公开(公告)号：US06946234B2

公开(公告)日：2005-09-20

申请号：US10627891

申请日：2003-07-28

申请人： Genji Imai ,  Ritsuko Fukuda ,  Toshiro Takao ,  Keiichi Ikeda ,  Yoshihiro Yamamoto

发明人： Genji Imai ,  Ritsuko Fukuda ,  Toshiro Takao ,  Keiichi Ikeda ,  Yoshihiro Yamamoto

IPC分类号： B41C1/10 ,  B41M5/36 ,  G03F7/039 ,  G03C1/492

CPC分类号： G03F7/0392 ,  B41C1/1008 ,  B41C2210/02 ,  B41C2210/06 ,  B41C2210/12 ,  B41C2210/24 ,  B41C2210/266 ,  B41M5/368

摘要： A pattern can be precisely formed by irradiating, with an active energy beam, a positive sensitive resin composition according to this invention comprising a base polymer, an ether-bond-containing olefinic unsaturated compound and an acid-generating agent, where the base polymer is a copolymer comprising the structural units represented by formulas (1) to (3): where R1 and R3 are each independently hydrogen or methyl and R2 is C1-C6 straight or branched unsubstituted alkyl or C1-C6 straight or branched substituted alkyl,wherein a, b and c are 0.05 to 0.7, 0.15 to 0.8 and 0.01 to 0.5, respectively and a+b+c=1.

摘要翻译： 通过用活性能量束照射本发明的含有基础聚合物，含醚键的烯属不饱和化合物和酸产生剂的正敏树脂组合物可精确地形成图案，其中基础聚合物为 包含由式（1）至（3）表示的结构单元的共聚物：其中R 1和R 3各自独立地为氢或甲基，R 2， 直链或支链未取代烷基或C 1 -C 6直链或C 1 -C 6直链或支链未取代的烷基或C 1 -C 6直链或C 1 -C 6 - 支链取代烷基，其中a，b和c分别为0.05〜0.7,0.15〜0.8,0.01〜0.5，a + b + c = 1。

公开(公告)号：US06630285B2

公开(公告)日：2003-10-07

申请号：US09418368

申请日：1999-10-14

申请人： Genji Imai ,  Ritsuko Fukuda ,  Toshiro Takao ,  Keiichi Ikeda ,  Yoshihiro Yamamoto

发明人： Genji Imai ,  Ritsuko Fukuda ,  Toshiro Takao ,  Keiichi Ikeda ,  Yoshihiro Yamamoto

IPC分类号： G03F7039

CPC分类号： G03F7/0392 ,  B41C1/1008 ,  B41C2210/02 ,  B41C2210/06 ,  B41C2210/12 ,  B41C2210/24 ,  B41C2210/266 ,  B41M5/368

摘要： A pattern can be precisely formed by irradiating, with an active energy beam, a positive sensitive resin composition according to this invention comprising a base polymer, an ether-bond-containing olefinic unsaturated compound and an acid-generating agent, where the base polymer is a copolymer comprising the structural units represented by formulas (1) to (3): where R1 and R3 are each independently hydrogen or methyl and R2 is C1-C6 straight or branched unsubstituted alkyl or C1-C6 straight or branched substituted alkyl, wherein a, b and c are 0.05 to 0.7, 0.15 to 0.8 and 0.01 to 0.5, respectively and a+b+c=1.

摘要翻译： 通过用活性能量束照射本发明的含有基础聚合物，含醚键的烯属不饱和化合物和酸产生剂的正敏树脂组合物可精确地形成图案，其中基础聚合物为 包含由式（1）至（3）表示的结构单元的共聚物：其中R 1和R 3各自独立地为氢或甲基，R 2为C 1 -C 6直链或支链未取代的烷基或C1- C6直链或支链取代的烷基，其中a，b和c分别为0.05至0.7,0.15至0.8和0.01至0.5，a + b + c = 1。

公开(公告)号：US06433118B1

公开(公告)日：2002-08-13

申请号：US09418370

申请日：1999-10-14

申请人： Ritsuko Fukuda ,  Toshiro Takao ,  Keiichi Ikeda ,  Yoshihiro Yamamoto

发明人： Ritsuko Fukuda ,  Toshiro Takao ,  Keiichi Ikeda ,  Yoshihiro Yamamoto

IPC分类号： C08F22010

CPC分类号： G03F7/0392

摘要： This invention discloses a copolymer comprising structural units represented by formulas (1) to (3): where R1 and R3 are each hydrogen or methyl and R2 is C1-C6 straight or branched unsubstituted alkyl or C1-C6 straight or branched substituted alkyl; wherein a, b and c are 0.05 to 0.7, 0.15 to 0.8 and 0.01 to 0.5, respectively and a+b+c=1.

摘要翻译： 本发明公开了一种共聚物，其包含由式（1）至（3）表示的结构单元：其中R 1和R 3各自为氢或甲基，R 2为C 1 -C 6直链或支链未取代的烷基或C 1 -C 6直链或支链取代的烷基;其中 a，b和c分别为0.05〜0.7,0.15〜0.8,0.01〜0.5，a + b + c = 1。

公开(公告)号：US06281318B1

公开(公告)日：2001-08-28

申请号：US09031646

申请日：1998-02-27

申请人： Yoshihiro Yamamoto ,  Toshiro Takao ,  Ritsuko Fukuda ,  Isao Hara

发明人： Yoshihiro Yamamoto ,  Toshiro Takao ,  Ritsuko Fukuda ,  Isao Hara

IPC分类号： C08F1224

CPC分类号： C08F12/22 ,  G03F7/0392

摘要： There are herein disclosed a poly{1-(1-alkoxyalkoxy)-4-(1-methylethenyl)benzene} having a narrow molecular weight distribution, for example, a poly{1-(1-alkoxyethoxy)-4-(1-methylethenyl)benzene} or a poly{1-(2-tetrahydrofuranyloxy)-4-(1-methylethenyl)benzene} which is useful as a chemical amplification type positive resist material; a preparation process of the polymer which comprises reacting industrially easily available 4-(1-methylethenyl)phenol with a vinyl ether to produce an alkoxyalkoxy compound, and then carrying out an anionic polymerization; and a preparation process of poly{4-(1-methylethenyl)phenol} having a narrow molecular weight distribution useful as a tease polymer for a chemical amplification type positive resist material which comprises reacting the above-mentioned polymer with a protonic acid in the presence of an organic solvent.

摘要翻译： 本文公开了具有窄分子量分布的聚{1-（1-烷氧基烷氧基）-4-（1-甲基乙烯基）苯}，例如聚{1-（1-烷氧基乙氧基）-4-（1- 甲基乙烯基苯）苯}或可用作化学扩增型正性抗蚀剂材料的聚{1-（2-四氢呋喃氧基）-4-（1-甲基乙烯基）苯} 聚合物的制备方法，其包括使工业上容易获得的4-（1-甲基乙烯基）苯酚与乙烯基醚反应产生烷氧基烷氧基化合物，然后进行阴离子聚合; 以及具有窄分子量分布的聚{4-（1-甲基乙烯基）苯酚}的制备方法，可用作化学扩增型正性抗蚀剂材料的特征聚合物，该方法包括使上述聚合物与质子酸在存在下反应 的有机溶剂。