利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

4 条记录 (耗时 0.014 秒)

    Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
    2.
    发明授权
    Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate 有权
    用于动态检测基板破损和移动基板未对准的传感器

    公开(公告)号：US07440091B2

    公开(公告)日：2008-10-21

    申请号：US10973116

    申请日：2004-10-26

    申请人： William A. Bagley ,  Paohuei Lee ,  Kyung-Tae Kim ,  Sam-Kyung Kim ,  Toshio Kiyotake ,  Sam Kim ,  Takayuki Matsumoto ,  Jonathan Erik Larson ,  Makoto Inagawa ,  James Hoffman ,  Billy C. Leung

    发明人： William A. Bagley ,  Paohuei Lee ,  Kyung-Tae Kim ,  Sam-Kyung Kim ,  Toshio Kiyotake ,  Sam Kim ,  Takayuki Matsumoto ,  Jonathan Erik Larson ,  Makoto Inagawa ,  James Hoffman ,  Billy C. Leung

    IPC分类号： G01N21/00

    CPC分类号： H01L21/67265 ,  G01N21/9501

    摘要： An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface. In another embodiment, a method of continuously detecting substrate defects includes positioning at least two sensors to continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors, and transmitting a signal from each of the at least two sensors to a controller that continuously monitors the signals from the at least two sensors to detect the presence of a substrate defect.

    摘要翻译： 一种装置和方法，其结合有至少两个传感器，其沿着移动基板的至少两个平行边缘的长度检测基板缺陷的存在，例如断裂或未对准。 在一个实施例中，用于检测衬底缺陷的装置包括传感器装置，其包括至少两个传感器，当衬底通过传感器时，至少两个传感器连续感测衬底的至少两个平行边缘附近的衬底。 在另一个实施例中，一种用于检测衬底缺陷的装置包括具有衬底支撑表面的机器人，以及包括至少两个传感器的传感器装置，所述传感器装置包括至少两个传感器，所述至少两个传感器在衬底支承表面 。 在另一个实施例中，连续检测衬底缺陷的方法包括：当衬底通过传感器时，定位至少两个传感器以连续地感测衬底的至少两个平行边缘附近的衬底，并且从至少两个传感器 涉及连续地监视来自至少两个传感器的信号以检测衬底缺陷的存在的控制器。

    Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
    4.
    发明申请
    Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate 有权
    用于动态检测基板破损和移动基板未对准的传感器

    公开(公告)号：US20060087647A1

    公开(公告)日：2006-04-27

    申请号：US10973116

    申请日：2004-10-26

    申请人： William Bagley ,  Paohuei Lee ,  Kyung-Tae Kim ,  Sam-Kyung Kim ,  Toshio Kiyotake ,  Sam Kim ,  Takayuki Matsumoto ,  Jonathan Larson ,  Makoto Inagawa ,  James Hoffman ,  Billy Leung

    发明人： William Bagley ,  Paohuei Lee ,  Kyung-Tae Kim ,  Sam-Kyung Kim ,  Toshio Kiyotake ,  Sam Kim ,  Takayuki Matsumoto ,  Jonathan Larson ,  Makoto Inagawa ,  James Hoffman ,  Billy Leung

    IPC分类号： G01N21/88

    CPC分类号： H01L21/67265 ,  G01N21/9501

    摘要： An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface. In another embodiment, a method of continuously detecting substrate defects includes positioning at least two sensors to continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors, and transmitting a signal from each of the at least two sensors to a controller that continuously monitors the signals from the at least two sensors to detect the presence of a substrate defect.

    摘要翻译： 一种装置和方法，其结合有至少两个传感器，其沿着移动基板的至少两个平行边缘的长度检测基板缺陷的存在，例如断裂或未对准。 在一个实施例中，用于检测衬底缺陷的装置包括传感器装置，其包括至少两个传感器，当衬底通过传感器时，至少两个传感器连续感测衬底的至少两个平行边缘附近的衬底。 在另一个实施例中，一种用于检测衬底缺陷的装置包括具有衬底支撑表面的机器人，以及包括至少两个传感器的传感器装置，所述传感器装置包括至少两个传感器，所述至少两个传感器在衬底支承表面 。 在另一个实施例中，连续检测衬底缺陷的方法包括：当衬底通过传感器时，定位至少两个传感器以连续地感测衬底的至少两个平行边缘附近的衬底，并且从至少两个传感器 涉及连续地监视来自至少两个传感器的信号以检测衬底缺陷的存在的控制器。