摘要:
There are herein disclosed a poly{1-(1-alkoxyalkoxy)-4-(1-methylethenyl)benzene} having a narrow molecular weight distribution, for example, a poly{1-(1-alkoxyethoxy)-4-(1-methylethenyl)benzene} or a poly{1-(2-tetrahydrofuranyloxy)-4-(1-methylethenyl)benzene} which is useful as a chemical amplification type positive resist material; a preparation process of the polymer which comprises reacting industrially easily available 4-(1-methylethenyl)phenol with a vinyl ether to produce an alkoxyalkoxy compound, and then carrying out an anionic polymerization; and a preparation process of poly{4-(1-methylethenyl)phenol} having a narrow molecular weight distribution useful as a tease polymer for a chemical amplification type positive resist material which comprises reacting the above-mentioned polymer with a protonic acid in the presence of an organic solvent.
摘要:
A pattern can be precisely formed by irradiating, with an active energy beam, a positive sensitive resin composition according to this invention comprising a base polymer, an ether-bond-containing olefinic unsaturated compound and an acid-generating agent, where the base polymer is a copolymer comprising the structural units represented by formulas (1) to (3): where R1 and R3 are each independently hydrogen or methyl and R2 is C1-C6 straight or branched unsubstituted alkyl or C1-C6 straight or branched substituted alkyl,wherein a, b and c are 0.05 to 0.7, 0.15 to 0.8 and 0.01 to 0.5, respectively and a+b+c=1.
摘要:
The present invention discloses a hydrogenated ring-opening metathesis polymer comprising at least unit (A) of formula (1), unit (B) of formula (2) and unit (c) of formula (3): wherein a constituent molar ratio of the structural unit (A)/(B) is from 1/99 to 99/1 and a constituent molar ratio of the structural unit (B)/(C) is from 30/70 to 100/0 and, furthermore, a ratio of a weight-average molecular weight Mw to a number-average molecular weight Mn, that is Mw/Mn is from 1.0 to 2.0.
摘要:
A pattern can be precisely formed by irradiating, with an active energy beam, a positive sensitive resin composition according to this invention comprising a base polymer, an ether-bond-containing olefinic unsaturated compound and an acid-generating agent, where the base polymer is a copolymer comprising the structural units represented by formulas (1) to (3): where R1 and R3 are each independently hydrogen or methyl and R2 is C1-C6 straight or branched unsubstituted alkyl or C1-C6 straight or branched substituted alkyl, wherein a, b and c are 0.05 to 0.7, 0.15 to 0.8 and 0.01 to 0.5, respectively and a+b+c=1.
摘要翻译:通过用活性能量束照射本发明的含有基础聚合物,含醚键的烯属不饱和化合物和酸产生剂的正敏树脂组合物可精确地形成图案,其中基础聚合物为 包含由式(1)至(3)表示的结构单元的共聚物:其中R 1和R 3各自独立地为氢或甲基,R 2为C 1 -C 6直链或支链未取代的烷基或C1- C6直链或支链取代的烷基,其中a,b和c分别为0.05至0.7,0.15至0.8和0.01至0.5,a + b + c = 1。
摘要:
This invention discloses a copolymer comprising structural units represented by formulas (1) to (3): where R1 and R3 are each hydrogen or methyl and R2 is C1-C6 straight or branched unsubstituted alkyl or C1-C6 straight or branched substituted alkyl; wherein a, b and c are 0.05 to 0.7, 0.15 to 0.8 and 0.01 to 0.5, respectively and a+b+c=1.
摘要翻译:本发明公开了一种共聚物,其包含由式(1)至(3)表示的结构单元:其中R 1和R 3各自为氢或甲基,R 2为C 1 -C 6直链或支链未取代的烷基或C 1 -C 6直链或支链取代的烷基;其中 a,b和c分别为0.05〜0.7,0.15〜0.8,0.01〜0.5,a + b + c = 1。