公开(公告)号：US20060231590A1

公开(公告)日：2006-10-19

申请号：US11405891

申请日：2006-04-18

申请人： Akihiro Hirano ,  Koichi Matsumoto ,  Yoshinobu Uchida ,  Tomoaki Mitani ,  Kenichi Shimizu

发明人： Akihiro Hirano ,  Koichi Matsumoto ,  Yoshinobu Uchida ,  Tomoaki Mitani ,  Kenichi Shimizu

IPC分类号： A47J36/02

CPC分类号： H01J37/32082 ,  G01N1/08 ,  G01N1/32 ,  H01J37/301 ,  H01J37/31 ,  H01J37/32018 ,  H01J37/32366 ,  H01J2237/31745 ,  H01J2237/334

摘要： A glow discharge drilling apparatus enables switching of a continuous mode for continuously supplying electric power and an intermittent mode for intermittently supplying electric power. Electric power is supplied in the intermittent mode with respect to a sample easily melted by a heat due to a glow discharge and a sample easily broken by a force of sputtering due to a glow discharge or the like, whereby the sample is drilled so that an observation face capable of carrying out good observation can be obtained. When the sample is not easily melted and easily broken, the sample is drilled so that a good observation face can be efficiently obtained by supplying electric power in the continuous mode.

摘要翻译： 辉光放电钻孔装置能够切换用于连续供电的连续模式和用于间歇地供电的间歇模式。 相对于由于辉光放电而容易熔化的样品的样品和由于辉光放电等而容易被溅射的力破坏的样品的电源而供给电力，由此钻出样品，使得 可以获得能够进行良好观察的观察面。 当样品不容易熔化并易于破裂时，钻取样品，从而通过在连续模式下供电来有效地获得良好的观察面。