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    Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
    1.
    发明申请
    Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate 有权
    用于动态检测基板破损和移动基板未对准的传感器

    公开(公告)号：US20060087647A1

    公开(公告)日：2006-04-27

    申请号：US10973116

    申请日：2004-10-26

    申请人： William Bagley ,  Paohuei Lee ,  Kyung-Tae Kim ,  Sam-Kyung Kim ,  Toshio Kiyotake ,  Sam Kim ,  Takayuki Matsumoto ,  Jonathan Larson ,  Makoto Inagawa ,  James Hoffman ,  Billy Leung

    发明人： William Bagley ,  Paohuei Lee ,  Kyung-Tae Kim ,  Sam-Kyung Kim ,  Toshio Kiyotake ,  Sam Kim ,  Takayuki Matsumoto ,  Jonathan Larson ,  Makoto Inagawa ,  James Hoffman ,  Billy Leung

    IPC分类号： G01N21/88

    CPC分类号： H01L21/67265 ,  G01N21/9501

    摘要： An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface. In another embodiment, a method of continuously detecting substrate defects includes positioning at least two sensors to continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors, and transmitting a signal from each of the at least two sensors to a controller that continuously monitors the signals from the at least two sensors to detect the presence of a substrate defect.

    摘要翻译： 一种装置和方法，其结合有至少两个传感器，其沿着移动基板的至少两个平行边缘的长度检测基板缺陷的存在，例如断裂或未对准。 在一个实施例中，用于检测衬底缺陷的装置包括传感器装置，其包括至少两个传感器，当衬底通过传感器时，至少两个传感器连续感测衬底的至少两个平行边缘附近的衬底。 在另一个实施例中，一种用于检测衬底缺陷的装置包括具有衬底支撑表面的机器人，以及包括至少两个传感器的传感器装置，所述传感器装置包括至少两个传感器，所述至少两个传感器在衬底支承表面 。 在另一个实施例中，连续检测衬底缺陷的方法包括：当衬底通过传感器时，定位至少两个传感器以连续地感测衬底的至少两个平行边缘附近的衬底，并且从至少两个传感器 涉及连续地监视来自至少两个传感器的信号以检测衬底缺陷的存在的控制器。

    Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
    4.
    发明授权
    Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate 有权
    用于动态检测基板破损和移动基板未对准的传感器

    公开(公告)号：US07440091B2

    公开(公告)日：2008-10-21

    申请号：US10973116

    申请日：2004-10-26

    申请人： William A. Bagley ,  Paohuei Lee ,  Kyung-Tae Kim ,  Sam-Kyung Kim ,  Toshio Kiyotake ,  Sam Kim ,  Takayuki Matsumoto ,  Jonathan Erik Larson ,  Makoto Inagawa ,  James Hoffman ,  Billy C. Leung

    发明人： William A. Bagley ,  Paohuei Lee ,  Kyung-Tae Kim ,  Sam-Kyung Kim ,  Toshio Kiyotake ,  Sam Kim ,  Takayuki Matsumoto ,  Jonathan Erik Larson ,  Makoto Inagawa ,  James Hoffman ,  Billy C. Leung

    IPC分类号： G01N21/00

    CPC分类号： H01L21/67265 ,  G01N21/9501

    摘要： An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface. In another embodiment, a method of continuously detecting substrate defects includes positioning at least two sensors to continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors, and transmitting a signal from each of the at least two sensors to a controller that continuously monitors the signals from the at least two sensors to detect the presence of a substrate defect.

    摘要翻译： 一种装置和方法，其结合有至少两个传感器，其沿着移动基板的至少两个平行边缘的长度检测基板缺陷的存在，例如断裂或未对准。 在一个实施例中，用于检测衬底缺陷的装置包括传感器装置，其包括至少两个传感器，当衬底通过传感器时，至少两个传感器连续感测衬底的至少两个平行边缘附近的衬底。 在另一个实施例中，一种用于检测衬底缺陷的装置包括具有衬底支撑表面的机器人，以及包括至少两个传感器的传感器装置，所述传感器装置包括至少两个传感器，所述至少两个传感器在衬底支承表面 。 在另一个实施例中，连续检测衬底缺陷的方法包括：当衬底通过传感器时，定位至少两个传感器以连续地感测衬底的至少两个平行边缘附近的衬底，并且从至少两个传感器 涉及连续地监视来自至少两个传感器的信号以检测衬底缺陷的存在的控制器。

    Vacuum system of semiconductor device manufacturing equipment
    5.
    发明申请
    Vacuum system of semiconductor device manufacturing equipment 审中-公开
    半导体器件制造设备的真空系统

    公开(公告)号：US20070193573A1

    公开(公告)日：2007-08-23

    申请号：US11542108

    申请日：2006-10-04

    申请人： Kyung-Tae Kim ,  Chul-Hwan Choi ,  Kyung-Tae Kim ,  Jun-Woo Choi

    发明人： Kyung-Tae Kim ,  Chul-Hwan Choi ,  Kyung-Tae Kim ,  Jun-Woo Choi

    IPC分类号： F24J1/00 ,  F24J3/00

    CPC分类号： C23C16/4412 ,  C23C14/564 ,  F16K1/22 ,  H01L21/67017

    摘要： Semiconductor device manufacturing equipment has a vacuum system that enhances the fluency of the gas being discharged from a chamber of the equipment. The vacuum system has a vent line, and a throttle valve that includes a vent line opening and closing member oriented so that it is readily opened by a concentrated flow of gas in the vent line. The vacuum system may include a heating unit that heats the vent line through which the gas passes. Still further, a bend in the vent line upstream of the vent line opening and closing member may have a gently curved shape and/or may subtend an angle of less than 90°. As a result, the efficiency of the ventilation of the process chamber is improved, making it easier to control the pressure of the process chamber and minimizing the contamination of the throttle valve and the vent line.

    摘要翻译： 半导体器件制造设备具有提高从设备的室排出的气体的流畅性的真空系统。 真空系统具有排气管线和节流阀，该节流阀包括排气管路开闭部件，其定向成容易通过排气管线中的浓缩的气流打开。 真空系统可以包括加热单元，加热气体通过的排放管线。 此外，通气线打开和关闭部件上游的通气线的弯曲部可以具有轻微弯曲的形状和/或可以对着小于90°的角度。 结果，提高了处理室的通风效率，使得更容易控制处理室的压力并最小化节流阀和排气管线的污染。

    BALL SUPPORTED SHADOW FRAME
    10.
    发明申请
    BALL SUPPORTED SHADOW FRAME 审中-公开
    球支撑阴影框架

    公开(公告)号：US20100122655A1

    公开(公告)日：2010-05-20

    申请号：US12614479

    申请日：2009-11-09

    申请人： Robin L. Tiner ,  John M. White ,  Kyung-Tae Kim

    发明人： Robin L. Tiner ,  John M. White ,  Kyung-Tae Kim

    IPC分类号： B05C11/00 ,  B23P11/00

    CPC分类号： C23C16/4585 ,  C23C16/042 ,  Y10T29/49895

    摘要： Embodiments disclosed herein generally include an alignment assembly for aligning a shadow frame on a susceptor. For producing large area flat panel displays or solar panels, the shadow frame that protects the areas of the susceptor not covered by the substrate from deposition may be so large that the shadow frame bends and doesn't properly align. By utilizing an alignment assembly having one or more ball bearings, the shadow frame may roll on the susceptor to a proper alignment position. Thus, the shadow frame may be prevented from bending and also align on the susceptor.

    摘要翻译： 本文公开的实施例通常包括用于对准基座上的阴影框架的对准组件。 为了制造大面积平板显示器或太阳能电池板，保护未被基板覆盖的基座的区域沉积的阴影框架可能太大，使得阴影框架弯曲并且不能正确对准。 通过利用具有一个或多个球轴承的对准组件，阴影框架可以在基座上滚动到适当的对准位置。 因此，可以防止阴影框架弯曲并且在基座上对准。