公开(公告)号：US5431769A

公开(公告)日：1995-07-11

申请号：US140455

申请日：1993-10-25

申请人： Toshiro Kisakibaru ,  Akira Kojima ,  Takayuki Fukunaga ,  Yoshinori Hata ,  Yasushi Kato ,  Isao Honbori ,  Tomohide Jozaki ,  Hirohisa Kooriyama

发明人： Toshiro Kisakibaru ,  Akira Kojima ,  Takayuki Fukunaga ,  Yoshinori Hata ,  Yasushi Kato ,  Isao Honbori ,  Tomohide Jozaki ,  Hirohisa Kooriyama

IPC分类号： C23C16/50 ,  C23C16/511 ,  C23F4/00 ,  H01J37/32 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/31 ,  H05H1/00

CPC分类号： H01J37/32862 ,  H01J37/32623 ,  H01J37/32678 ,  H01J37/32688

摘要： A plasma treatment method and system allowing the plasma intensity to be controllably distributed perpendicularly to the inner wall and ensuring effective and uniform treatment in the case of executing plasma cleaning, plasma CVD, RIE or the like. In the plasma treatment where plasma is generated within a chamber 1 for plasma treatment, magnetic field 31 is applied perpendicularly to the inner wall of the chamber to produce plasma whose intensity is directed perpendicularly to the inner wall of the chamber or in parallel with the surface to be treated. Further, the magnetic filed 31 rendered into a revolving field 32 may be applied to rotate the plasma to accomplish a uniform and effective treatment.

摘要翻译： 在等离子体清洗，等离子体CVD，RIE等的情况下，等离子体处理方法和等离子体强度可以与内壁垂直地可控制地分布，确保有效且均匀的处理。 在用于等离子体处理的室1内产生等离子体的等离子体处理中，垂直于室的内壁施加磁场31，产生强度垂直于室内壁或与表面平行的等离子体 待处理 此外，可以施加提供到旋转场32中的磁场31以旋转等离子体以实现均匀且有效的处理。

公开(公告)号：US5771599A

公开(公告)日：1998-06-30

申请号：US704998

申请日：1996-08-29

申请人： Hiroshi Uchimura ,  Takazumi Watanabe ,  Masayuki Tatara ,  Yoshinori Hata ,  Kazuo Kimura

发明人： Hiroshi Uchimura ,  Takazumi Watanabe ,  Masayuki Tatara ,  Yoshinori Hata ,  Kazuo Kimura

IPC分类号： B24B5/37 ,  B24B49/06 ,  B24B49/14 ,  G01B5/08 ,  G01B7/12

CPC分类号： B24B5/37 ,  B24B49/06 ,  B24B49/14

摘要： A method of measuring a roll diameter of a roll is provided. At first, a step-shaped conical master roll consisting of a plurality of diametrical parts is prepared and then, the diameters of the diametrical parts under predetermined standard temperature are measured. After mounting the master roll on a roll grinder under a temperature condition similar to that surrounding the roll mounted on the roll grinder, a diameter of one diametrical part, of which standard diameter is closest to the roll diameter of the roll, is measured. Next, a difference between the diameter value of the diametrical part and the standard diameter value is calculated as a correction value, so that the roll diameter value of the roll is corrected by the correction value.

摘要翻译： 提供了一种测量卷筒直径的方法。 首先，准备由多个直径部件构成的阶梯形的圆锥形主辊，然后测量在预定标准温度下的直径部分的直径。 在与辊式研磨机上安装的辊周围的温度条件相似的温度条件下将母辊安装在辊式研磨机上之后，测量其直径最接近轧辊直径的一个直径部分的直径。 接下来，计算直径部分的直径值与标准直径值之间的差作为校正值，从而通过校正值校正辊的辊直径值。