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    Substrate detection device and substrate conveyance apparatus
    2.
    发明授权
    Substrate detection device and substrate conveyance apparatus 有权
    基板检测装置和基板输送装置

    公开(公告)号：US08125651B2

    公开(公告)日：2012-02-28

    申请号：US12864785

    申请日：2009-01-14

    申请人： Shuzo Yagi ,  Masao Nakane ,  Yoshinori Isobata

    发明人： Shuzo Yagi ,  Masao Nakane ,  Yoshinori Isobata

    IPC分类号： G01B11/14

    CPC分类号： H01L21/67259 ,  B65G49/064 ,  H01L21/67706

    摘要： An object is to provide a substrate conveyance apparatus and a substrate detection device capable of improving flexibility in arrangement layout.The substrate detection device includes a projector 41 for projecting inspection light 40 so as to pass through a predetermined position on a path of a substrate 4 conveyed by conveyance belts 26, a light receiver 42 for receiving the inspection light 40 projected by the projector 41, and a detector (a control device 15) for detecting that the substrate 4 reaches the predetermined position based on a decrease in the amount of received light of the inspection light 40 received by the light receiver 42 when the substrate 4 conveyed by the conveyance belts 26 reaches the predetermined position and a portion of the inspection light 40 is blocked by the substrate 4. The inspection light 40 is projected from the projector 41 so as to include opposite ends of a width direction of the conveyance belts 26 in an optical path of the inspection light in a direction orthogonal to a conveyance direction of the substrate 4 conveyed by the conveyance belts 26 and the light receiver 42 receives the inspection light passing through upper and lower regions of the conveyance belts 26 in the width direction.

    摘要翻译： 本发明的目的是提供一种能够提高布置布局的灵活性的基板输送装置和基板检测装置。 基板检测装置包括：投影仪41，其用于突出检测光40，以通过由传送带26传送的基板4的路径上的预定位置，用于接收由投影仪41投射的检查光40的光接收器42; 以及检测器（控制装置15），用于基于当由传送带26传送的基板4时基板4接收到的检查光40的接收光量的下降而检测到基板4到达预定位置 到达预定位置，并且检查光40的一部分被基板4阻挡。检查光40从投影仪41突出，以包括传送带26的宽度方向的相对端在光路 在与由传送带26和光接收器42传送的基板4的传送方向正交的方向上的检查光接收插入件 分光穿过传送带26的宽度方向的上下区域。

    Method, apparatus and program of thermal analysis, heat controller and heating furnace using the method
    3.
    发明授权
    Method, apparatus and program of thermal analysis, heat controller and heating furnace using the method 有权
    热分析方法，装置和程序，热控制器和加热炉采用该方法

    公开(公告)号：US07549566B2

    公开(公告)日：2009-06-23

    申请号：US10523196

    申请日：2003-07-30

    申请人： Masaru Nonomura ,  Yoshinori Isobata ,  Hiroaki Onishi ,  Masahiro Taniguchi

    发明人： Masaru Nonomura ,  Yoshinori Isobata ,  Hiroaki Onishi ,  Masahiro Taniguchi

    IPC分类号： B23K31/02

    CPC分类号： G05D23/1951 ,  H05K3/3494

    摘要： A heating characteristic value at any measuring point of an object at any measuring location of a heating furnace is determined as a single invariable by using temperature (Tint and Ts) measured at the measuring point of the object and heating temperature (Ta) and heating time (t) at the measuring location of the heating furnace. The heating characteristic value (m-value) may be calculated without using physical characteristics of the object. By using the m-value, a temperature profile of the object heated under a modified heating condition may be simulated in a short period of time without actually heating and measuring the temperature of the object at a high accuracy level. By using such a simulation, an appropriate heating condition for heating an object in accordance with a desired heating condition may easily be determined.

    摘要翻译： 在加热炉的任何测量位置处的物体的任何测量点处的加热特性值通过使用在物体的测量点处测量的温度（Tint和Ts）和加热温度（Ta）和加热时间（Tint和Ts）而被确定为单一的 （t）在加热炉的测量位置。 可以在不使用物体的物理特性的情况下计算加热特性值（m值）。 通过使用m值，可以在短时间内模拟在改进的加热条件下加热的物体的温度分布，而不实际加热并以高精度水平测量物体的温度。 通过使用这样的模拟，可以容易地确定用于根据期望的加热条件加热物体的适当的加热条件。

    SUBSTRATE DETECTION DEVICE AND SUBSTRATE CONVEYANCE APPARATUS
    4.
    发明申请
    SUBSTRATE DETECTION DEVICE AND SUBSTRATE CONVEYANCE APPARATUS 有权
    基板检测装置和基板输送装置

    公开(公告)号：US20100309484A1

    公开(公告)日：2010-12-09

    申请号：US12864785

    申请日：2009-01-14

    申请人： Shuzo Yagi ,  Masao Nakane ,  Yoshinori Isobata

    发明人： Shuzo Yagi ,  Masao Nakane ,  Yoshinori Isobata

    IPC分类号： G01B11/14

    CPC分类号： H01L21/67259 ,  B65G49/064 ,  H01L21/67706

    摘要： An object is to provide a substrate conveyance apparatus and a substrate detection device capable of improving flexibility in arrangement layout.The substrate detection device includes a projector 41 for projecting inspection light 40 so as to pass through a predetermined position on a path of a substrate 4 conveyed by conveyance belts 26, a light receiver 42 for receiving the inspection light 40 projected by the projector 41, and a detector (a control device 15) for detecting that the substrate 4 reaches the predetermined position based on a decrease in the amount of received light of the inspection light 40 received by the light receiver 42 when the substrate 4 conveyed by the conveyance belts 26 reaches the predetermined position and a portion of the inspection light 40 is blocked by the substrate 4. The inspection light 40 is projected from the projector 41 so as to include opposite ends of a width direction of the conveyance belts 26 in an optical path of the inspection light in a direction orthogonal to a conveyance direction of the substrate 4 conveyed by the conveyance belts 26 and the light receiver 42 receives the inspection light passing through upper and lower regions of the conveyance belts 26 in the width direction.

    摘要翻译： 本发明的目的是提供一种能够提高布置布局的灵活性的基板输送装置和基板检测装置。 基板检测装置包括：投影仪41，其用于突出检测光40，以通过由传送带26传送的基板4的路径上的预定位置，用于接收由投影仪41投射的检查光40的光接收器42; 以及检测器（控制装置15），用于基于当由传送带26传送的基板4时基板4接收到的检查光40的接收光量的下降而检测到基板4到达预定位置 到达预定位置，并且检查光40的一部分被基板4阻挡。检查光40从投影仪41突出，以包括传送带26的宽度方向的相对端在光路 在与由传送带26和光接收器42传送的基板4的传送方向正交的方向上的检查光接收插入件 分光穿过传送带26的宽度方向的上下区域。