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公开(公告)号：US06516120B2
公开(公告)日：2003-02-04
申请号：US09731843
申请日：2000-12-08
IPC分类号： G02B626
CPC分类号： G02B6/12016 , G02B6/12004 , G02B6/12021 , G02B6/1228 , G02B6/14 , G02B6/2813 , G02B2006/12061 , G02B2006/12097 , G02B2006/12119
摘要： A silicon rib waveguide device includes a mode filter section serially connected to a curved rib section. The curved section has a width large enough to support multimode transmission while the filter section has a straight waveguide of smaller rib width supporting only single mode transmission. A tapered section connects the curved section to the straight section and an outwardly tapered waveguide is connected to the opposite end of the straight section.
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公开(公告)号：US06510258B1
公开(公告)日：2003-01-21
申请号：US09688349
申请日：2000-10-16
IPC分类号： G02B612
CPC分类号： G02B6/30 , G02B6/4202 , G02B6/4239 , G02B6/424
摘要： A method of forming an integrated chip optical device as a protective layer formed over part of the face of the chip on which at least one optical waveguide is formed, and the protective coating is selectively removed leaving the coating over an edge region 18 and the edge of the device is polished to provide high edge quality against which offchip optical fibers may be abutted.
摘要翻译： 形成集成芯片光学器件作为形成在其上形成有至少一个光波导的芯片的一部分的一部分上的保护层的方法，并且选择性地去除保护涂层，使得涂层在边缘区域18和边缘 的设备被抛光以提供高边缘质量，片上光纤可抵靠该质量。
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公开(公告)号：US06517997B1
公开(公告)日：2003-02-11
申请号：US09578513
申请日：2000-05-26
IPC分类号： G03F700
CPC分类号： G03F7/70475 , G02B6/12009 , G02B6/13
摘要： A method of manufacturing an integrated optical device on a substrate is described wherein the device comprises first and second areas each containing at least one optical component. The first and second areas are separated by a third relatively featureless area, which provides optical communication between the first and second areas. The method uses a photolithographic stepper to define features of the optical components in the first area within a first exposure field and the features of the optical component(s) in the second area within a second exposure field, the stepper being moved between exposures so that first and second exposure fields are contiguous, and a line of contact or area of overlap between the first and second fields lies within the third, relatively featureless area of the substrate. The method may be used to form an arrayed waveguide grating with input waveguides within a first field, an array of curved waveguides in a second field and output waveguides in a third field, the fields overlapping in relatively featureless areas between the respective waveguide components.
摘要翻译： 描述了在衬底上制造集成光学器件的方法，其中器件包括第一和第二区域，每个区域包含至少一个光学部件。 第一和第二区域由第三相对无特征区域分开，其提供第一和第二区域之间的光学通信。 该方法使用光刻步进器来限定第一曝光区域内的第一区域中的光学部件的特征和第二曝光区域内的第二区域中的光学部件的特征，步进器在曝光之间移动，使得 第一和第二曝光场是连续的，并且第一和第二场之间的接触线或重叠区域位于衬底的第三，相对无特征的区域内。 该方法可以用于形成阵列波导光栅，其具有在第一场内的输入波导，在第二场中的弯曲波导阵列，并且在第三场中输出波导，所述场在相应波导分量之间的相对无特征区域中重叠。
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公开(公告)号：US06509139B1
公开(公告)日：2003-01-21
申请号：US09686906
申请日：2000-10-12
IPC分类号： G02B610
CPC分类号： G02B6/136 , G02B6/13 , G02B6/30 , G02B6/305 , G02B2006/12061 , G02B2006/12097
摘要： A method of fabricating an integrated optical component on a silicon-on insulator chip comprising a silicon layer (1) separated from a substrate (2) by an insulating layer (3), the component having a first set of features, eg a rib waveguide (5) at a first level in the silicon layer (1) adjacent the insulating layer (3) and a second set of features, eg a triangular section (5B) at a second level in the silicon layer (1) further from the insulating layer (3), the method comprising the steps of: selecting a silicon-on-insulator chip having a silicon layer (1) of sufficient thickness for the first set of features; fabricating the first set of features in the silicon layer (1) at a first level in the silicon layer; increasing the thickness of the silicon layer (1) in selected areas to form a second level of the silicon layer (1) over part of the first level; and then fabricating the second set of features at the second level in the silicon layer (1).
摘要翻译： 一种在硅绝缘体芯片上制造集成光学部件的方法，其包括通过绝缘层（3）从衬底（2）分离的硅层（1），所述部件具有第一组特征，例如肋波导 （5）在与所述绝缘层（3）相邻的所述硅层（1）中处于第一级，并且所述第二组特征（例如，在所述硅层（1）中的第二级的三角形部分（5B））处于绝缘层 层（3），所述方法包括以下步骤：选择具有足够厚度的硅层（1）的绝缘体上硅芯片用于第一组特征;制造硅层（1）中的第一组特征， 在硅层中的第一级;在选定区域中增加硅层（1）的厚度，以在第一层的一部分上形成硅层（1）的第二层; 然后在硅层（1）中制造第二层的第二组特征。
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公开(公告)号：US06560393B2
公开(公告)日：2003-05-06
申请号：US09756197
申请日：2001-01-09
IPC分类号： G02B610
CPC分类号： G02B6/12014 , G02B6/12019 , G02B2006/12104
摘要： A dispersive optical waveguide array comprises a plurality of waveguide sections forming optical paths in parallel, each of the curved sections having the same curvature and the same section length around the curve.
摘要翻译： 分散光波导阵列包括平行地形成光路的多个波导部分，每个弯曲部分具有相同的曲率并且在曲线周围具有相同的截面长度。
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公开(公告)号：US06556759B2
公开(公告)日：2003-04-29
申请号：US09864393
申请日：2001-05-25
IPC分类号： G02B610
CPC分类号： G02B6/136 , G02B6/1228 , G02B6/132 , G02B6/305 , G02B2006/12097
摘要： A rib waveguide structure comprising a layer (4) of light conductive material defined between two planar faces with a rib (9) formed on one of the faces and an optical component e.g. a tapered waveguide (6) optically coupled to the other face. An inverted rib waveguide comprising a light conductive layer (11) and a rib (10) that projects from the light conductive layer (11) into a substrate (4,8) is also described as well as other optical devices comprising a light conductive layer separated from a substrate by a non-planar layer (3) of light confining material and optical devices comprising two or more layers (2, 3; 18, 19, 20) of light confining material buried within a rib with a light conducting component (10; 17; 22) at least a part of which is formed between planes defined by the two layers of light confining material. A method of forming such devices is also described.
摘要翻译： 肋波导结构包括限定在两个平面之间的导光材料层（4），所述两个平面之间形成有一个表面上的肋（9）和一个光学部件。 光学耦合到另一个面的锥形波导（6）。 还描述了包括导光层（11）和从导光层（11）突出到衬底（8,8）中的肋（10）的倒置肋波导，以及包括光导层 通过光限制材料的非平面层（3）和包含两个或更多层（2,3; 18,19,20）的光限制材料的光限制材料与基片间隔开， 10; 17; 22），其至少一部分形成在由两层光限制材料限定的平面之间。 还描述了形成这种装置的方法。
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公开(公告)号：US06510257B1
公开(公告)日：2003-01-21
申请号：US10092602
申请日：2002-03-08
IPC分类号： G02B600
CPC分类号： H04B10/077 , G01J3/28 , G01J3/447 , G02B6/12021 , G02B6/12023 , G02B6/2713 , G02B6/2793 , G02B6/29326 , G02B6/4246 , H04B10/07955
摘要： A multi-wavelength polarization monitor for use in optical networks is disclosed. A received light signal is beam split into first and second signal portions using a beam splitter having known optical characteristics. Each of the first and second signal portions is then dispersed onto a detector array using a first and second dispersive element having known polarization-dependent characteristics. The signal portions are dispersed other than as channelized data within known channels. The dispersed first and second signal portions are then detected using a first and a second detector array and electrical signals in dependence thereupon are provided for A/D conversion and digital signal processing. Using a processor the signals are spectrally augmented and the polarization of the light signal within each of the predetermined wavelength ranges corresponding to the known channels is determined in dependence upon the spectrally augmented signals and based on the known optical characteristics of the elements involved. The disclosed multi-wavelength polarization monitor is realised in a relatively simple manner and allows manufacturing of the same as a very compact integrated device at relatively low cost.
摘要翻译： 公开了一种用于光网络的多波长偏振监视器。 接收的光信号是使用具有已知光学特性的分束器将光束分割成第一和第二信号部分。 然后使用具有已知的偏振相关特性的第一和第二色散元件将第一和第二信号部分中的每一个分散到检测器阵列上。 信号部分除了作为已知信道内的信道化数据之外分散。 然后使用第一和第二检测器阵列检测分散的第一和第二信号部分，并且依赖于此提供用于A / D转换和数字信号处理的电信号。 使用处理器对信号进行光谱增强，并且根据频谱增强的信号并且基于所涉及的元件的已知光学特性来确定对应于已知信道的每个预定波长范围内的光信号的偏振。 所公开的多波长偏振监视器以相对简单的方式实现，并且允许以相对低的成本将其制造成非常紧凑的集成器件。
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