公开(公告)号：US08179523B2

公开(公告)日：2012-05-15

申请号：US13195593

申请日：2011-08-01

申请人： Yoshikazu Katou ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

发明人： Yoshikazu Katou ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

IPC分类号： G01N21/00

CPC分类号： G01N21/95607 ,  G01N2021/95676 ,  G03F1/84 ,  Y10T428/13

摘要： A resist inspection apparatus is provided which has a configuration in which a reticle is separated from a pellicle. A reticle cassette is made up of two pieces of plate members. A hollowed portion with a shape allowing the reticle to be inserted into the plate member. Another hollowed portion having a shape being slightly larger than that of the resist of the reticle is formed on the plate member. In the circumference of the hollowed portion is placed a pellicle frame on which a protective film is formed in a stretched manner. In the concave portion is housed in the reticle with a resist on the reticle directed toward the hollowed portion. The reticle is put in sealed space.

摘要翻译： 提供了具有将掩模版与防护薄膜分离的结构的抗蚀剂检查装置。 标线盒由两片板构件构成。 具有允许将标线插入板构件的形状的中空部分。 在板状部件上形成另一个具有略大于标线的抗蚀剂形状的中空部分。 在中空部分的圆周上放置防护薄膜组件框架，其上以拉伸方式形成保护膜。 在凹部中容纳在掩模版上，在掩模版上具有抵抗朝向中空部分的抗蚀剂。 将掩模版放在密封空间中。

公开(公告)号：US20090161098A1

公开(公告)日：2009-06-25

申请号：US12341208

申请日：2008-12-22

申请人： YOSHIKAZU KATOU ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

发明人： YOSHIKAZU KATOU ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

IPC分类号： G01N21/00 ,  B32B1/00

CPC分类号： G01N21/95607 ,  G01N2021/95676 ,  G03F1/84 ,  Y10T428/13

摘要： A resist inspection apparatus is provided which has a configuration in which a reticle is separated from a pellicle. A reticle cassette is made up of two pieces of plate members. A hollowed portion with a shape allowing the reticle to be inserted into the plate member. Another hollowed portion having a shape being slightly larger than that of the resist of the reticle is formed on the plate member. In the circumference of the hollowed portion is placed a pellicle frame on which a protective film is formed in a stretched manner. In the concave portion is housed in the reticle with a resist on the reticle directed toward the hollowed portion. The reticle is put in sealed space.

摘要翻译： 提供了具有将掩模版与防护薄膜分离的结构的抗蚀剂检查装置。 标线盒由两片板构件构成。 具有允许将标线插入板构件的形状的中空部分。 在板状部件上形成另一个具有略大于标线的抗蚀剂形状的中空部分。 在中空部分的圆周上放置防护薄膜组件框架，其上以拉伸方式形成保护膜。 在凹部中容纳在掩模版上，在掩模版上具有抵抗朝向中空部分的抗蚀剂。 将掩模版放在密封空间中。

公开(公告)号：US20110279816A1

公开(公告)日：2011-11-17

申请号：US13195593

申请日：2011-08-01

申请人： YOSHIKAZU KATOU ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

发明人： YOSHIKAZU KATOU ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

IPC分类号： G01N21/00 ,  B65D85/00

CPC分类号： G01N21/95607 ,  G01N2021/95676 ,  G03F1/84 ,  Y10T428/13

摘要： A resist inspection apparatus is provided which has a configuration in which a reticle is separated from a pellicle. A reticle cassette is made up of two pieces of plate members. A hollowed portion with a shape allowing the reticle to be inserted into the plate member. Another hollowed portion having a shape being slightly larger than that of the resist of the reticle is formed on the plate member. In the circumference of the hollowed portion is placed a pellicle frame on which a protective film is formed in a stretched manner. In the concave portion is housed in the reticle with a resist on the reticle directed toward the hollowed portion. The reticle is put in sealed space.

摘要翻译： 提供了具有将掩模版与防护薄膜分离的结构的抗蚀剂检查装置。 标线盒由两片板构件构成。 具有允许将标线插入板构件的形状的中空部分。 在板状部件上形成另一个具有略大于标线的抗蚀剂形状的中空部分。 在中空部分的圆周上放置防护薄膜组件框架，其上以拉伸方式形成保护膜。 在凹部中容纳在掩模版上，在掩模版上具有抵抗朝向中空部分的抗蚀剂。 将掩模版放在密封空间中。

公开(公告)号：US08009285B2

公开(公告)日：2011-08-30

申请号：US12341208

申请日：2008-12-22

申请人： Yoshikazu Katou ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

发明人： Yoshikazu Katou ,  Takahiro Igeta ,  Hideyuki Moribe ,  Ryuji Hasegawa

IPC分类号： G01N21/00

CPC分类号： G01N21/95607 ,  G01N2021/95676 ,  G03F1/84 ,  Y10T428/13

摘要： A resist inspection apparatus is provided which has a configuration in which a reticle is separated from a pellicle. A reticle cassette is made up of two pieces of plate members. A hollowed portion with a shape allowing the reticle to be inserted into the plate member. Another hollowed portion having a shape being slightly larger than that of the resist of the reticle is formed on the plate member. In the circumference of the hollowed portion is placed a pellicle frame on which a protective film is formed in a stretched manner. In the concave portion is housed in the reticle with a resist on the reticle directed toward the hollowed portion. The reticle is put in sealed space.

摘要翻译： 提供了具有将掩模版与防护薄膜分离的结构的抗蚀剂检查装置。 标线盒由两片板构件构成。 具有允许将标线插入板构件的形状的中空部分。 在板状部件上形成另一个具有略大于标线的抗蚀剂形状的中空部分。 在中空部分的圆周上放置防护薄膜组件框架，其上以拉伸方式形成保护膜。 在凹部中容纳在掩模版上，在掩模版上具有抵抗朝向中空部分的抗蚀剂。 将掩模版放在密封空间中。

公开(公告)号：US07773213B2

公开(公告)日：2010-08-10

申请号：US12426562

申请日：2009-04-20

申请人： Hideyuki Moribe ,  Takeshi Bashomatsu

发明人： Hideyuki Moribe ,  Takeshi Bashomatsu

IPC分类号： G01N21/00 ,  G01N21/88

CPC分类号： G01N21/956 ,  G01N2021/95676

摘要： An inspected object (e.g., a reticle) is stored in an immersion cassette filled with a liquid having a specific refraction factor. An inspection beam is irradiated toward the inspected object, which is subjected to precise positioning, via an objective lens while being refracted by the liquid, thus producing a reflected inspection beam reflected by the inspected object and a transmitted inspection beam transmitted through the inspected object. Image processing is performed based on at least one of the reflected inspection beam and the transmitted inspection beam, thus producing an inspected image of the inspected object. The inspected image is compared with a prescribed circuit pattern so as to inspect the existence and nonexistence of foreign matter or structural defects on the exterior of the inspected object. Thus, it is possible to secure an adequate focal depth of the objective lens while achieving a high resolution in imaging the inspected object.

摘要翻译： 检查对象（例如，掩模版）被存储在填充有具有特定折射系数的液体的浸没盒中。 在被液体折射的同时，通过物镜对经过精确定位的被检查物体照射检查光束，从而产生被被检查物体反射的反射检查光束和透过被检查物体的透射检查光束。 基于反射的检查光束和透射的检查光束中的至少一个进行图像处理，从而产生被检查对象的检查图像。 将被检查的图像与规定的电路图案进行比较，以检查被检查物体的外部存在和不存在异物或结构缺陷。 因此，可以确保物镜的足够的焦深，同时在被检查物体成像时实现高分辨率。

公开(公告)号：US06532248B2

公开(公告)日：2003-03-11

申请号：US09793362

申请日：2001-02-26

申请人： Masaki Tsunekane ,  Shuetsu Kudo ,  Katsuji Mukaihara ,  Hideyuki Moribe ,  Takashi Ooyama

发明人： Masaki Tsunekane ,  Shuetsu Kudo ,  Katsuji Mukaihara ,  Hideyuki Moribe ,  Takashi Ooyama

IPC分类号： H01S3093

CPC分类号： H01S3/0941 ,  H01S3/025 ,  H01S3/0407 ,  H01S3/042 ,  H01S3/061 ,  H01S3/094084

摘要： A diode-laser side-pumped solid-state laser device (SSLD) has a cylindrical laser rod, a cooling tube, and a cylindrical mirror member having an inner mirror surface and a plurality of openings therein for introducing pumping laser. The laser rod receives the pumping laser, absorbs a portion of the pumping laser, and passes and focus the remaining portion of the pumping laser at a focal point disposed on the mirror surface. Substantially all the remaining portion of the pumping laser is reflected to be received and absorbed by the laser rod.

摘要翻译： 二极管激光器侧泵浦固体激光器件（SSLD）具有圆柱形激光棒，冷却管和具有内镜表面和多个开口的圆柱形反射镜部件，用于引入泵浦激光。 激光棒接收泵浦激光器，吸收泵浦激光器的一部分，并将泵浦激光器的剩余部分通过并聚焦在设置在镜面上的焦点处。 基本上所有剩余部分的激光被反射以被激光棒接收和吸收。

公开(公告)号：US07423745B2

公开(公告)日：2008-09-09

申请号：US11230329

申请日：2005-09-20

申请人： Hideyuki Moribe ,  Motonari Tateno

发明人： Hideyuki Moribe ,  Motonari Tateno

IPC分类号： G01N21/00

CPC分类号： G01N21/95692 ,  G01N21/41 ,  G01N2021/4173 ,  G01N2021/95676

摘要： An optical inspection apparatus for inspecting an inspection target surface by irradiating the inspection target surface with light, includes: a condensing and scanning optical system for condensing light from a light source on the inspection target surface in a minute spot shape and scanning the condensed minute-spot-shaped light onto the inspection target surface; and a phase change information detection apparatus for detecting optical phase change information in an area of the inspection target surface irradiated with the minute-spot-shaped light scanned by the condensing and scanning optical system.

摘要翻译： 一种用于通过用光照射检查对象表面来检查检查对象表面的光学检查装置，包括：聚光扫描光学系统，用于将来自光源的光以微小的斑点形状聚集在检查对象表面上， 点状光到检查目标表面; 以及相位改变信息检测装置，用于检测由被聚光扫描光学系统扫描的微小点状光照射的检查对象面的区域中的光学相变信息。

公开(公告)号：US20060066844A1

公开(公告)日：2006-03-30

申请号：US11230329

申请日：2005-09-20

申请人： Hideyuki Moribe ,  Motonari Tateno

发明人： Hideyuki Moribe ,  Motonari Tateno

IPC分类号： G01N21/88

CPC分类号： G01N21/95692 ,  G01N21/41 ,  G01N2021/4173 ,  G01N2021/95676

摘要： An optical inspection apparatus for inspecting an inspection target surface by irradiating the inspection target surface with light, includes: a condensing and scanning optical system for condensing light from a light source on the inspection target surface in a minute spot shape and scanning the condensed minute-spot-shaped light onto the inspection target surface; and a phase change information detection apparatus for detecting optical phase change information in an area of the inspection target surface irradiated with the minute-spot-shaped light scanned by the condensing and scanning optical system.

摘要翻译： 一种用于通过用光照射检查对象表面来检查检查对象表面的光学检查装置，包括：聚光扫描光学系统，用于将来自光源的光以微小的斑点形状聚集在检查对象表面上， 点状光到检查目标表面; 以及相位改变信息检测装置，用于检测由被聚光扫描光学系统扫描的微小点状光照射的检查对象面的区域中的光学相变信息。

公开(公告)号：US06664524B2

公开(公告)日：2003-12-16

申请号：US09789647

申请日：2001-02-21

申请人： Yukio Ogura ,  Hideyuki Moribe ,  Yukio Morishige

发明人： Yukio Ogura ,  Hideyuki Moribe ,  Yukio Morishige

IPC分类号： G02B728

CPC分类号： G02B7/28

摘要： The present focusing method is used in a focus detecting apparatus comprising an objective lens, means for entering a luminous flux for focus detection into a target object from a position inconsistent with an optical axis of the objective lens through at least the objective lens, a condenser lens for converging the luminous flux after it is reflected by the target object and again passes through the objective lens, two two-division sensors disposed with the same optical inclination in front of and behind a position where the reflected luminous flux is converged by the condenser lens when a focus of the objective lens is adjusted to the surface of the target object, and a signal processing circuit for performing operational processing of signals from the two two-division sensors. The focus detecting apparatus detects whether the focus of the objective lens is adjusted to the surface of the target object. When focusing is performed with this apparatus, the target object is moved while the focus position is followed after the detection of the focus position, focus detection is performed many times and the detected signal values are averaged, and the resultant average value is used to drive the objective lens. This series of operations is repeated, and then the focus position is fixed.

摘要翻译： 本聚焦方法用于包括物镜的焦点检测装置，用于通过至少物镜从与物镜的光轴不一致的位置将用于焦点检测的光束进入目标物体的装置，冷凝器 透镜，用于在其被目标物体反射并且再次通过物镜之后会聚光通量，两个二分割传感器在反射光束被冷凝器会聚的位置的前面和后面具有相同的光学倾斜度 当物镜的焦点被调整到目标物体的表面时，以及信号处理电路，用于执行来自两个两分传感器的信号的操作处理。 焦点检测装置检测物镜的焦点是否被调整到目标物体的表面。 当使用该装置进行聚焦时，在检测到聚焦位置之后跟踪对焦位置时移动目标物体，进行焦点检测多次，并且检测到的信号值被平均，并且将所得到的平均值用于驱动 物镜。 这一系列操作重复，然后焦点位置固定。

公开(公告)号：US08614415B2

公开(公告)日：2013-12-24

申请号：US12343829

申请日：2008-12-24

申请人： Hideyuki Moribe ,  Kenichi Matsumura

发明人： Hideyuki Moribe ,  Kenichi Matsumura

IPC分类号： G02F1/01

CPC分类号： G01N21/956 ,  G01N21/8806

摘要： A method for forming an image of an object includes: illuminating sequentially a surface of the object arranged in the same shooting area using each of N (N is natural number equal to or more than two) polarized light beams, each of which has different property; scanning the surface using the each of N polarized light beams; and outputting the each of N polarized light beams reflected by the surface, the each of N polarized light beams passed-through the object or the each of N polarized light beams scattered by the surface, as an image signal.

摘要翻译： 用于形成物体的图像的方法包括：使用每个具有不同性质的N（N是等于或大于2的自然数）的偏振光中的每一个，依次照射布置在同一拍摄区域中的物体的表面 ; 使用N个偏振光束中的每一个扫描该表面; 并且输出由表面反射的N个偏振光束中的每一个，透过物体的N个偏振光束或被表面散射的N个偏振光束中的每一个作为图像信号。