THERMAL PROCESSING APPARATUS USING MICROWAVE AND OPERATION METHOD THEREOF

    公开(公告)号:US20240107639A1

    公开(公告)日:2024-03-28

    申请号:US18203669

    申请日:2023-05-31

    申请人: SEMES CO., LTD.

    IPC分类号: H05B6/80 H05B6/64 H05B6/78

    摘要: An embodiment of the present disclosure provides a thermal processing apparatus and an operation method thereof capable of controlling a heat distribution of a substrate at a low cost in a thermal processing process using a microwave. According to the present disclosure, a thermal processing apparatus includes a chamber that forms a thermal processing space of a substrate, a substrate support unit that is located at a lower portion of the thermal processing space and supports the substrate, and a microwave unit that is located at an upper portion of the thermal processing space and forms an electromagnetic field by the microwave in the thermal processing space. The substrate support unit includes a chuck fixed at the lower portion of the thermal processing space, a lifting drive mechanism configured to support the substrate with raising and lowering the substrate with respect to the chuck, and a controller that controls the lifting drive mechanism to adjust a height of the substrate based on a temperature distribution for each area of the substrate.

    MICROWAVE HEATING APPARATUS AND METHOD
    9.
    发明申请

    公开(公告)号:US20180049280A1

    公开(公告)日:2018-02-15

    申请号:US15235257

    申请日:2016-08-12

    申请人: NOVATION IQ LLC

    发明人: MICHEL MARC

    摘要: An apparatus and method for heating a material are disclosed. The apparatus includes one or more magnetron assemblies positioned on each of opposing sides of a heating region. The magnetron assemblies positioned on one side of the heating region generate overlapping microwaves that propagate in a first direction through the material, and the magnetron assemblies positioned on the other side of the heating region generate overlapping microwaves that propagate in a second direction through the material. The overlapping microwaves provide a total wave voltage that is substantially constant across the material resulting in substantially even heating of the material.