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公开(公告)号：US5283414A
公开(公告)日：1994-02-01
申请号：US665697
申请日：1991-03-07
申请人： Siegfried Straemke
发明人： Siegfried Straemke
CPC分类号： H01J37/32522 , B01J19/088 , B01J3/006 , B01J3/046 , C23C8/36 , B01J2219/0894
摘要： The plasma treatment apparatus includes a vacuum-tight first container for receiving the workpieces to be treated, and a pressure-tight second container enclosing the first container. The intermediate space between the two containers can be evacuated by a suction device. If a high-temperature process is performed within the inner container, the intermediate space is evacuated, whereby the inner container is relieved of pressure while the outer container, taking up the pressure, is maintained at a low temperature. With low operating temperatures, a gas is kept in convective flow within the intermediate space so that heat is transmitted from the inner container to the outer container. In this case, pressure is taken up by the inner container.
摘要翻译： 等离子体处理装置包括用于接收待处理工件的真空密封第一容器和封闭第一容器的耐压第二容器。 两个容器之间的中间空间可以通过抽吸装置抽真空。 如果在内部容器内进行高温处理，则中间空间被抽真空，由此内部容器释放压力，同时承受压力的外部容器保持在低温。 在低工作温度下，气体在中间空间内保持对流，使得热量从内容器传递到外容器。 在这种情况下，内部容器承受压力。
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公开(公告)号：US20070298189A1
公开(公告)日：2007-12-27
申请号：US11798789
申请日：2007-05-17
申请人： Siegfried Straemke , Mark Straemke
发明人： Siegfried Straemke , Mark Straemke
IPC分类号： H05H1/24
CPC分类号： H01J37/32449 , C23C8/36 , C23C16/45557 , H01J37/3244
摘要： In a pressure-tight reactor (10) a partial vacuum is generated in which a workpiece (13) is subjected to a plasma treatment. The pressure in a space (14) of said reactor (10) is periodically or aperiodically changed. Thus the surface layer of the workpiece (13) is rendered more uniform.
摘要翻译： 在压力不高的反应器（10）中产生部分真空，其中对工件（13）进行等离子体处理。 所述反应器（10）的空间（14）中的压力周期性地或不定期地改变。 因此，工件（13）的表面层变得更均匀。
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公开(公告)号：US5072693A
公开(公告)日：1991-12-17
申请号：US504331
申请日：1990-04-03
申请人： Siegfried Straemke
发明人： Siegfried Straemke
摘要： When a specific electric potential is to be applied to a component (11) within a vacuum container, it is required to guide a conductor through a wall of the vacuum container (10). To this purpose, an insulating body (14) must be mounted in the wall (10). If physical or chemical processes within the container lead to separation of conductive material, there is the danger that the insulating body (14) will be coated within the container and that the resulting conductive coating forms a bridge between the conductor (13) and the container 10). For preventing deposit of material on the insulating body (14), a gas flow is generated for sweeping along the wall portions of the insulating body (14).
摘要翻译： 当将特定电位施加到真空容器内的部件（11）时，需要将导体引导通过真空容器（10）的壁。 为此，绝缘体（14）必须安装在壁（10）中。 如果容器内的物理或化学过程导致导电材料分离，则存在绝缘体（14）将被涂覆在容器内的危险，并且所得到的导电涂层在导体（13）和容器 10）。 为了防止材料沉积在绝缘体（14）上，产生气流以沿着绝缘体（14）的壁部扫过。
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公开(公告)号：US08969753B2
公开(公告)日：2015-03-03
申请号：US11798795
申请日：2007-05-17
申请人： Siegfried Straemke
发明人： Siegfried Straemke
IPC分类号： B23K9/00 , C23F1/00 , C23C14/00 , C23C16/458 , C23C14/50 , H01L21/677 , H01L21/687
CPC分类号： C23C16/4584 , C23C14/505 , H01L21/67742 , H01L21/68771 , H01L21/68785
摘要： A plasma treatment installation including at least two stationary workpiece holders adapted for controlled rotation about their respective axis and having supporting plates for supporting workpieces for the treatment thereof, at least one hood to be set on a workpiece holder that is adapted to enclose each of a plurality of workpiece holders to form a sealed treatment space, and a manipulator for automatically equipping the supporting plates of a workpiece holder with workpieces, while the other workpiece holder is covered by the hood to perform the plasma treatment of the workpieces.
摘要翻译： 一种等离子体处理装置，其包括至少两个固定的工件保持器，所述固定工件保持件适于围绕它们各自的轴线受到控制的旋转，并且具有用于支撑用于处理它们的工件的支撑板，至少一个要设置在工件保持器上的罩， 多个工件保持器以形成密封处理空间，以及用于将工件保持器的支撑板自动装配到工件的操纵器，而另一个工件保持器被罩覆盖以执行工件的等离子体处理。
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公开(公告)号：US07419566B2
公开(公告)日：2008-09-02
申请号：US10610575
申请日：2003-07-02
申请人： Siegfried Straemke
发明人： Siegfried Straemke
IPC分类号： C23C16/00 , H01L21/306
CPC分类号： H01J37/32522
摘要： The plasma reactor comprises at least one cooling device (15, 16) consisting of two cooling elements (15a, 15b; 16a, 16b) adapted to be separately switched on and off. The heat produced during the plasma treatment is dissipated by the cooling device. In doing so, cooling elements are connected or disconnected in order to enlarge or reduce the effective cooling surface. The cooling elements (15a, 15b; 16a, 16b) are arranged in an interlaced manner so that local cooling peaks are avoided and, on the whole, an approximately uniform cooling sets in.
摘要翻译： 等离子体反应器包括至少一个由两个冷却元件组成的冷却装置（15,16），该两个冷却装置适于单独打开和关闭两个冷却元件（15 a，15 b; 16 a，16 b）。 在等离子体处理期间产生的热量由冷却装置消散。 在这样做时，冷却元件被连接或断开，以便扩大或减小有效的冷却表面。 冷却元件（15a，15b; 16a，16b）以交错方式布置，从而避免了局部冷却峰值，并且总的来说，大致均匀的冷却装置。
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公开(公告)号：US5992346A
公开(公告)日：1999-11-30
申请号：US778569
申请日：1997-01-03
申请人： Siegfried Straemke
发明人： Siegfried Straemke
CPC分类号： H01J37/32844 , B08B15/00 , B08B7/0035 , B08B7/0071 , C23C14/022 , C23C16/0245 , C23C16/4412 , C23C8/02 , Y02C20/30
摘要： The invention relates to an apparatus (10) for the surface treatment of workpieces. For providing an apparatus (10) which is suited to perform the plasma treatment of porous workpieces by use of simple means and with continuously high quality, it is provided according to the invention that the workpieces, while arranged in a vaccum container, are subjected first to a cleaning process for evaporating and sucking the adhering foreign substances and subsequently to a plasma treatment process. The apparatus (10) is characterized in that a separator (16) is arranged in the suction pipe (14) between the vacuum container (12) and the vacuum source (18) for separating foreign substances from the gas mixture sucked from the vacuum container (12).
摘要翻译： 本发明涉及一种用于表面处理工件的设备（10）。 为了提供一种适用于通过简单的手段和连续高质量进行多孔工件的等离子体处理的设备（10），根据本发明，提供了一种设置在真空容器中的工件首先经受 涉及用于蒸发和吸附附着的异物的清洁方法，然后进行等离子体处理。 该设备（10）的特征在于，在真空容器（12）和真空源（18）之间的吸入管（14）中设置有一个分离器（16），用于从吸入真空容器的气体混合物中分离异物 （12）。
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公开(公告)号：US20070267389A1
公开(公告)日：2007-11-22
申请号：US11798795
申请日：2007-05-17
申请人： Siegfried Straemke
发明人： Siegfried Straemke
IPC分类号： B23K9/00
CPC分类号： C23C16/4584 , C23C14/505 , H01L21/67742 , H01L21/68771 , H01L21/68785
摘要： A plasma treatment installation comprising at least two stationary workpiece holders adapted for controlled rotation about their respective axis and having supporting plates for supporting workpieces for the treatment thereof, at least one hood to be set on a workpiece holder that is adapted to enclose each of a plurality of workpiece holders to form a sealed treatment space, and a manipulator for automatically equipping the supporting plates of a workpiece holder with workpieces, while the other workpiece holder is covered by the hood to perform the plasma treatment of the workpieces.
摘要翻译： 一种等离子体处理装置，包括至少两个固定的工件保持器，所述固定工件保持件适于围绕其相应的轴线受控地旋转并具有用于支撑用于处理它们的工件的支撑板;至少一个待设置在工件保持器上的罩， 多个工件保持器以形成密封处理空间，以及用于将工件保持器的支撑板自动装配到工件的操纵器，而另一个工件保持器被罩覆盖以执行工件的等离子体处理。
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公开(公告)号：US5960648A
公开(公告)日：1999-10-05
申请号：US917931
申请日：1997-08-27
申请人： Siegfried Straemke
发明人： Siegfried Straemke
CPC分类号： D06L1/16 , D06B21/00 , D06M10/025
摘要： The invention refers to a process and a device for the treatment of fibrous material. In order to provide a process for the treatment of fibrous material which allows for cleaning and preparing fibrous material, the invention provides that fibrous material, especially combed sliver, textiles, non-woven fabrics and wool fiber bunches, are at first cleaned in a cleaning phase with support from a solvent, then dried in a vacuum drying phase, and then surface modified in a plasma treatment phase. The device (100,200) proposed according to the invention for the treatment of fibrous material comprises a cleaning vessel (102,202), a vacuum drier (104,204) and a plasma treatment vessel (106,206) for this purpose.
摘要翻译： 本发明涉及用于处理纤维材料的方法和装置。 为了提供一种用于处理允许清洁和制备纤维材料的纤维材料的方法，本发明提供纤维材料，特别是梳棉条，纺织品，无纺布和羊毛纤维束，首先在清洁中清洁 相，然后在真空干燥阶段干燥，然后在等离子体处理阶段进行表面改性。 根据本发明提出的用于处理纤维材料的装置（100,200）包括用于此目的的清洁容器（102,202），真空干燥器（104,204）和等离子体处理容器（106,206）。
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公开(公告)号：US5826773A
公开(公告)日：1998-10-27
申请号：US791326
申请日：1997-01-31
申请人： Siegfried Straemke
发明人： Siegfried Straemke
CPC分类号： D06B23/18 , B01J3/006 , C23C14/562
摘要： A material transfer device for continuously feeding or outputting strand material into or out of a treatment room, as well as to a material transfer structure. In order to maintain a desired treatment atmosphere in the treatment room, a material transfer device which is free from wear and trouble and has a good sealing effect. The material transfer device has a passage element, an inlet opening of which has a variable cross-section. The cross-section is either varied by a pressure device or by internal forces in a circumferentially expansible tube. Further, a pulling device pulls the strand material through the passage element. A plurality of chambers are arranged one behind the other, through which chambers the strand material travels both towards and out from the treatment chamber. The material passages of the chambers each have locks.
摘要翻译： 一种材料转移装置，用于连续地输送或输出股线材料进入或离开治疗室，以及材料转移结构。 为了在治疗室中保持期望的治疗气氛，没有磨损和麻烦并且具有良好的密封效果的材料转移装置。 材料输送装置具有通道元件，其入口具有可变的横截面。 横截面由压力装置或周向可膨胀的管中的内力来改变。 此外，牵引装置将线材材料拉过通道元件。 多个腔室一个接一个地布置，线束材料通过这些腔室朝向和离开治疗室行进。 各室的材料通道各有锁。
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公开(公告)号：US20050016460A1
公开(公告)日：2005-01-27
申请号：US10610575
申请日：2003-07-02
申请人： Siegfried Straemke
发明人： Siegfried Straemke
CPC分类号： H01J37/32522
摘要： The plasma reactor comprises at least one cooling device (15, 16) consisting of two cooling elements (15a, 15b; 16a, 16b) adapted to be separately switched on and off. The heat produced during the plasma treatment is dissipated by the cooling device. In doing so, cooling elements are connected or disconnected in order to enlarge or reduce the effective cooling surface. The cooling elements (15a, 15b; 16a, 16b) are arranged in an interlaced manner so that local cooling peaks are avoided and, on the whole, an approximately uniform cooling sets in.
摘要翻译： 等离子体反应器包括至少一个冷却装置（15,16），该冷却装置由适于单独打开和关闭的两个冷却元件（15a，15b; 16a，16b）组成。 在等离子体处理期间产生的热量由冷却装置消散。 在这样做时，冷却元件被连接或断开，以便扩大或减小有效的冷却表面。 冷却元件（15a，15b; 16a，16b）以交错的方式布置，从而避免局部冷却峰值，并且总体上大致均匀的冷却装置。
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