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    Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
    1.
    发明申请
    Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate 有权
    用于动态检测基板破损和移动基板未对准的传感器

    公开(公告)号：US20060087647A1

    公开(公告)日：2006-04-27

    申请号：US10973116

    申请日：2004-10-26

    申请人： William Bagley ,  Paohuei Lee ,  Kyung-Tae Kim ,  Sam-Kyung Kim ,  Toshio Kiyotake ,  Sam Kim ,  Takayuki Matsumoto ,  Jonathan Larson ,  Makoto Inagawa ,  James Hoffman ,  Billy Leung

    发明人： William Bagley ,  Paohuei Lee ,  Kyung-Tae Kim ,  Sam-Kyung Kim ,  Toshio Kiyotake ,  Sam Kim ,  Takayuki Matsumoto ,  Jonathan Larson ,  Makoto Inagawa ,  James Hoffman ,  Billy Leung

    IPC分类号： G01N21/88

    CPC分类号： H01L21/67265 ,  G01N21/9501

    摘要： An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface. In another embodiment, a method of continuously detecting substrate defects includes positioning at least two sensors to continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors, and transmitting a signal from each of the at least two sensors to a controller that continuously monitors the signals from the at least two sensors to detect the presence of a substrate defect.

    摘要翻译： 一种装置和方法，其结合有至少两个传感器，其沿着移动基板的至少两个平行边缘的长度检测基板缺陷的存在，例如断裂或未对准。 在一个实施例中，用于检测衬底缺陷的装置包括传感器装置，其包括至少两个传感器，当衬底通过传感器时，至少两个传感器连续感测衬底的至少两个平行边缘附近的衬底。 在另一个实施例中，一种用于检测衬底缺陷的装置包括具有衬底支撑表面的机器人，以及包括至少两个传感器的传感器装置，所述传感器装置包括至少两个传感器，所述至少两个传感器在衬底支承表面 。 在另一个实施例中，连续检测衬底缺陷的方法包括：当衬底通过传感器时，定位至少两个传感器以连续地感测衬底的至少两个平行边缘附近的衬底，并且从至少两个传感器 涉及连续地监视来自至少两个传感器的信号以检测衬底缺陷的存在的控制器。

    Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
    4.
    发明授权
    Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate 有权
    用于动态检测基板破损和移动基板未对准的传感器

    公开(公告)号：US07440091B2

    公开(公告)日：2008-10-21

    申请号：US10973116

    申请日：2004-10-26

    申请人： William A. Bagley ,  Paohuei Lee ,  Kyung-Tae Kim ,  Sam-Kyung Kim ,  Toshio Kiyotake ,  Sam Kim ,  Takayuki Matsumoto ,  Jonathan Erik Larson ,  Makoto Inagawa ,  James Hoffman ,  Billy C. Leung

    发明人： William A. Bagley ,  Paohuei Lee ,  Kyung-Tae Kim ,  Sam-Kyung Kim ,  Toshio Kiyotake ,  Sam Kim ,  Takayuki Matsumoto ,  Jonathan Erik Larson ,  Makoto Inagawa ,  James Hoffman ,  Billy C. Leung

    IPC分类号： G01N21/00

    CPC分类号： H01L21/67265 ,  G01N21/9501

    摘要： An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface. In another embodiment, a method of continuously detecting substrate defects includes positioning at least two sensors to continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors, and transmitting a signal from each of the at least two sensors to a controller that continuously monitors the signals from the at least two sensors to detect the presence of a substrate defect.

    摘要翻译： 一种装置和方法，其结合有至少两个传感器，其沿着移动基板的至少两个平行边缘的长度检测基板缺陷的存在，例如断裂或未对准。 在一个实施例中，用于检测衬底缺陷的装置包括传感器装置，其包括至少两个传感器，当衬底通过传感器时，至少两个传感器连续感测衬底的至少两个平行边缘附近的衬底。 在另一个实施例中，一种用于检测衬底缺陷的装置包括具有衬底支撑表面的机器人，以及包括至少两个传感器的传感器装置，所述传感器装置包括至少两个传感器，所述至少两个传感器在衬底支承表面 。 在另一个实施例中，连续检测衬底缺陷的方法包括：当衬底通过传感器时，定位至少两个传感器以连续地感测衬底的至少两个平行边缘附近的衬底，并且从至少两个传感器 涉及连续地监视来自至少两个传感器的信号以检测衬底缺陷的存在的控制器。

    Detecting plasma chamber malfunction
    7.
    发明授权
    Detecting plasma chamber malfunction 有权
    检测等离子体室故障

    公开(公告)号：US08674844B2

    公开(公告)日：2014-03-18

    申请号：US12661699

    申请日：2010-03-19

    申请人： Beom Soo Park ,  Hong Soon Kim ,  Soo Young Choi ,  James Hoffman ,  Suhail Anwar ,  John M. White

    发明人： Beom Soo Park ,  Hong Soon Kim ,  Soo Young Choi ,  James Hoffman ,  Suhail Anwar ,  John M. White

    IPC分类号： G08B21/00

    CPC分类号： H01J37/32183 ,  H01J37/32935 ,  H01J37/3299

    摘要： Malfunction of a component within an RF-powered plasma chamber is detected by observing an operating condition of the plasma chamber and detecting when the operating condition deviates from a previously observed range bounded by lower and upper limits. The lower and upper limits are determined by observing the minimum and maximum values of that operating condition during the processing of workpieces throughout one or more plasma chamber cleaning cycles immediately preceding the most recent cleaning of the plasma chamber.

    摘要翻译： 通过观察等离子体室的操作状态并检测何时操作条件偏离由下限和上限限定的先前观察范围，来检测RF供电的等离子体室内部件的故障。 通过在紧邻等离子体室的最近清洁之前的一个或多个等离子体室清洁循环期间观察工件处理期间该操作条件的最小值和最大值来确定下限和上限。

    Flexible process condition monitoring
    8.
    发明授权
    Flexible process condition monitoring 失效
    灵活的过程状态监控

    公开(公告)号：US08670857B2

    公开(公告)日：2014-03-11

    申请号：US13019838

    申请日：2011-02-02

    申请人： Hong Soon Kim ,  James Hoffman ,  Beom Soo Park

    发明人： Hong Soon Kim ,  James Hoffman ,  Beom Soo Park

    IPC分类号： G06F19/00

    CPC分类号： G06F19/00

    摘要： The present invention generally relates to a method for flexible process condition monitoring. In a process that utilizes RF power, the RF power may be applied at different levels during different points in the process. Software may be programmed to facilitate the monitoring of the different points in the process so that the acceptable deviation range of the RF power for each point in the process may be set to different values. For example, one phase of the process may permit a greater range of RF power deviation while a second phase may be much more particular and permit very little deviation. By programming software to permit each phase of the process to be uniquely monitored, a more precise RF process may be obtained.

    摘要翻译： 本发明一般涉及一种用于灵活处理状态监测的方法。 在利用RF功率的过程中，RF功率可以在该过程的不同点处以不同的电平施加。 可以对软件进行编程以促进对该过程中的不同点的监视，使得该过程中每个点的RF功率的可接受的偏差范围可以被设置为不同的值。 例如，该过程的一个阶段可以允许较大范围的RF功率偏差，而第二阶段可能更加特别，并允许非常小的偏差。 通过编程软件来允许对过程的每个阶段进行唯一的监控，可以获得更精确的RF过程。

    Aspheric toric intraocular lens
    9.
    发明授权
    Aspheric toric intraocular lens 有权
    非球面复曲面眼内晶状体

    公开(公告)号：US08167940B2

    公开(公告)日：2012-05-01

    申请号：US12435241

    申请日：2009-05-04

    申请人： Xin Hong ,  James Hoffman ,  Jihong Xie ,  Michael Hamlin

    发明人： Xin Hong ,  James Hoffman ,  Jihong Xie ,  Michael Hamlin

    IPC分类号： A61F2/16

    CPC分类号： A61F2/1645 ,  A61F2/164 ,  A61F2250/0053

    摘要： An aspheric toric intraocular lens (IOL) having toricity and asphericity in a single lens. The toricity and asphericity may be provided on separate surfaces, such as an anterior surface and a posterior surface, or the toricity and asphericity may be combined onto a single surface. The edge thickness may be varied sinusoidal to maintain equal edge thickness at 45 degree meridian.

    摘要翻译： 在单个透镜中具有复曲面和非球面性的非球面复曲面眼内透镜（IOL）。 可以在单独的表面（例如前表面和后表面）上提供复曲面和非球面性，或者可以将单面和非球面度组合到单个表面上。 边缘厚度可以正弦变化，以在45度子午线处保持相等的边缘厚度。

    Solar Energy Collection System
    10.
    发明申请
    Solar Energy Collection System 有权
    太阳能收集系统

    公开(公告)号：US20110240094A1

    公开(公告)日：2011-10-06

    申请号：US12996317

    申请日：2009-06-08

    申请人： James Hoffman

    发明人： James Hoffman

    IPC分类号： H01L31/052 ,  F24J2/10 ,  F24J2/04

    CPC分类号： F24S50/20 ,  E06B9/24 ,  E06B9/264 ,  E06B9/30 ,  E06B9/322 ,  E06B2009/2417 ,  E06B2009/2476 ,  F24S23/71 ,  F24S23/74 ,  F24S23/80 ,  F24S30/425 ,  F24S2020/10 ,  F24S2020/183 ,  F24S2023/874 ,  F24S2023/876 ,  F24S2030/134 ,  F24S2030/136 ,  G02B5/10 ,  H01L31/0525 ,  H01L31/0547 ,  Y02E10/42 ,  Y02E10/45 ,  Y02E10/47 ,  Y02E10/52

    摘要： A method of concentrating directional radiant energy using reflective optics and receivers that convert that energy wherein the receivers are situated in the body of the reflector on risers parallel to the direction of radiant energy, each said riser bounded by at least one parabolic mirror lying closer and another lying farther from the energy source, where the focus or foci of said mirrors lie substantially in the direction faced by the receiver situated in said riser. The reflector geometries include ones in which the mirrors are parabolic cylinder sections and require only one-axis tracking to focus, and ones in which the mirrors are paraboloid sections and require two-axis tracking to focus sunlight.

    摘要翻译： 使用反射光学器件和接收器来集中定向辐射能的方法，所述反射光学器件和接收器转换所述能量，其中所述接收器位于与所述辐射能方向平行的立管上的所述反射器的主体中，每个所述立管由至少一个抛物面镜靠近并且 另一个位于远离能量源的位置，其中所述反射镜的焦点或焦点基本上位于位于所述提升管中的接收器所面向的方向上。 反射镜的几何形状包括反射镜是抛物面圆筒部分，仅需要一轴跟踪进行聚焦，反射镜的几何形状就是反射镜是抛物面，需要双轴跟踪来聚焦阳光。