由两片板构件构成。 具有允许将标线插入板构件的形状的中空部分。 在板状部件上形成另一个具有略大于标线的抗蚀剂形状的中空部分。 在中空部分的圆周上放置防护薄膜组件框架，其上以拉伸方式形成保护膜。 在凹部中容纳在掩模版上，在掩模版上具有抵抗朝向中空部分的抗蚀剂。 将掩模版放在密封空间中。

公开(公告)号：US07244439B2

公开(公告)日：2007-07-17

申请号：US10410237

申请日：2003-04-10

申请人： Yuko Yago ,  Keisuke Nakao ,  Ryuji Hasegawa ,  Noboru Nagatani ,  Keiichi Fukuda ,  Naoki Nojiri ,  Hidetake Nakamura ,  Hideaki Kubo

发明人： Yuko Yago ,  Keisuke Nakao ,  Ryuji Hasegawa ,  Noboru Nagatani ,  Keiichi Fukuda ,  Naoki Nojiri ,  Hidetake Nakamura ,  Hideaki Kubo

IPC分类号： A61K6/00 ,  A61K9/14 ,  A61K9/16

CPC分类号： A61K8/0254 ,  A61K8/19 ,  A61K8/29 ,  A61K2800/412 ,  A61K2800/61 ,  A61Q1/00 ,  A61Q1/12

摘要： A cosmetic composition having excellent application feeling and transparency while maintaining covering power which includes (a) composite particles obtained by allowing at least two kinds of particles having different shapes and particle diameters to contact with at least one polymer compound selected from the group consisting of fluorinated polymer compounds, silicone polymer compounds, and mixture thereof, in the presence of supercritical carbon dioxide, and (b) a cosmetic component.

摘要翻译： 一种具有优异的使用感和透明度同时保持覆盖力的化妆品组合物，其包括（a）通过使至少两种具有不同形状和粒径的颗粒与至少一种选自以下的聚合物化合物接触而获得的复合颗粒：氟化 聚合物化合物，硅氧烷聚合物化合物及其混合物，在超临界二氧化碳的存在下，和（b）化妆品组分。