公开(公告)号：US20070224840A1

公开(公告)日：2007-09-27

申请号：US11687822

申请日：2007-03-19

申请人： Anthony Renau ,  Vikram Singh ,  Atul Gupta ,  Timothy Miller ,  Edwin Arevalo ,  George Papasouliotis ,  Yong Bae Jeon

发明人： Anthony Renau ,  Vikram Singh ,  Atul Gupta ,  Timothy Miller ,  Edwin Arevalo ,  George Papasouliotis ,  Yong Bae Jeon

IPC分类号： H01L21/00 ,  H01L21/336 ,  H01L21/22 ,  H01L21/38

CPC分类号： H01J37/32935 ,  H01J37/32412 ,  H01J37/3299 ,  H01L22/20

摘要： A method of selecting plasma doping process parameters includes determining a recipe parameter database for achieving at least one plasma doping condition. The initial recipe parameters are determined from the recipe parameter database. In-situ measurements of at least one plasma doping condition are performed. The in-situ measurements of the at least one plasma doping condition are correlated to at least one plasma doping result. At least one recipe parameter is changed in response to the correlation so as to improve at least one plasma doping process performance metric.

摘要翻译： 选择等离子体掺杂工艺参数的方法包括确定用于实现至少一种等离子体掺杂条件的配方参数数据库。 从配方参数数据库确定初始配方参数。 进行至少一个等离子体掺杂条件的原位测量。 至少一种等离子体掺杂条件的原位测量与至少一种等离子体掺杂结果相关。 响应于相关性改变至少一个配方参数，以便改进至少一个等离子体掺杂工艺性能度量。

公开(公告)号：US5822109A

公开(公告)日：1998-10-13

申请号：US862530

申请日：1997-05-23

申请人： Yong-Bae Jeon

发明人： Yong-Bae Jeon

IPC分类号： G02B5/08 ,  G02B7/18 ,  G02B26/08 ,  G03B21/00 ,  G03B21/28 ,  G02B26/00

CPC分类号： G02B26/0858

摘要： A method for the manufacturing of an array of M.times.N thin film actuated mirrors for use in an optical projection system, the inventive method includes the steps of: preparing an active matrix; depositing a passivation layer and an etchant stopping layer; depositing a thin film sacrificial layer; creating an array of M.times.N pairs of empty cavities and a continuous sacrificial area to thereby form a combination layer; forming an array of M.times.N actuated mirror structures, each of the actuated mirror structures including a first thin film electrode, a thin film electrodisplacive member, a second thin film electrode, an elastic member; and removing the thin film sacrificial layer, thereby forming the array of M.times.N thin film actuated mirrors. During the forming of the actuated mirror structures, since the iso-cut are placed above the continuous sacrificial area, even if the patterns and the iso-cuts coinside, the etchant stopping layer will not be damaged and hence during the removal of the continuous sacrificial area, the etchant will only attack the continuous sacrificial area, and the passivation layer and the active matrix located therebelow will not be affected.

摘要翻译： 一种用于制造用于光学投影系统的MxN薄膜致动反射镜阵列的方法，本发明的方法包括以下步骤：制备有源矩阵; 沉积钝化层和蚀刻剂停止层; 沉积薄膜牺牲层; 产生MxN对空腔阵列和连续牺牲区域，从而形成组合层; 形成MxN致动反射镜结构的阵列，所述致动反射镜结构中的每一个包括第一薄膜电极，薄膜电致位移元件，第二薄膜电极，弹性元件; 并去除薄膜牺牲层，由此形成MxN薄膜致动反射镜阵列。 在激活的反射镜结构的形成过程中，由于等截面位于连续的牺牲区域之上，所以即使图案和等截面硬化，蚀刻剂停止层也不会被损坏，因此在去除连续的牺牲层 蚀刻剂只会攻击连续的牺牲区，钝化层和位于其下的有源矩阵不会受到影响。

公开(公告)号：US5708521A

公开(公告)日：1998-01-13

申请号：US239434

申请日：1994-05-04

申请人： Yong-Bae Jeon ,  Young-Jun Choi

发明人： Yong-Bae Jeon ,  Young-Jun Choi

IPC分类号： G02B26/08 ,  G02F1/19 ,  H04R17/08 ,  G02B5/08 ,  H01L41/04 ,  H04R17/00

CPC分类号： G02B26/0858 ,  H04R17/08

摘要： An M.times.N actuated mirror array for use in an optical projection system, comprises: a substrate having an array of M.times.N openings therethrough and an array of connecting terminals, wherein each of the M.times.N openings is filled with a metallization and each of the connecting terminals is located on top of each of the M.times.N openings filled with the metallization; an array of M.times.N actuators, wherein each of the M.times.N actuators is provided with a top surface, a bottom surface and a pair of external sides, and is comprised of a pair of electrodisplacive members, a common signal electrode located between the pair of electrodisplacive members, and a pair of reference electrodes on the pair of external sides of the actuator, respectively; and an array of M.times.N mirrors, wherein each of the M.times.N mirrors is coupled with each of the M.times.N actuators and is located on the top surface thereof.

摘要翻译： 一种用于光学投影系统的MxN致动反射镜阵列，包括：具有穿过其中的M×N个开口的阵列的基板和连接端子阵列，其中每个MxN开口都填充有金属化，并且每个连接端子位于 在每个填充有金属化的MxN开口的顶部; MxN致动器阵列，其中每个MxN致动器设置有顶表面，底表面和一对外侧，并且包括一对电致位移构件，位于该对电致位移构件之间的公共信号电极 以及分别在致动器的一对外侧上的一对参考电极; 以及一组MxN反射镜，其中每个M×N反射镜与每个M×N致动器耦合并且位于其顶表面上。

公开(公告)号：US5543959A

公开(公告)日：1996-08-06

申请号：US216754

申请日：1994-03-23

申请人： Yong-Bae Jeon

发明人： Yong-Bae Jeon

IPC分类号： G02F1/19 ,  G02B26/08 ,  H01L27/20 ,  H01L41/09 ,  H04N5/74 ,  G02F1/03

CPC分类号： G02B26/0858 ,  H01L27/20 ,  H01L41/338 ,  Y10T29/42

摘要： An array of M.times.N electrodisplacive actuators is prepared by:(1) forming a multilayered ceramic structure having M layers of a first conductive metallization and M+1 layers of an electrodisplacive material;(2) obtaining a composite ceramic wafer by slicing the multilayered ceramic structure in a direction normal to the layers of the first conductive metallization;(3) providing a plurality of regularly spaced horizontally directional trenches running parallel to each other wherein each of the trenches is located at an equidistance from two adjacent layers of the first conductive metallization;(4) depositing a second conductive metallization;(5) preparing N-1 regularly spaced vertically directional cuts on the composite ceramic wafer prepared using steps (3) and (4) to thereby obtain the array of M.times.N electrodisplacive actuators.

摘要翻译： 通过以下方法制备MxN电致位移致动器阵列：（1）形成具有M层的第一导电金属化层和M + 1层电致位移材料的多层陶瓷结构体; （2）通过在垂直于第一导电金属化层的方向上切割多层陶瓷结构体来获得复合陶瓷晶片; （3）提供彼此平行延伸的多个规则间隔的水平方向的沟槽，其中每个沟槽位于与第一导电金属化的两个相邻层相等的距离处; （4）沉积第二导电金属化; （5）在使用步骤（3）和（4）制备的复合陶瓷晶片上制备N-1规则间隔的垂直方向切口，从而获得MxN电致位移致动器的阵列。

公开(公告)号：US5768006A

公开(公告)日：1998-06-16

申请号：US704340

申请日：1996-08-27

申请人： Yong-Ki Min ,  Yong-Bae Jeon

发明人： Yong-Ki Min ,  Yong-Bae Jeon

IPC分类号： G02B26/08 ,  G02B26/00

CPC分类号： G02B26/0858

摘要： An inventive array of thin film actuated mirrors is provided with an active matrix having an array of switching devices, an array of actuating structures and an array of mirrors, wherein each of the actuating structures is cantilevered on the active matrix, and each of the switching devices is positioned on the active matrix beside the position at which each of the actuating structures is cantilevered. In the array, during the operation of the array, since each of the mirrors is connected to the actuating structure through a recessed portion thereof, the mirror stays planar, allowing more accurate and effective reflection of the light beams, which will, in turn, enhance the overall optical efficiency of the array. Furthermore, since the active matrix has the array of switching devices is located beside each of the actuating structures, not directly therebelow, an electrical connection between each of the switching devices and the actuating structure can be made after all of the high temperature processes in the manufacture of the array have been completely, thereby minimizing the effects thereof.

摘要翻译： 本发明的薄膜致动反射镜阵列设置有具有开关装置阵列，致动结构阵列和反射镜阵列的有源矩阵，其中每个致动结构在有源矩阵上悬臂，并且每个开关 装置位于有源矩阵旁边的每个致动结构悬臂的位置。 在阵列中，在阵列的操作期间，由于每个反射镜通过其凹部连接到致动结构，所以反射镜保持平面，允许光束的更准确和有效的反射， 提高阵列的整体光效。 此外，由于有源矩阵具有开关装置的阵列位于每个致动结构的旁边，而不是直接在其下方，所以每个开关装置和致动结构之间的电连接可以在所有的高温处理 阵列的制造已经完全，从而使其效果最小化。

公开(公告)号：US06975459B2

公开(公告)日：2005-12-13

申请号：US10387026

申请日：2003-03-12

申请人： George Barbastathis ,  Sang-Gook Kim ,  Wei-Chuan Shih ,  Chee Wei Wong ,  Yong-Bae Jeon

发明人： George Barbastathis ,  Sang-Gook Kim ,  Wei-Chuan Shih ,  Chee Wei Wong ,  Yong-Bae Jeon

IPC分类号： G02B5/18 ,  G02B5/32 ,  G02B26/08 ,  G03H1/04 ,  G03H1/22

CPC分类号： G03H1/0248 ,  G02B5/1828 ,  G02B5/32 ,  G02B26/0808 ,  G03H1/0402 ,  G03H1/22 ,  G03H1/2294 ,  G03H2225/13 ,  G03H2225/23 ,  G03H2225/24

摘要： A volume diffractive composite is disclosed for providing illumination at a first output angle. The volume diffractive composite comprises a first plurality of grating elements that are mutually spaced from another in a first position with a first spacing period along a first plane, and an actuation unit for changing at least one of the position or the spacing period of the first plurality of grating elements to a second position or spacing period to provide illumination at a second output angle.

摘要翻译： 公开了用于以第一输出角提供照明的体积衍射复合物。 所述体积衍射复合物包括第一多个光栅元件，所述第一多个光栅元件在第一位置与第一多个光栅元件相互间隔，所述第一多个光栅元件具有沿着第一平面的第一间隔周期;以及致动单元，用于改变所述第一和第二间隔周期的至少一个 多个光栅元件到第二位置或间隔周期以提供第二输出角度的照明。

公开(公告)号：US5768008A

公开(公告)日：1998-06-16

申请号：US678893

申请日：1996-07-12

申请人： Yong-Bae Jeon

发明人： Yong-Bae Jeon

IPC分类号： G02F1/19 ,  G02B26/08 ,  H01L27/20 ,  H01L41/09 ,  H04N5/74 ,  G02B26/00

CPC分类号： G02B26/0858 ,  H01L27/20 ,  H01L41/338 ,  Y10T29/42

摘要： An array of M.times.N electrodisplacive actuators is prepared by: (1) forming a multilayered ceramic structure having M layers of a first conductive metallization and M+1 layers of an electrodisplacive material; (2) obtaining a composite ceramic wafer by slicing the multilayered ceramic structure in a direction normal to the layers of the first conductive metallization; (3) providing a plurality of regularly spaced horizontally directional trenches running parallel to each other wherein each of the trenches is located at an equidistance from two adjacent layers of the first conductive metallization; (4) depositing a second conductive metallization; (5) preparing N-1 regularly spaced vertically directional cuts on the composite ceramic wafer prepared using steps (3) and (4) to thereby obtain the array of M.times.N electrodisplacive actuators.

公开(公告)号：US5758396A

公开(公告)日：1998-06-02

申请号：US239173

申请日：1994-05-04

申请人： Yong-Bae Jeon ,  Dong-Kuk Kim

发明人： Yong-Bae Jeon ,  Dong-Kuk Kim

IPC分类号： H01L41/083 ,  G02B26/08 ,  H01L41/22 ,  H04N5/74

CPC分类号： G02B26/0858 ,  H01L41/0831 ,  H01L41/257 ,  H01L41/338 ,  Y10T29/42

摘要： An array of M.times.N piezoelectric actuators is prepared by: (1) forming a multilayered ceramic structure having M layers of a first conductive metallization and M+1 layers of a piezoelectric material; (2) obtaining a composite ceramic wafer by slicing the multilayered ceramic structure in a direction normal to the layers of the first conductive metallization; (3) providing a plurality of regularly spaced horizontally directional trenches running parallel to each other wherein each of the trenches is located at an equidistance from two adjacent layers of the first conductive metallization; (4) depositing a first and second external electrode layers; (5) polarizing the pair of layers of the piezoelectric material located between the first and second external electrode layers; (6) forming N-1 regularly spaced vertically directional cuts on the poled composite ceramic wafer prepared using steps (3), (4) and (5) to thereby obtain the array of M.times.N piezoelectric actuators.

摘要翻译： MxN压电致动器的阵列通过以下方式制备：（1）形成具有M层的第一导电金属化层和M + 1层压电材料的多层陶瓷结构体; （2）通过在垂直于第一导电金属化层的方向上切割多层陶瓷结构体来获得复合陶瓷晶片; （3）提供彼此平行延伸的多个规则间隔的水平方向的沟槽，其中每个沟槽位于与第一导电金属化的两个相邻层相等的距离处; （4）沉积第一和第二外部电极层; （5）使位于第一和第二外部电极层之间的压电材料的一对层极化; （6）在使用步骤（3），（4）和（5）制备的极化复合陶瓷晶片上形成N-1个规则间隔的垂直方向切口，从而获得MxN压电致动器的阵列。

公开(公告)号：US5682260A

公开(公告)日：1997-10-28

申请号：US238132

申请日：1994-05-04

申请人： Yong-Bae Jeon

发明人： Yong-Bae Jeon

IPC分类号： H04N5/74 ,  G02B26/08 ,  G02F1/19 ,  H04R17/08 ,  G02B5/08 ,  H01L41/04 ,  H04R17/00

CPC分类号： G02B26/0858 ,  H04R17/08

摘要： An M.times.N actuated mirror array for use in an optical projection system, wherein M and N are integers, including: an array of M.times.N electrodisplacive actuators wherein each of the M.times.N electrodisplacive actuators is provided with a top surface, a bottom surface, a pair of external sides and has a bimorph structure having a pair of layers of an electrodisplacive material, a common signal electrode located between the pair of layers of the electrodisplacive material, and a pair of reference electrodes provided on the external sides thereof an array of M.times.N mirrors wherein each of M.times.N mirrors is coupled with each of the M.times.N electrodisplacive actuators and is mounted on the top surface of each of the M.times.N actuators an active matrix substrate comprising a substrate and an array of M.times.N second conductive type MOSFETs formed on the substrate; and an array of M.times.N connecting terminals wherein each of the M.times.N connecting terminals, located between each of the actuators and the substrate, is used for electrically connecting the common signal electrode of each of the actuators with each of the MOSFETs.

摘要翻译： 一种用于光学投影系统的MxN致动反射镜阵列，其中M和N是整数，包括：MxN电致位移致动器的阵列，其中每个MxN电致位移致动器设置有顶表面，底表面，一对外部 并且具有双电晶结构，其具有电子显示材料的一对层，位于电致位移材料的一对层之间的公共信号电极以及在其外侧上设置有MxN镜阵列的一对参考电极，其中每个 MxN反射镜的每一个与每个MxN电致位移致动器耦合，并且安装在每个MxN致动器的顶表面上，该有源矩阵衬底包括衬底和形成在衬底上的MxN第二导电型MOSFET的阵列; 以及MxN连接端子阵列，其中位于每个致动器和基板之间的每个MxN连接端子用于将每个致动器的公共信号电极与每个MOSFET电连接。