Stack-gas measuring apparatus and stack-gas measuring method
    1.
    发明授权
    Stack-gas measuring apparatus and stack-gas measuring method 有权
    堆垛气体测量装置和堆垛气测量方法

    公开(公告)号:US08276469B2

    公开(公告)日:2012-10-02

    申请号:US12550205

    申请日:2009-08-28

    IPC分类号: G01N1/22

    CPC分类号: G01N1/2258

    摘要: A stack-gas measuring apparatus includes a sample introducing unit (sampling unit and heating conduit pipe) for introducing stack-gas, a cooling unit (containing wet filter) in which dust components in the stack-gas are agglomerated, a filter column containing a filter element made of a polymer material for collecting the dust components, a mist scrubber which is disposed downstream of the filter column and which contains an adsorbent for removing acid mist in the stack-gas, and an analyzer in which the cleaning-processed gas is introduced to measure a particular component in the stack-gas.

    摘要翻译: 堆叠气体测量装置包括用于引入堆叠气体的样品引入单元(取样单元和加热导管),堆叠气体中的灰尘成分凝聚的冷却单元(含有湿过滤器),含有 由用于收集灰尘成分的聚合物材料制成的过滤元件,设置在过滤塔下游并含有用于除去烟道气中的酸雾的吸附剂的雾洗涤器,以及其中清洗处理气体为 引入以测量堆叠气体中的特定组分。

    Method of measuring gas component concentrations of special material
gases for semiconductor, a semiconductor equipment, and an apparatus
for supplying special material gases for semiconductor

    公开(公告)号:US5810928A

    公开(公告)日:1998-09-22

    申请号:US558506

    申请日:1995-11-16

    IPC分类号: C23C16/52 C23C16/00

    CPC分类号: C23C16/52

    摘要: A method of measuring gas component Concentrations of special material gases for semiconductor, and a semiconductor equipment are provided. The method and apparatus can be incorporated in a gas pipe line system in an inline manner, and measure the component and concentration of a gas flowing through a gas pipe line or a gas with which the gas pipe line system is filled, thereby eliminating any erroneous connection. In the method of measuring gas component concentrations of special material gases for semiconductor, as means for attaining the objects, an infrared gas detector is disposed in a gas pipe line between a gas cylinder containing a special material gas for semiconductor and a semiconductor producing section, so that the gas component and concentration are measured in an inline manner. An apparatus for supplying special material gases for semiconductor is also provided. In the apparatus, a monitor for monitoring a gas component, a concentration, a flow rate, and the like is incorporated in a gas pipe line system from a gas cylinder storing room to a semiconductor equipment, so that any accident such-as erroneous connection, erroneous piping, or erroneous exchange is prevented from occurring. As means for attaining the object, a massflow controller is disposed in each of pipe lines connected to a plurality of gas cylinders containing special material gases for semiconductor, and an infrared gas sensor functioning as an inline gas monitor is disposed in a pipe line between a junction point of the pipe lines and the semiconductor equipment. The massflow controllers and the infrared gas detector are connected to a control apparatus for the apparatus for supplying gases for semiconductor, and the respective output signals are checked. The supply of the gases is controlled in accordance with the agreement or disagreement of the signals.

    Gas analyzer and gas-analyzing mechanism
    5.
    发明授权
    Gas analyzer and gas-analyzing mechanism 失效
    气体分析仪和气体分析机构

    公开(公告)号:US5572032A

    公开(公告)日:1996-11-05

    申请号:US342247

    申请日:1994-11-18

    摘要: A gas analyzer capable of simultaneously detecting two or more components in a single-cell mode and a gas-analyzing mechanism suitable for simultaneously detecting two or more components in a cross-flow modulation single-cell mode are provided. A gas analyzer unit includes two measuring cells, light sources provided on one end side of each of the measuring cells, gas filter cells with interferential gaseous components hindering a detection of components to be measured enclosed provided on the other end side of each of the measuring cells, beam splitters included in two gas filter cells, first- and fourth and second- and third detectors provided on the side of transmitting position and the side of reflecting position, respectively, of each of the beam splitters and a sampling device connected with a rotary valve.

    摘要翻译: 提供能够同时检测单电池模式中的两个或更多个组件的气体分析器和适用于以交叉流调制单电池模式同时检测两个或更多个组件的气体分析机构。 气体分析器单元包括两个测量单元,设置在每个测量单元的一端侧的光源,具有干涉气体成分的气体过滤器单元阻止检测每个测量单元的另一端侧封闭的被测元件的检测 包括在两个气体过滤器单元中的单元,分束器,分别设置在每个分束器的透射位置和反射位置侧的第一和第四和第二和第三检测器以及与 旋转阀。

    Electromagnetic induction-type conductivity meter with improved
calibration with auxiliary circuit
    6.
    发明授权
    Electromagnetic induction-type conductivity meter with improved calibration with auxiliary circuit 失效
    电磁感应式电导率仪,具有辅助电路校准

    公开(公告)号:US5341102A

    公开(公告)日:1994-08-23

    申请号:US893756

    申请日:1992-06-05

    CPC分类号: G01N27/023 G01R27/22

    摘要: In an improved electromagnetic induction-type conductivity meter utilizing primary and secondary transformer coils about a liquid sample passageway, a resistance circuit having a conductive lead line extending also through the coils and parallel with the sample passageway is provided. The resistance circuit can be selectively opened and closed, and has the capacity to contribute to the measurement voltage detected on the detector coil when the primary coil is excited. The value of this additional resistance voltage can be used for calibration and monitoring the condition of the conductivity meter.

    摘要翻译: 在采用绕液体样品通道的一次和二次变压器线圈的改进的电磁感应型电导率仪中,提供了一种电阻电路,该电阻电路还具有也延伸穿过线圈并平行于样品通道的导电引线。 电阻电路可以选择性地打开和关闭,并且具有有助于在初级线圈被激励时在检测器线圈上检测到的测量电压的能力。 该附加电阻电压的值可用于校准和监测电导率仪的状态。

    STACK-GAS MEASURING APPARATUS AND STACK-GAS MEASURING METHOD
    7.
    发明申请
    STACK-GAS MEASURING APPARATUS AND STACK-GAS MEASURING METHOD 有权
    堆高气体测量装置和堆高气体测量方法

    公开(公告)号:US20100050790A1

    公开(公告)日:2010-03-04

    申请号:US12550205

    申请日:2009-08-28

    IPC分类号: G01N1/22

    CPC分类号: G01N1/2258

    摘要: A stack-gas measuring apparatus includes a sample introducing unit (sampling unit and heating conduit pipe) for introducing stack-gas, a cooling unit (containing wet filter ) in which dust components in the stack-gas are agglomerated, a filter column containing a filter element made of a polymer material for collecting the dust components, a mist scrubber which is disposed downstream of the filter column and which contains an adsorbent for removing acid mist in the stack-gas, and an analyzer in which the cleaning-processed gas is introduced to measure a particular component in the stack-gas.

    摘要翻译: 堆叠气体测量装置包括用于引入堆叠气体的样品引入单元(取样单元和加热导管),堆叠气体中的灰尘成分凝聚的冷却单元(含有湿过滤器),含有 由用于收集灰尘成分的聚合物材料制成的过滤元件,设置在过滤塔下游并含有用于除去烟道气中的酸雾的吸附剂的雾洗涤器,以及其中清洗处理气体为 引入以测量堆叠气体中的特定组分。

    Gas analyzer
    8.
    发明授权
    Gas analyzer 失效
    气体分析仪

    公开(公告)号:US5773828A

    公开(公告)日:1998-06-30

    申请号:US606071

    申请日:1996-02-23

    IPC分类号: G01N21/35

    CPC分类号: G01N21/3504

    摘要: A gas analyzer has a simple composition and can measure multi-components at a high accuracy. A plurality of measuring cells, including a case where the cells are different in length from each other, communicate sequentially with each other through a communication part to form a single gas path. A cut-on filter as an infrared penetration/reflection means for diffracting spectrally an infrared wavelength is provided on a light source side. A NO.sub.X measuring cell 3 having a cell length of about 60 mm and a CO.sub.2 measuring cell 7 having a cell length of about 1 mm which communicate through the communication part with each other, and a capacitor microphone (an infrared-ray detector for NO.sub.X) and a pyroelectric detector (an infrared-ray detector for CO.sub.2) are provided on the infrared penetration and reflection sides of the optical filter.

    摘要翻译: 气体分析仪具有简单的组成,可以高精度地测量多组分。 多个测量单元,包括单元彼此长度不同的情况,通过连通部相互连通,形成单一的气体通路。 在光源侧设置有作为用于在红外线波长上衍射的红外线穿透/反射装置的截止滤光器。 具有约60mm的单元长度的NO X测量单元3和通过连通部彼此连通的单元长度约1mm的CO 2测量单元7以及电容式麦克风(NOX的红外线检测器) 并且在光学滤波器的红外线透射和反射侧设置热电检测器(用于CO 2的红外线检测器)。

    Detector assembly for an electromagnetic induction-type conductivity
meter
    9.
    发明授权
    Detector assembly for an electromagnetic induction-type conductivity meter 失效
    用于电磁感应型电导率仪的检测器组件

    公开(公告)号:US5252925A

    公开(公告)日:1993-10-12

    申请号:US781712

    申请日:1991-10-22

    CPC分类号: G01N27/023 G01R27/22

    摘要: An improved detector assembly with an electromagnetic induction-type conductivity meter is provided with a pair of housing members forming a first liquid sample flow path at a central location, and a second liquid sample flow path on their outer circumference. An excitation coil and a detection coil extend about the first liquid sample path, while the second liquid sample flow path interconnects with the first liquid sample flow path both upstream and downstream of the respective coils. The second liquid sample flow path can substantially extend about the coils so that a relatively large induction current can be generated and measured as representative of the liquid sample.

    摘要翻译: 具有电磁感应型电导率仪的改进的检测器组件设置有一对在中心位置处形成第一液体样品流动路径的壳体构件,以及在其外周上形成第二液体样品流动路径。 激励线圈和检测线圈围绕第一液体样品路径延伸,而第二液体样品流动路径与各个线圈的上游和下游的第一液体样品流动路径相互连接。 第二液体样品流动路径可以基本上围绕线圈延伸,使得可以产生和测量相对较大的感应电流作为液体样品的代表。

    METHOD AND APPARATUS FOR REMOVING SELENIUM OXIDE IN A SAMPLE, AND METHOD AND APPARATUS FOR MEASURING MERCURY IN COAL COMBUSTION EXHAUST GAS BY USING THE SAME
    10.
    发明申请
    METHOD AND APPARATUS FOR REMOVING SELENIUM OXIDE IN A SAMPLE, AND METHOD AND APPARATUS FOR MEASURING MERCURY IN COAL COMBUSTION EXHAUST GAS BY USING THE SAME 审中-公开
    用于在样品中除去氧化铅的方法和装置,以及用于测量煤燃烧中的汞的方法和装置使用它们的排气

    公开(公告)号:US20080188002A1

    公开(公告)日:2008-08-07

    申请号:US12024839

    申请日:2008-02-01

    IPC分类号: G01N31/12 G01N33/20 B01D3/00

    摘要: There is provided a method and apparatus for removing selenium oxide in a sample as well as a method and apparatus for measuring mercury in coal combustion exhaust gas by using the same. The apparatus for removing selenium oxide in a sample, comprising: (1) a heating introduction path for heating a sample, (2) a primary cooling unit having a flow path through which the heated sample flows countercurrently to cooling water, whereby the heated sample is mixed with, and cooled by, cooling water, (3) a secondary cooling unit having a spiral flow path for cooling the mixed gas and having a space for gas/liquid separation at the end of the spiral flow path, (4) a regenerator for introducing condensed water from the secondary cooling unit, and (5) a condensed water-cooling path for connecting the regenerator to the primary cooling unit.

    摘要翻译: 提供了一种用于除去样品中的氧化硒的方法和装置,以及通过使用该方法和装置测量煤燃烧废气中的汞。 用于除去样品中的氧化硒的装置,包括:(1)用于加热样品的加热引入路径,(2)具有流动路径的主冷却单元,所述加热样品通过该流路与冷却水逆流流动,由此加热样品 (3)二次冷却单元,其具有用于冷却混合气体的螺旋流动路径,并且在螺旋流动路径的端部具有用于气/液分离的空间,(4)a 用于从二次冷却单元引入冷凝水的再生器,以及(5)将再生器连接到一次冷却单元的冷凝水冷路。