Apparatus for judging target to be temperature-regulated
    1.
    发明申请
    Apparatus for judging target to be temperature-regulated 失效
    用于判断目标温度调节的装置

    公开(公告)号:US20060191897A1

    公开(公告)日:2006-08-31

    申请号:US11191971

    申请日:2005-07-29

    申请人: Yoshiyuki Hozumi

    发明人: Yoshiyuki Hozumi

    IPC分类号: H05B1/02

    CPC分类号: H01L21/67288 H01L21/67253

    摘要: Between a characteristic a of a process chamber 21a having a large pressure loss and a characteristic b of a process chamber 21b having a small pressure loss, threshold value A (flow rate value Q3, pressure value P3) is set on the characteristic a. The threshold value A is set on a controller 9. When a rotation speed of a pump 3 is increased by an electric motor 8, the flow rate of a fluid flowing through pipelines 1, 2 and a flow path of a process chamber 21 increases. At the time, the flow rate of the fluid is measured by a flowmeter 4 and a pressure of the fluid is measured by a pressure switch 5. If the pressure reaches the pressure value P3 when the flow rate of the fluid reaches the flow rate value Q3, the pressure switch 5 operates. At the time, the controller 9 judges that the process chamber 21a having a large pressure loss is connected to the pipelines 1, 2. Meanwhile, if the pressure does not reach the pressure value P3 when the flow rate of the fluid reaches the flow rate value Q3, the pressure switch 5 does not operate. At the time, the controller 9 judges that the process chamber 21b having a small pressure loss is connected to the pipelines 1, 2.

    摘要翻译: 在具有较大压力损失的处理室21a的特性a和压力损失小的处理室21b的特性b之间设定阈值A(流量值Q 3,压力值P 3) 特征a。 阈值A被设置在控制器9上。 当通过电动机8增加泵3的转速时,流过管道1,2的流体和处理室21的流路的流量增加。 此时,通过流量计4测量流体的流量,通过压力开关5测量流体的压力。 当流体流量达到流量值Q 3时压力达到压力值P 3时,压力开关5动作。 此时,控制器9判断出具有大的压力损失的处理室21a连接到管道1,2。 同时,当流体流量达到流量值Q 3时压力未达到压力值P 3时,压力开关5不工作。 此时,控制器9判断具有小的压力损失的处理室21b连接到管道1,2。

    Apparatus for judging target to be temperature-regulated
    4.
    发明授权
    Apparatus for judging target to be temperature-regulated 失效
    用于判断目标温度调节的装置

    公开(公告)号:US07364095B2

    公开(公告)日:2008-04-29

    申请号:US11191971

    申请日:2005-07-29

    申请人: Yoshiyuki Hozumi

    发明人: Yoshiyuki Hozumi

    IPC分类号: G05D23/00 G01R31/26

    CPC分类号: H01L21/67288 H01L21/67253

    摘要: Between a characteristic a of a process chamber 21a having a large pressure loss and a characteristic b of a process chamber 21b having a small pressure loss, threshold value A (flow rate value Q3, pressure value P3) is set on the characteristic a. The threshold value A is set on a controller 9. When a rotation speed of a pump 3 is increased by an electric motor 8, the flow rate of a fluid flowing through pipelines 1, 2 and a flow path of a process chamber 21 increases. At the time, the flow rate of the fluid is measured by a flowmeter 4 and a pressure of the fluid is measured by a pressure switch 5. If the pressure reaches the pressure value P3 when the flow rate of the fluid reaches the flow rate value Q3, the pressure switch 5 operates. At the time, the controller 9 judges that the process chamber 21a having a large pressure loss is connected to the pipelines 1, 2. Meanwhile, if the pressure does not reach the pressure value P3 when the flow rate of the fluid reaches the flow rate value Q3, the pressure switch 5 does not operate. At the time, the controller 9 judges that the process chamber 21b having a small pressure loss is connected to the pipelines 1, 2.

    摘要翻译: 在具有较大压力损失的处理室21a的特性a和压力损失小的处理室21b的特性b之间设定阈值A(流量值Q 3,压力值P 3) 特征a。 阈值A被设置在控制器9上。 当通过电动机8增加泵3的转速时,流过管道1,2的流体和处理室21的流路的流量增加。 此时,通过流量计4测量流体的流量,通过压力开关5测量流体的压力。 当流体流量达到流量值Q 3时压力达到压力值P 3时,压力开关5动作。 此时,控制器9判断出具有大的压力损失的处理室21a连接到管道1,2。 同时,当流体流量达到流量值Q 3时压力未达到压力值P 3时,压力开关5不工作。 此时,控制器9判断具有小的压力损失的处理室21b连接到管道1,2。