公开(公告)号：US08009285B2

公开(公告)日：2011-08-30

申请号：US12341208

申请日：2008-12-22

申请人： Yoshikazu Katou ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

发明人： Yoshikazu Katou ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

IPC分类号： G01N21/00

CPC分类号： G01N21/95607 ,  G01N2021/95676 ,  G03F1/84 ,  Y10T428/13

摘要： A resist inspection apparatus is provided which has a configuration in which a reticle is separated from a pellicle. A reticle cassette is made up of two pieces of plate members. A hollowed portion with a shape allowing the reticle to be inserted into the plate member. Another hollowed portion having a shape being slightly larger than that of the resist of the reticle is formed on the plate member. In the circumference of the hollowed portion is placed a pellicle frame on which a protective film is formed in a stretched manner. In the concave portion is housed in the reticle with a resist on the reticle directed toward the hollowed portion. The reticle is put in sealed space.

摘要翻译： 提供了具有将掩模版与防护薄膜分离的结构的抗蚀剂检查装置。 标线盒由两片板构件构成。 具有允许将标线插入板构件的形状的中空部分。 在板状部件上形成另一个具有略大于标线的抗蚀剂形状的中空部分。 在中空部分的圆周上放置防护薄膜组件框架，其上以拉伸方式形成保护膜。 在凹部中容纳在掩模版上，在掩模版上具有抵抗朝向中空部分的抗蚀剂。 将掩模版放在密封空间中。

公开(公告)号：US08179523B2

公开(公告)日：2012-05-15

申请号：US13195593

申请日：2011-08-01

申请人： Yoshikazu Katou ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

发明人： Yoshikazu Katou ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

IPC分类号： G01N21/00

CPC分类号： G01N21/95607 ,  G01N2021/95676 ,  G03F1/84 ,  Y10T428/13

摘要： A resist inspection apparatus is provided which has a configuration in which a reticle is separated from a pellicle. A reticle cassette is made up of two pieces of plate members. A hollowed portion with a shape allowing the reticle to be inserted into the plate member. Another hollowed portion having a shape being slightly larger than that of the resist of the reticle is formed on the plate member. In the circumference of the hollowed portion is placed a pellicle frame on which a protective film is formed in a stretched manner. In the concave portion is housed in the reticle with a resist on the reticle directed toward the hollowed portion. The reticle is put in sealed space.

摘要翻译： 提供了具有将掩模版与防护薄膜分离的结构的抗蚀剂检查装置。 标线盒由两片板构件构成。 具有允许将标线插入板构件的形状的中空部分。 在板状部件上形成另一个具有略大于标线的抗蚀剂形状的中空部分。 在中空部分的圆周上放置防护薄膜组件框架，其上以拉伸方式形成保护膜。 在凹部中容纳在掩模版上，在掩模版上具有抵抗朝向中空部分的抗蚀剂。 将掩模版放在密封空间中。

公开(公告)号：US20090161098A1

公开(公告)日：2009-06-25

申请号：US12341208

申请日：2008-12-22

申请人： YOSHIKAZU KATOU ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

发明人： YOSHIKAZU KATOU ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

IPC分类号： G01N21/00 ,  B32B1/00

CPC分类号： G01N21/95607 ,  G01N2021/95676 ,  G03F1/84 ,  Y10T428/13

摘要： A resist inspection apparatus is provided which has a configuration in which a reticle is separated from a pellicle. A reticle cassette is made up of two pieces of plate members. A hollowed portion with a shape allowing the reticle to be inserted into the plate member. Another hollowed portion having a shape being slightly larger than that of the resist of the reticle is formed on the plate member. In the circumference of the hollowed portion is placed a pellicle frame on which a protective film is formed in a stretched manner. In the concave portion is housed in the reticle with a resist on the reticle directed toward the hollowed portion. The reticle is put in sealed space.

摘要翻译： 提供了具有将掩模版与防护薄膜分离的结构的抗蚀剂检查装置。 标线盒由两片板构件构成。 具有允许将标线插入板构件的形状的中空部分。 在板状部件上形成另一个具有略大于标线的抗蚀剂形状的中空部分。 在中空部分的圆周上放置防护薄膜组件框架，其上以拉伸方式形成保护膜。 在凹部中容纳在掩模版上，在掩模版上具有抵抗朝向中空部分的抗蚀剂。 将掩模版放在密封空间中。

公开(公告)号：US20110279816A1

公开(公告)日：2011-11-17

申请号：US13195593

申请日：2011-08-01

申请人： YOSHIKAZU KATOU ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

发明人： YOSHIKAZU KATOU ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

IPC分类号： G01N21/00 ,  B65D85/00

CPC分类号： G01N21/95607 ,  G01N2021/95676 ,  G03F1/84 ,  Y10T428/13

摘要： A resist inspection apparatus is provided which has a configuration in which a reticle is separated from a pellicle. A reticle cassette is made up of two pieces of plate members. A hollowed portion with a shape allowing the reticle to be inserted into the plate member. Another hollowed portion having a shape being slightly larger than that of the resist of the reticle is formed on the plate member. In the circumference of the hollowed portion is placed a pellicle frame on which a protective film is formed in a stretched manner. In the concave portion is housed in the reticle with a resist on the reticle directed toward the hollowed portion. The reticle is put in sealed space.

摘要翻译： 提供了具有将掩模版与防护薄膜分离的结构的抗蚀剂检查装置。 标线盒由两片板构件构成。 具有允许将标线插入板构件的形状的中空部分。 在板状部件上形成另一个具有略大于标线的抗蚀剂形状的中空部分。 在中空部分的圆周上放置防护薄膜组件框架，其上以拉伸方式形成保护膜。 在凹部中容纳在掩模版上，在掩模版上具有抵抗朝向中空部分的抗蚀剂。 将掩模版放在密封空间中。