OPTICAL SENSOR
    1.
    发明申请
    OPTICAL SENSOR 有权
    光传感器

    公开(公告)号:US20140246610A1

    公开(公告)日:2014-09-04

    申请号:US14197106

    申请日:2014-03-04

    IPC分类号: G01D5/353

    摘要: An optical sensor (10) comprises an optical cavity defined by a dielectric body and responsive to one or more physical environmental conditions, and a waveguide (70) having a terminal end spaced apart from the optical cavity such that light is optically coupled from the terminal end of the waveguide (70) to the optical cavity. The waveguide (70) is arranged such that, in use, it is maintained at a first temperature that would not damage the optical coupling to the optical cavity when the dielectric body is maintained at a second temperature sufficient to damage the optical coupling to the optical cavity.

    摘要翻译: 光学传感器(10)包括由绝缘体限定并且响应于一个或多个物理环境条件的光学腔,以及具有与光腔间隔开的端部的波导(70),使得光从端子 波导(70)的端部到光腔。 波导(70)被布置成使得在使用中,当电介质被保持在足以损坏与光学器件的光学耦合的第二温度时,其在使用中保持在不损坏到光学腔的光耦合的第一温度 腔。

    Method of fabricating an integrated optical component
    3.
    发明授权
    Method of fabricating an integrated optical component 有权
    制造集成光学部件的方法

    公开(公告)号:US06509139B1

    公开(公告)日:2003-01-21

    申请号:US09686906

    申请日:2000-10-12

    IPC分类号: G02B610

    摘要: A method of fabricating an integrated optical component on a silicon-on insulator chip comprising a silicon layer (1) separated from a substrate (2) by an insulating layer (3), the component having a first set of features, eg a rib waveguide (5) at a first level in the silicon layer (1) adjacent the insulating layer (3) and a second set of features, eg a triangular section (5B) at a second level in the silicon layer (1) further from the insulating layer (3), the method comprising the steps of: selecting a silicon-on-insulator chip having a silicon layer (1) of sufficient thickness for the first set of features; fabricating the first set of features in the silicon layer (1) at a first level in the silicon layer; increasing the thickness of the silicon layer (1) in selected areas to form a second level of the silicon layer (1) over part of the first level; and then fabricating the second set of features at the second level in the silicon layer (1).

    摘要翻译: 一种在硅绝缘体芯片上制造集成光学部件的方法,其包括通过绝缘层(3)从衬底(2)分离的硅层(1),所述部件具有第一组特征,例如肋波导 (5)在与所述绝缘层(3)相邻的所述硅层(1)中处于第一级,并且所述第二组特征(例如,在所述硅层(1)中的第二级的三角形部分(5B))处于绝缘层 层(3),所述方法包括以下步骤:选择具有足够厚度的硅层(1)的绝缘体上硅芯片用于第一组特征;制造硅层(1)中的第一组特征, 在硅层中的第一级;在选定区域中增加硅层(1)的厚度,以在第一层的一部分上形成硅层(1)的第二层; 然后在硅层(1)中制造第二层的第二组特征。

    Optical waveguide having an optically decoupled modulator region
    4.
    发明授权
    Optical waveguide having an optically decoupled modulator region 有权
    具有光学解耦调制器区域的光波导

    公开(公告)号:US06327396B1

    公开(公告)日:2001-12-04

    申请号:US09299597

    申请日:1999-04-27

    IPC分类号: G02F101

    CPC分类号: G02F1/025

    摘要: An optical waveguide, such as a rib waveguide, having a first portion (7) to which a dopant (9) and/or a metal layer (10) is applied to enable an optical property of a second portion of the waveguide to be altered, the first portion (7) having a structure, e.g. being corrugated, the geometry of which is such as to prevent an optical wave being carried in the first portion (7). The dopant (9) and/or metal layer (10) can thus be positioned close to the second portion which carries the optical wave without causing perturbation, e.g. attenuation and/or polarization, of the optical wave.

    摘要翻译: 具有第一部分(7)的光波导,诸如肋波导,掺杂剂(9)和/或金属层(10)向其施加以使波导的第二部分的光学特性能够改变 ,第一部分(7)具有结构,例如 波纹状,其几何形状为防止在第一部分(7)中携带光波。 因此,掺杂剂(9)和/或金属层(10)可以靠近带有光波的第二部分定位,而不引起扰动,例如, 衰减和/或极化。

    Integrated optical circuit
    5.
    发明授权
    Integrated optical circuit 失效
    集成光电路

    公开(公告)号:US6163632A

    公开(公告)日:2000-12-19

    申请号:US158795

    申请日:1998-09-23

    摘要: An integrated optical circuit for use in a fibre optic gyroscope which senses rotation rates by determining a phase shift due to the Sagnac Effect between light beams travelling around an optical fibre sensing loop (4) in opposite directions, the circuit being provided on a silicon-on-insulator chip comprising a layer of silicon separated from a substrate by an insulating layer, the circuit comprising: rib waveguides (11) formed in the silicon layer for receiving light from a light source (2) and transmitting light to a light detector (3), fibre optic connectors (9) in the form of grooves etched in the silicon layer for receiving the respective ends of the optical fibre sensing loop (4); rib waveguides (11) formed in the silicon layer for transmitting light to and from said fibre optic connectors (9) so as to direct light beams in opposite directions around the sensing loop (4) and receive light beams returning therefrom, phase determining means and (13,17,31) integrated in silicon layer for determining a phase shift between the light beams returning from the sensing loop (4).

    摘要翻译: 一种用于光纤陀螺仪的集成光学电路,其通过在相反方向上确定在光纤传感环路(4)周围传播的光束之间的Sagnac效应确定相移来感测旋转速率,该电路设置在硅 - 绝缘体芯片,包括通过绝缘层从衬底分离的硅层,所述电路包括:形成在硅层中的肋波导(11),用于接收来自光源(2)的光并将光传输到光检测器( 3),在硅层中蚀刻的凹槽形式的光纤连接器(9),用于接收光纤感测回路(4)的相应端部; 形成在所述硅层中的肋波导(11),用于将光传送到所述光纤连接器(9)并从所述光纤连接器(9)发射光,以便沿着所述感测环路(4)周围的相反方向引导光束,并且接收从其返回的光束,相位确定装置和 (13,17,31),其集成在硅层中,用于确定从感测回路(4)返回的光束之间的相移。

    Integrated silicon pin diode electro-optic waveguide
    7.
    发明授权
    Integrated silicon pin diode electro-optic waveguide 失效
    集成硅pin二极管电光波导

    公开(公告)号:US5757986A

    公开(公告)日:1998-05-26

    申请号:US617810

    申请日:1996-03-20

    摘要: The device comprises a layer of silicon separated from a substrate by a layer of insulating material. A rib having an upper surface and two side surfaces is formed in the layer of silicon to provide a waveguide for the transmission of optical signals. A lateral doped junction is formed between the side surfaces of the rib such that an electrical signal can be applied across the junction to control the density of charge carriers across a substantial part of the cross-sectional area of the rib thereby actively altering the effective refractive index of the waveguide.

    摘要翻译: PCT No.PCT / GB93 / 01983 Sec。 371日期:1996年3月20日 102(e)1996年3月20日PCT PCT 1993年9月21日PCT公布。 公开号WO95 / 08787 日期:1995年3月30日该装置包括通过一层绝缘材料与衬底分离的硅层。 在硅层中形成具有上表面和两个侧表面的肋,以提供用于传输光信号的波导。 在肋的侧表面之间形成横向掺杂结,使得电信号可以跨越结点施加,以控制跨越肋的横截面区域的大部分的电荷载流子的密度,从而主动地改变有效折射率 波导指数。

    OPTICAL SENSOR
    8.
    发明申请
    OPTICAL SENSOR 有权
    光传感器

    公开(公告)号:US20140202253A1

    公开(公告)日:2014-07-24

    申请号:US14239386

    申请日:2012-08-09

    IPC分类号: G01J1/04 G01K11/32 G01L11/02

    摘要: An optical sensor is disclosed for measuring pressure and/or temperature. The optical sensor is adapted for use in high temperature environments, such as gas turbines and other engines. The optical sensor comprises an optical assembly having a sensor element, a spacer and a lens arranged along the optical axis. The sensor element is spaced from the lens by the spacer. An optical fibre is coupled to the optical assembly for illuminating the sensor element. The optical assembly is resiliently mounted in a housing such that the optical assembly is insulated from shock to the housing. There is also disclosed a method of assembling the optical sensor.

    摘要翻译: 公开了用于测量压力和/或温度的光学传感器。 光学传感器适用于高温环境,如燃气轮机和其他发动机。 光学传感器包括具有传感器元件,隔离物和沿光轴布置的透镜的光学组件。 传感器元件通过间隔件与透镜间隔开。 光纤耦合到光学组件以照亮传感器元件。 光学组件弹性地安装在壳体中,使得光学组件与冲击抵抗外壳绝缘。 还公开了组装光学传感器的方法。

    Connection between an integrated optical waveguide and an optical fibre
    10.
    发明授权
    Connection between an integrated optical waveguide and an optical fibre 失效
    集成光波导与光纤之间的连接

    公开(公告)号:US5787214A

    公开(公告)日:1998-07-28

    申请号:US643476

    申请日:1996-05-06

    IPC分类号: G02B6/30 G02B6/42

    CPC分类号: G02B6/30 G02B6/4207

    摘要: A connection between an integrated optical waveguide and an optical fibre has a layer of silicon in which a rib waveguide is formed separated from a substrate by a layer of silicon dioxide. A V-groove is formed in the substrate for receiving an optical fibre, and the V-groove is arranged to align the optical fibre at a predetermined angle with respect to the waveguide. The rib waveguide and the underlying layer of silicon dioxide are formed to overhang the end of the V-groove so that the end of the waveguide is in close proximity with the end of an optical fibre positioned in the V-groove. A method of forming a connection, in which the V-groove is etched using a material which etches the substrate material as opposed to the layer of silicon dioxide, is also disclosed. Finally, a method of connecting an integrated optical waveguide to an optical fibre using a connection as described above is disclosed.

    摘要翻译: 集成光波导和光纤之间的连接具有硅层,其中通过二氧化硅层与衬底分离形成肋波导。 在用于接收光纤的基板中形成有V形槽,并且V形槽布置成使光纤相对于波导以预定角度对准。 肋状波导和二氧化硅的下层形成为突出V形槽的端部,使得波导的端部紧邻位于V形槽中的光纤的端部。 还公开了一种形成连接的方法,其中使用与二氧化硅层相反蚀刻衬底材料的材料来蚀刻V形槽。 最后,公开了使用如上所述的连接将集成光波导连接到光纤的方法。