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公开(公告)号：US07413411B2
公开(公告)日：2008-08-19
申请号：US11115774
申请日：2005-04-27
申请人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US06902378B2
公开(公告)日：2005-06-07
申请号：US10095126
申请日：2002-03-08
申请人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US06461113B1
公开(公告)日：2002-10-08
申请号：US09454358
申请日：1999-12-03
申请人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
IPC分类号： F04B4900
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US20080267790A1
公开(公告)日：2008-10-30
申请号：US12170802
申请日：2008-07-10
申请人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
IPC分类号： F04B23/08
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US06022195A
公开(公告)日：2000-02-08
申请号：US517091
申请日：1995-08-21
申请人： Peter W. Gaudet , Michael J. Eacobacci , Robert J. Lepofsky , David E. Roche , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Michael J. Eacobacci , Robert J. Lepofsky , David E. Roche , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US5443368A
公开(公告)日：1995-08-22
申请号：US92692
申请日：1993-07-16
申请人： Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte' , Peter W. Gaudet , Martin Stein , Steven C. Rosner , Robert J. Lepofsky
发明人： Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte' , Peter W. Gaudet , Martin Stein , Steven C. Rosner , Robert J. Lepofsky
摘要： A vacuum system comprises, as an integral assembly, a turbomolecular pump with drive motor, a vent valve, a purge valve, a roughing valve, a heater and an electronic control module. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. Proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动马达的涡轮分子泵，排气阀，净化阀，粗加工阀，加热器和电子控制模块。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 通过检测泵驱动器上的当前负载或通过检测前级压力来检测净化气体通过清洗阀的正确引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US5157928A
公开(公告)日：1992-10-27
申请号：US704664
申请日：1991-05-20
申请人： Peter W. Gaudet , Donald A. Olsen , Michael J. Eacobacci , John T. Harvell , Robert J. Lepofsky , David E. Roche , Steven A. Bender
发明人： Peter W. Gaudet , Donald A. Olsen , Michael J. Eacobacci , John T. Harvell , Robert J. Lepofsky , David E. Roche , Steven A. Bender
CPC分类号： F04D19/04 , F04B37/08 , F04D27/00 , Y10S417/901
摘要： A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.
摘要翻译： 低温真空泵在整体组件中包括与低温泵阵列的第一级和第二级相关联的温度传感器和加热器，粗抽阀和净化阀。 可拆卸地联接在组件中的电子模块响应所有传感器并控制低温泵的所有操作，包括其再生。 系统参数存储在模块中的非易失性存储器中。 在再生程序中包括压力表的自动调零，粗糙泵送时阵列的加热，以及压力比测试的变化，以确定粗抽泵中的失速。 电子模块还在断电后重新启动系统，将压力表的使用限制在安全条件下，在低温泵运行时允许打开阀门之前提供警告并存储传感器校准信息。 通过泵上的控制盘的控制可能受到密码要求的限制。 还提供密码覆盖。
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公开(公告)号：US4918930A
公开(公告)日：1990-04-24
申请号：US243707
申请日：1988-09-13
申请人： Peter W. Gaudet , Donald A. Olsen , Michael J. Eacobacci , John T. Harvell , Robert J. Lepofsky , David E. Roche , Steven A. Bender
发明人： Peter W. Gaudet , Donald A. Olsen , Michael J. Eacobacci , John T. Harvell , Robert J. Lepofsky , David E. Roche , Steven A. Bender
CPC分类号： F04D19/04 , F04B37/08 , F04D27/00 , Y10S417/901
摘要： A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.
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公开(公告)号：US06474080B2
公开(公告)日：2002-11-05
申请号：US09982719
申请日：2001-10-18
IPC分类号： B01D2500
CPC分类号： F04B37/08 , B01D8/00 , H01L23/445 , H01L2924/0002 , H05K7/1425 , H01L2924/00
摘要： A cryopump system includes an integral assembly having a refrigerator, cryopumping surfaces cooled by the refrigerator, a first electronic module for controlling the cryopump, and a second electronic module which is removably coupled to the first module. The second electronic module has a first surface abutting a complementary first surface of a housing of the first electronic module. Preferably, the first controller module has three orthogonal surfaces of approximately the same dimensions. Electronic modules can be removably coupled to each of the three surfaces. The cryopump system includes a module cap which is coupled to an end of an electronic module to shield electrical connections between two coupled electronic modules. The electronic modules comprise a channel of rectangular cross section having slots for mounting printed circuit boards.
摘要翻译： 低温泵系统包括具有冰箱的整体组件，由冰箱冷却的低温泵送表面，用于控制低温泵的第一电子模块和可拆卸地联接到第一模块的第二电子模块。 第二电子模块具有邻接第一电子模块的壳体的互补的第一表面的第一表面。 优选地，第一控制器模块具有大致相同尺寸的三个正交表面。 电子模块可以可拆卸地联接到三个表面中的每一个。 低温泵系统包括模块帽，其连接到电子模块的端部以屏蔽两个耦合的电子模块之间的电连接。 电子模块包括具有用于安装印刷电路板的槽的矩形横截面的通道。
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公开(公告)号：US4910965A
公开(公告)日：1990-03-27
申请号：US626059
申请日：1984-06-29
IPC分类号： F04B37/08
CPC分类号： F04B37/08 , Y10S417/901
摘要： The invention discloses a cryopump comprising a primary cryopanel 67 associated with a low temperature heat sink 60 having means for adsorbing a first low boiling point gas and a secondary cryopanel 80 associated with heat sink 60 and a higher temperature heat sink 48 having means for condensing a higher boiling point gas. There are means 90 for selectively irradiating the primary cryopanel from a location external to the vacuum chamber. The radiation raises the temperature of the cryopanel above that which is necessary to cause said first gas to become desorbed from said cryopanel while having minimal effect on the capacity of the higher temperature heat sink.
摘要翻译： 本发明公开了一种低温泵，其包括与低温散热器60相关的初级冷冻板67，低温散热器60具有用于吸附第一低沸点气体的装置和与散热器60相关联的次级冷冻板80以及具有冷凝装置 高沸点气体。 存在用于从真空室外部的位置选择性地照射初级低温板的装置90。 辐射将冷冻板的温度提高到高于使所述第一气体从所述冷冻板中解吸所必需的温度，同时对较高温度的散热器的容量具有最小的影响。
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