Microcantilever-based gas sensor employing two simultaneous physical sensing modes
    1.
    发明授权
    Microcantilever-based gas sensor employing two simultaneous physical sensing modes 有权
    采用两种同时物理感测模式的基于微型悬臂梁的气体传感器

    公开(公告)号:US08762075B2

    公开(公告)日:2014-06-24

    申请号:US12852416

    申请日:2010-08-06

    IPC分类号: G01N31/00

    摘要: According to one embodiment, a system for detecting and identifying gases includes a piezoresistive microcantilever transducer, wherein dissipation of heat from the piezoresistive microcantilever into one or more gases is measured by changes in an electrical resistance of the piezoresistor, a vibrating microcantilever transducer, wherein shifts are measured in resonant frequency of the vibrating microcantilever due to viscous damping thereof by the one or more gases, and a subsystem for correlating the measured resistance changes and the resonant frequency shifts to the one or more gases. In another embodiment, a method for detecting and identifying one or more gases includes determining dissipation of heat from a microcantilever into one or more gases, and determining shifts in resonant frequency of the microcantilever due to viscous damping thereof by the one or more gases. Other systems, methods, and computer program products are also described according to more embodiments.

    摘要翻译: 根据一个实施例,用于检测和识别气体的系统包括压阻式微悬臂换能器,其中通过压敏电阻器的电阻的变化来测量从压阻微型悬臂梁到一个或多个气体的散热,振动微悬臂梁换能器 由振动微悬臂梁的一个或多个气体的粘性阻尼和谐振频率相关联的测量电阻变化和谐振频率偏移与一个或多个气体相关联的子系统来测量。 在另一个实施例中,用于检测和识别一种或多种气体的方法包括确定热从微悬臂梁到一种或多种气体的散热,以及由于一个或多个气体的粘滞阻尼,确定微悬臂梁的共振频率的移动。 还根据更多实施例描述其他系统,方法和计算机程序产品。

    MICROCANTILEVER-BASED GAS SENSOR EMPLOYING TWO SIMULTANEOUS PHYSICAL SENSING MODES
    10.
    发明申请
    MICROCANTILEVER-BASED GAS SENSOR EMPLOYING TWO SIMULTANEOUS PHYSICAL SENSING MODES 有权
    采用基于微波炉的气体传感器采用两种同时的物理传感模式

    公开(公告)号:US20110077872A1

    公开(公告)日:2011-03-31

    申请号:US12852416

    申请日:2010-08-06

    IPC分类号: G01N29/02

    摘要: According to one embodiment, a system for detecting and identifying gases includes a piezoresistive microcantilever transducer, wherein dissipation of heat from the piezoresistive microcantilever into one or more gases is measured by changes in an electrical resistance of the piezoresistor, a vibrating microcantilever transducer, wherein shifts are measured in resonant frequency of the vibrating microcantilever due to viscous damping thereof by the one or more gases, and a subsystem for correlating the measured resistance changes and the resonant frequency shifts to the one or more gases. In another embodiment, a method for detecting and identifying one or more gases includes determining dissipation of heat from a microcantilever into one or more gases, and determining shifts in resonant frequency of the microcantilever due to viscous damping thereof by the one or more gases. Other systems, methods, and computer program products are also described according to more embodiments.

    摘要翻译: 根据一个实施例,用于检测和识别气体的系统包括压阻式微悬臂换能器,其中通过压敏电阻器的电阻的变化来测量从压阻微型悬臂梁到一个或多个气体的散热,振动微悬臂梁换能器 由振动微悬臂梁的一个或多个气体的粘性阻尼和谐振频率相关联的测量电阻变化和谐振频率偏移与一个或多个气体相关联的子系统来测量。 在另一个实施例中,用于检测和识别一种或多种气体的方法包括确定热从微悬臂梁到一种或多种气体的散热,以及由于一个或多个气体的粘滞阻尼,确定微悬臂梁的共振频率的移动。 还根据更多实施例描述其他系统,方法和计算机程序产品。