公开(公告)号：US08953855B2

公开(公告)日：2015-02-10

申请号：US12393321

申请日：2009-02-26

申请人： Hitoshi Namai ,  Osamu Komuro ,  Satoru Yamaguchi ,  Fumihiro Sasajima

发明人： Hitoshi Namai ,  Osamu Komuro ,  Satoru Yamaguchi ,  Fumihiro Sasajima

IPC分类号： G06K9/00 ,  G06K9/46 ,  G06T7/00

CPC分类号： G06K9/4609 ,  G06T7/13

摘要： An object of the present invention is to provide an edge detection technique and equipment which are capable of stably detecting an edge by suppressing the influence of noise even in the case where the image is obtained by charged particle radiation equipment, such as a scanning electron microscope and has a low S/N ratio. More specifically, the present invention is to propose a technique and equipment which are configured to determine a peak position (edge) on the basis of the following two edge extraction techniques. That is, the present invention is to propose a technique and equipment wherein at least two peaks are formed by using, as edge detection techniques, for example, one peak detection technique having a relatively high sensitivity and the other peak detection technique which is relatively less susceptible to the influence of noise than the one peak detection technique, and wherein a position where the peaks coincide with each other is determined as a true peak position (edge position).

摘要翻译： 本发明的目的是提供一种能够通过抑制噪声的影响来稳定地检测边缘的边缘检测技术和设备，即使在通过诸如扫描电子显微镜的带电粒子辐射设备获得图像的情况下 并具有较低的S / N比。 更具体地，本发明是提出一种被配置为基于以下两个边缘提取技术来确定峰值位置（边缘）的技术和设备。 也就是说，本发明提出一种技术和设备，其中通过使用作为边缘检测技术的至少两个峰形成例如具有相对较高灵敏度的一个峰值检测技术和相对较少的另一个峰值检测技术 容易受到噪声的影响而不是一个峰值检测技术，并且其中峰值彼此重合的位置被确定为真正的峰值位置（边缘位置）。

公开(公告)号：US20120037801A1

公开(公告)日：2012-02-16

申请号：US13263826

申请日：2010-04-07

申请人： Yuzuru Mochizuki ,  Maki Tanaka ,  Miki Isawa ,  Satoru Yamaguchi

发明人： Yuzuru Mochizuki ,  Maki Tanaka ,  Miki Isawa ,  Satoru Yamaguchi

IPC分类号： G01N23/00

CPC分类号： G01B15/04 ,  G01B15/00 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： Provided are a pattern measuring apparatus and a computer program which determine whether a gap formed in a sample (201) is a core gap (211) or a spacer gap (212). The secondary electron profile of the sample (201) is acquired, the feature quantities of the secondary electron profile at the positions of edges (303, 305) are detected, and based on the detected feature quantities, whether each gap adjacent to each of the edges (303, 305) is the core gap (211) or the spacer gap (212) is determined. Furthermore, the waveform profile of the spacer (207) is previously stored, the secondary electron profile of the sample (201) is acquired, a matching degree of the secondary electron profile and the stored waveform profile at the position of each spacer (207) is detected, and based on the detected matching degree, whether the each gap adjacent to each spacer (207) is the core gap (211) or the spacer gap (212) is determined.

摘要翻译： 提供了一种图案测量装置和计算机程序，其确定样品（201）中形成的间隙是否为芯间隙（211）或间隔物间隙（212）。 获取样品（201）的二次电子分布，检测边缘（303,305）位置处的二次电子分布的特征量，并且基于检测到的特征量，确定与每个 边缘（303,305）是芯间隙（211）或确定间隔物间隙（212）。 此外，预先存储间隔物（207）的波形图，获取样品（201）的二次电子分布，二次电子分布的匹配度和在每个间隔物（207）的位置处存储的波形分布， 并且基于检测到的匹配度，确定与每个间隔物（207）相邻的每个间隙是否为芯间隙（211）或间隔物间隙（212）。

公开(公告)号：US07941008B2

公开(公告)日：2011-05-10

申请号：US11104632

申请日：2005-04-13

申请人： Norio Satou ,  Akiyuki Sugiyama ,  Osamu Komuro ,  Satoru Yamaguchi

发明人： Norio Satou ,  Akiyuki Sugiyama ,  Osamu Komuro ,  Satoru Yamaguchi

IPC分类号： G06K9/54

CPC分类号： G06T7/001

摘要： According to the pattern search method of the present invention, detection of a detection image region relative to an observation image is performed by a pattern matching. An image whose size is substantially the same as that of the observation image is used as the detection image region. The detection image region is relatively displaced with reference to the observation image, thereby detecting a degree of similarity for a common region which is common to both of the region and the image. Displacement range of the detection image region is set in advance. If area of the common region is larger than a predetermined value, calculating the degree of similarity will be performed.

摘要翻译： 根据本发明的图案搜索方法，通过图案匹配来执行相对于观察图像的检测图像区域的检测。 使用与观察图像基本相同的图像作为检测图像区域。 检测图像区域相对于观察图像相对移位，从而检测对于区域和图像两者共同的公共区域的相似度。 预先设定检测图像区域的位移范围。 如果公共区域的面积大于预定值，则将执行相似度的计算。

公开(公告)号：US07826735B2

公开(公告)日：2010-11-02

申请号：US11677183

申请日：2007-02-21

申请人： Satoru Yamaguchi

发明人： Satoru Yamaguchi

IPC分类号： G03B3/10

CPC分类号： G03B13/36

摘要： An auto focus unit, comprising a pursuit block, a lens driver, a detection block, and a controller, is provided. The pursuit block pursues the movements of an optical image of the target-object. The auto focus unit brings an optical image of the target-object into focus on a light-receiving surface. The target-object is desired to be brought into focus. The lens driver causes a focus lens to move so that an optical image of a scanning-area is brought into focus. The detection block detects the light intensity of an area including the scanning area. The controller causes the pursuit block to suspend a pursuit of the target-object when the light intensity detected by the detection block is lower than a predetermined threshold value.

摘要翻译： 提供了包括追踪块，镜头驱动器，检测块和控制器的自动对焦单元。 追求块追求目标对象的光学图像的运动。 自动对焦单元将目标物体的光学图像聚焦在光接收表面上。 目标对象希望被聚焦。 透镜驱动器使聚焦透镜移动，使得扫描区域的光学图像被聚焦。 检测块检测包括扫描区域的区域的光强度。 当由检测块检测到的光强度低于预定阈值时，控制器使追踪块暂停对目标对象的追踪。

公开(公告)号：US20080073526A1

公开(公告)日：2008-03-27

申请号：US11699065

申请日：2007-01-29

申请人： Atsushi Takane ,  Mitsuji Ikeda ,  Satoru Yamaguchi ,  Yasuhiko Ozawa

发明人： Atsushi Takane ,  Mitsuji Ikeda ,  Satoru Yamaguchi ,  Yasuhiko Ozawa

IPC分类号： G01N23/00

CPC分类号： G01N23/225 ,  H01J2237/21 ,  H01J2237/2817

摘要： A charged particle beam apparatus for obtaining information of an uneven surface or a depression/protrusion of a sample by irradiating a charged particle beam to a sample having an uneven surface or a depression/protrusion at a plurality of focal positions, measuring signal emitted from the sample, and comparing profile waveforms corresponding to edge portions of the uneven surface.

摘要翻译： 一种带电粒子束装置，用于通过向多个焦点位置处具有不平坦表面或凹陷/突起的样品照射带电粒子束来获得样品的不平坦表面或凹陷/突起的信息，测量从 样本和比较与不平坦表面的边缘部分相对应的轮廓波形。

公开(公告)号：US07166840B2

公开(公告)日：2007-01-23

申请号：US11056191

申请日：2005-02-14

申请人： Atsushi Takane ,  Satoru Yamaguchi ,  Osamu Komuro ,  Yasuhiko Ozawa ,  Hideo Todokoro

发明人： Atsushi Takane ,  Satoru Yamaguchi ,  Osamu Komuro ,  Yasuhiko Ozawa ,  Hideo Todokoro

IPC分类号： G01N23/00

CPC分类号： H01J37/28 ,  H01J2237/2815

摘要： A method for determining a depression/protrusion, especially of a line and space pattern formed on a sample, and an apparatus therefor. A charged particle beam is scanned with its direction being inclined to the original optical axis of the charged particle beam or a sample stage is inclined, broadening of a detected signal in a line scanning direction of the charged particle beam is measured, the broadening is compared with that when the charged particle beam is scanned with its direction being parallel to the original optical axis of the charged particle beam, and a depression/protrusion of the scanned portion is determined on the basis of increase/decrease of the broadening.

摘要翻译： 用于确定凹陷/突起的方法，特别是用于形成在样本上的线和空间图案及其装置。 扫描带电粒子束的方向与带电粒子束的原始光轴倾斜，或者样品台倾斜，测量带电粒子束的扫描方向上的检测信号的变宽，比较加宽 其中当带电粒子束的扫描方向平行于带电粒子束的原始光轴时，并且基于增宽的增加/减小来确定扫描部分的凹陷/突起。

公开(公告)号：US07164126B2

公开(公告)日：2007-01-16

申请号：US10359236

申请日：2003-02-06

申请人： Mitsugu Sato ,  Atsushi Takane ,  Takashi Iizumi ,  Tadashi Otaka ,  Hideo Todokoro ,  Satoru Yamaguchi ,  Kazutaka Nimura

发明人： Mitsugu Sato ,  Atsushi Takane ,  Takashi Iizumi ,  Tadashi Otaka ,  Hideo Todokoro ,  Satoru Yamaguchi ,  Kazutaka Nimura

IPC分类号： G01N23/00 ,  G01N23/225

CPC分类号： H01J37/28 ,  G01N23/22 ,  H01J37/222

摘要： An object of the present invention is to provide a sample image forming method and a charged particle beam apparatus which are suitable for realizing suppressing of the view area displacement with high accuracy while the influence of charging due to irradiation of the charged particle beam is being suppressed.In order to attain the above object, the present invention provide a method of forming a sample image by scanning a charged particle beam on a sample and forming an image based on secondary signals emitted from the sample, the method comprising the steps of forming a plurality of composite images by superposing a plurality of images obtained by a plurality of scanning times; and forming a further composite image by correcting positional displacements among the plurality of composite images and superposing the plurality of composite images, and a charged particle beam apparatus for realizing the above method.

公开(公告)号：US07101165B2

公开(公告)日：2006-09-05

申请号：US10669507

申请日：2003-09-25

申请人： Satoru Yamaguchi ,  Yasunao Miura ,  Hiromi Katou

发明人： Satoru Yamaguchi ,  Yasunao Miura ,  Hiromi Katou

IPC分类号： B28B17/02

CPC分类号： C04B35/62218 ,  B28B3/206 ,  B28B3/222 ,  B28B3/269 ,  B29C47/0028 ,  B29C47/12 ,  B29C47/50 ,  B29C47/60 ,  B29C47/6043 ,  B29C47/6075 ,  B29C47/686 ,  B29L2031/60 ,  C04B2235/6021 ,  C04B2235/94 ,  C04B2235/95

摘要： An extrusion molding apparatus comprises a shaping die for producing a ceramic molded product, and a screw extruder having built therein an extruding screw (40) for mixing while leading a ceramic material forward. The extruding screw (40) includes a pressing screw portion (410) having a first lead (411) and a dispersing screw portion (420) having a second lead (421) adjacent to a forward end (412) of the pressing screw portion (410). The second lead (421) is formed in such a manner that the rear ends of all the second lead surfaces (426) at the rear end (422) of the dispersing screw portion (420) and the forward end of the first lead surface (416) at the forward end (412) of the pressing screw portion (410) are displaced from each other.

摘要翻译： 挤出成形装置包括用于制造陶瓷成型体的成型模具和内置有用于混合的挤出螺杆（40）的螺杆挤出机，同时向前引导陶瓷材料。 挤压螺杆（40）包括具有第一引线（411）的挤压螺纹部分（410）和与挤压螺纹部分的前端（412）相邻的第二引线（421）的分散螺旋部分（420） 410）。 第二引线（421）形成为使得分散螺钉部分（420）的后端（422）处的所有第二引导表面（426）的后端和第一引线表面的前端 （410）的前端（412）的位置彼此偏移。

公开(公告)号：US20060012073A1

公开(公告)日：2006-01-19

申请号：US11181025

申请日：2005-07-14

申请人： Yasunao Miura ,  Toshio Harada ,  Satoru Yamaguchi

发明人： Yasunao Miura ,  Toshio Harada ,  Satoru Yamaguchi

IPC分类号： B29C47/00 ,  B29C47/12 ,  B29C47/38

CPC分类号： B28B13/04 ,  B28B3/20 ,  B29C31/002 ,  B29C48/0022 ,  B29C48/11 ,  B29C48/355 ,  B29C2793/0027

摘要： An extrusion molding apparatus and an extrusion molding method is provided that permits deformation of molded body to be prevented and a sound extrusion molded body to be obtained even in the case where a soft extrusion molded body having low rigidity in a direction perpendicular to extrusion direction is molded. An extrusion molding apparatus 1 comprises a screw extruder 12 that kneads a molding raw material 80 and extrudes an extrusion molded body 8 from a molding die 11, and a conveying apparatus 3 that supports said extrusion molded body 8 extruded continuously from the screw extruder 12 and conveys same in the extrusion direction. The screw extruder 12 has an inclination angle θ between the extrusion axis A and horizontal axis H in the range of 15° to 85°. The conveying apparatus 3 is constructed so as to move a reception stage 32 that supports said extrusion molded body 8 extruded along said extrusion axis A on the outer circumferential surface thereof, generally in parallel to said extrusion axis A. The inclination angle θ is preferably in the range of 30° to 75°.

摘要翻译： 即使在与挤出方向垂直的方向上具有低刚性的软质挤出成型体的情况下，也能够得到能够防止成型体变形的挤出成型装置和挤出成型方法， 模制。 挤压成型装置1包括：螺杆挤出机12，其将成型原料80揉合并从成型模具11挤出挤出成型体8;以及输送装置3，其支撑从螺杆挤出机12连续挤出的挤出成型体8， 在挤出方向传送相同。 螺杆挤出机12在挤出轴线A和水平轴线H之间具有在15°至85°的范围内的倾斜角度θ。 传送装置3被构造成使大致平行于所述挤出轴线A的沿着所述挤出轴线A挤压的所述挤出成型体8的接收台32移动到其外周面上。倾斜角θ优选为 范围为30°至75°。

公开(公告)号：US06932932B2

公开(公告)日：2005-08-23

申请号：US10045085

申请日：2002-01-15

申请人： Yasunao Miura ,  Satoru Yamaguchi ,  Hiromi Katou

发明人： Yasunao Miura ,  Satoru Yamaguchi ,  Hiromi Katou

IPC分类号： H05B6/78 ,  H05B6/64

CPC分类号： H05B6/804 ,  B28B11/241 ,  B28B11/243 ,  B28B11/247 ,  H05B6/78 ,  H05B2206/046

摘要： Method of fabricating at least a honeycomb body include drying a plurality of honeycomb bodies, each having a multiplicity of cells arranged in the shape of a honeycomb and having a wall thickness of 0.125 mm or less, without cracking or wrinkling in the outer peripheral skin portion of the mold. Extrusion-molded argillaceous honeycomb bodies may be dried by placement on porous ceramics trays, having a dielectric loss of 0.1 or less, a porosity of 10% or more and a sectional open area ratio of 50% or more, exposure to at least 70% humidity and simultaneous irradiation with microwaves of 1,000 to 10,000 MHz. Alternatively, extrusion-molded argillaceous honeycomb bodies may be dried by exposure to at least 70% humidity and simultaneous irradiation with microwaves of 1,000 to 10,000 MHz, after which hot air is passed through the cells of the honeycomb bodies.

摘要翻译： 至少制造蜂窝体的方法包括干燥多个蜂窝体，每个蜂窝体具有排列成蜂窝形状的多个孔，壁厚为0.125mm以下，不会在外周皮肤部分发生龟裂或起皱 的模具。 挤出成型的泥质蜂窝体可以通过放置在多孔陶瓷盘上，其介电损耗为0.1以下，孔隙率为10％以上，截面开口率为50％以上，暴露于至少70％ 湿度和同步照射的微波1000至10,000 MHz。 或者，挤出成型的泥质蜂窝体可以通过暴露于至少70％的湿度并且同时照射1,000至10,000MHz的微波来干燥，之后热空气通过蜂窝体的孔。