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    Resist composition and patterning process
    3.
    发明授权
    Resist composition and patterning process 有权
    抗蚀剂组成和图案化工艺

    公开(公告)号：US06869748B2

    公开(公告)日：2005-03-22

    申请号：US10611881

    申请日：2003-07-03

    申请人： Takanobu Takeda ,  Osamu Watanabe

    发明人： Takanobu Takeda ,  Osamu Watanabe

    IPC分类号： G03F7/027 ,  C08F20/26 ,  C08F212/04 ,  G03F7/039 ,  H01L21/027 ,  G03F7/004

    CPC分类号： G03F7/0392 ,  Y10S430/118 ,  Y10S430/143

    摘要： Resist compositions comprising as the base resin a polymer using an alkoxyalkyl (meth)acrylate as a reactive group which is decomposable under the action of an acid to increase solubility in alkali have advantages including a practical level of shelf stability, a significantly enhanced contrast of alkali dissolution rate before and after exposure, a high sensitivity, and a high resolution over a wide baking temperature range. The compositions are best suited as a chemically amplified positive resist material for micropatterning in the manufacture of VLSI.

    摘要翻译： 包含作为基础树脂的抗蚀剂组合物使用（甲基）丙烯酸烷氧基烷基酯作为反应性基团的聚合物，其在酸的作用下可分解以增加在碱中的溶解度，其优点包括实际的贮存稳定性水平，显着提高碱的对比度 曝光前后的溶出速率，高灵敏度，以及较宽的烘烤温度范围内的高分辨率。 该组合物最适合用作VLSI制造中用于微图案化学的化学放大正性抗蚀剂材料。

    Process for producing hyperbranched polymers
    4.
    发明授权
    Process for producing hyperbranched polymers 失效
    制备超支化聚合物的方法

    公开(公告)号：US5986020A

    公开(公告)日：1999-11-16

    申请号：US906140

    申请日：1997-08-05

    申请人： J. David Campbell ,  Fouad Teymour

    发明人： J. David Campbell ,  Fouad Teymour

    IPC分类号： C08F2/01 ,  B01J19/24 ,  C08F2/00 ,  C08F2/02 ,  C08F212/04 ,  C08F36/00 ,  C08G85/00

    CPC分类号： C08F212/04 ,  B01J19/2465 ,  C08F2/02 ,  B01J2219/0006 ,  B01J2219/00094 ,  B01J2219/00164

    摘要： A method is provided for producing hyperbranched polymers comprising heating a polymerizable reaction charge comprising (a) a monomer mixture comprising 50-99.1% by weight of at least one monoethylenically unsaturated monomer and 0.1-50% by weight of one or more multiethylenically unsaturated monomers and (b) if at least one ethylenically unsaturated monomer of the monomer mixture is not a thermally initiating monomer, a free radical polymerization initiator, to a temperature in the range from about 250.degree. C. to about 400.degree. C. in a continuous reactor which allows mixing of the reactor contents for a residence time of from about 2 minutes to about 60 minutes, provided that if the total amount of multiethylenically unsaturated monomer is less than 3% by weight of the monomer mixture than at least one of said one or more multiethylenically unsaturated monomers must be tri- or greater ethylenically unsaturated. The hyperbranched polymers prepared by this process are also described.

    摘要翻译： 提供了一种用于生产超支化聚合物的方法，其包括加热可聚合反应进料，其包含（a）包含50-99.1重量％的至少一种单烯属不饱和单体和0.1-50重量％的一种或多种多烯属不饱和单体的单体混合物， （b）如果单体混合物的至少一种烯属不饱和单体不是热引发单体，即自由基聚合引发剂，在连续反应器中在约250℃至约400℃的温度范围内 允许反应器内容物的混合停留时间为约2分钟至约60分钟，条件是如果多烯键式不饱和单体的总量小于单体混合物的总量，而不是所述一种或多种 多烯属不饱和单体必须是三或更多的烯属不饱和单体。 还描述了通过该方法制备的超支化聚合物。

    Additives for controlling cure rate of polymerizable composition
    6.
    发明授权
    Additives for controlling cure rate of polymerizable composition 失效
    用于控制可聚合组合物固化速率的添加剂

    公开(公告)号：US5859160A

    公开(公告)日：1999-01-12

    申请号：US781555

    申请日：1997-01-09

    申请人： Robin F. Righettini ,  Kirk J. Abbey

    发明人： Robin F. Righettini ,  Kirk J. Abbey

    IPC分类号： C09J4/00 ,  C08F212/04 ,  C08F279/02 ,  C08F290/04 ,  C09J4/06 ,  C08F12/06 ,  C09J4/02

    CPC分类号： C08F279/02 ,  C08F212/04 ,  C08F290/048 ,  C09J4/06 ,  Y10S525/939

    摘要： A free radical curable composition that includes a free radical curable and a vinyl aromatic compound that is chemically different than the free radical curable component, wherein the vinyl aromatic compound is present in an amount sufficient to decelerate the cure rate of the free radical composition without adversely effecting completion of cure and the properties of the curable composition after it has cured. The composition is particularly useful as a two part adhesive that includes a free radical catalyst system and a diene elastomer.

    摘要翻译： 一种自由基固化性组合物，其包含与所述自由基可固化组分化学不同的自由基可固化和乙烯基芳族化合物，其中所述乙烯基芳族化合物的存在量足以减少所述自由基组合物的固化速率，而不会有不利影响 可固化组合物固化后的固化和固化性能的实现。 该组合物特别可用作包括自由基催化剂体系和二烯弹性体的两部分粘合剂。

    Soluble crosslinkable copolymers based on vinyl ester, vinyl aromatic and acrylate monomers, processes for their preparation and their use in coating agents
    7.
    发明授权
    Soluble crosslinkable copolymers based on vinyl ester, vinyl aromatic and acrylate monomers, processes for their preparation and their use in coating agents 失效
    基于乙烯基酯，乙烯基芳族和丙烯酸酯单体的可溶性交联共聚物，其制备方法及其在涂料中的应用

    公开(公告)号：US5763546A

    公开(公告)日：1998-06-09

    申请号：US861986

    申请日：1992-08-07

    申请人： Werner-Alfons Jung ,  Peter Hoffmann

    发明人： Werner-Alfons Jung ,  Peter Hoffmann

    IPC分类号： C08F2/06 ,  C08F8/00 ,  C08F20/26 ,  C08F20/32 ,  C08F20/52 ,  C08F26/06 ,  C08F212/00 ,  C08F212/04 ,  C08F212/08 ,  C08F218/04 ,  C08F220/04 ,  C08F220/06 ,  C08F220/10 ,  C08F220/18 ,  C08F220/28 ,  C08F220/32 ,  C08F220/56 ,  C08F222/06 ,  C08F226/06 ,  C08L63/00 ,  C09D125/00 ,  C09D125/08 ,  C09D125/14 ,  C09D133/04 ,  C09D133/08 ,  C08F279/00

    CPC分类号： C08F218/04 ,  C08F212/04 ,  C08F212/08 ,  C08F8/00 ,  C08L63/00

    摘要： The invention relates to copolymers containing on average 1.25 to 30 functional groups per molecule and a number average molecular weight of 1500 to 6000, which copolymers can be prepared by free-radical solution polymerization at 130.degree. to 200.degree. C. from 5 to 25% by weight of vinyl ester, 10 to 50% by weight of vinyl aromatic, 10 to 40% by weight of functional, monomers and, if desired further monomers, in which the vinyl ester is initially introduced and the remaining monomers are metered in for all monomers over a monomer addition period which is of the same length in the following manner: The amount of acrylate monomers added per unit of time remains constant. The amount of vinyl aromatic added over the first third of the monomer addition period is 15 to 30% by weight, the amount added over the second third is 25 to 40% by weight, and the amount added over the last third is 35 to 60% by weight, each relative to the total amount of vinyl aromatic. The copolymer obtained is, if desired, reacted with compounds containing a group which is reactive towards the functional groups of the copolymer and at least one crosslinkable group.

    摘要翻译： PCT No.PCT / EP90 / 02129 Sec。 371日期：1992年8月7日 102（e）日期1992年8月7日PCT 1990年12月7日PCT PCT。 出版物WO91 / 09888 日期1991年7月11日本发明涉及每分子平均含有1.25至30个官能团并且数均分子量为1500至6000的共聚物，该共聚物可通过在130℃至200℃的自由基溶液聚合制备。 5至25重量％的乙烯基酯，10至50重量％的乙烯基芳族化合物，10至40重量％的官能单体和如果需要的话，其中最初引入乙烯基酯的其它单体和剩余的单体 按照以下方式在相同长度的单体添加周期中对所有单体进行计量：每单位时间添加的丙烯酸酯单体的量保持恒定。 在单体添加周期的第一三分之内加入的乙烯基芳族化合物的量为15〜30重量％，第二次添加量为25〜40重量％，最后三次添加量为35〜60 重量％，相对于乙烯基芳族化合物的总量。 如果需要，所获得的共聚物与含有对共聚物和至少一个可交联基团的官能团具有反应性的基团的化合物反应。

    Unsaturated copolymer based on olefin and produciton and use thereof
    8.
    发明授权
    Unsaturated copolymer based on olefin and produciton and use thereof 失效
    基于烯烃的不饱和共聚物及其制备及其用途

    公开(公告)号：US5744566A

    公开(公告)日：1998-04-28

    申请号：US773592

    申请日：1996-12-27

    申请人： Toshiyuki Tsutsui ,  Masaaki Kawasaki

    发明人： Toshiyuki Tsutsui ,  Masaaki Kawasaki

    IPC分类号： C08F4/642 ,  C08F210/00 ,  C08F210/16 ,  C08F212/04 ,  C08L23/16 ,  C08F236/20

    CPC分类号： C08L23/083 ,  C08F210/00 ,  C08F212/04 ,  C08L23/16 ,  C08F210/16 ,  C08L2312/00

    摘要： An unsaturated copolymer based on olefin which is superior in dynamic fatigue resistance (flexural fatigue resistance), weatherability, fastness to ozone, stability in thermal aging and exhibits also superior performances in chemical reactivity, in processibility and in compatibility as well as co-vulcanizability with aromatic ring-containing resins, such as styrene-butadiene rubber (SBR) etc., and is useful for materials of various rubber products and as modifier for resin products is proposed, said copolymer comprising a structural unit derived from an .alpha.-olefin having 2-20 carbon atoms in a proportion of 30-99.8 mole %, a structural unit derived from an aromatic ring-containing vinyl monomer in a proportion of 0.1-60 mole % and a structural unit derived from a chain-formed non-conjugated triene or tetraene having in the molecule one vinyl group in a proportion of 0.1-10 mole % and said copolymer having an intrinsic viscosity determined in Decalin.RTM. at 135.degree. C. of 0.05-10 dl/g.

    摘要翻译： 基于烯烃的不饱和共聚物，其抗动态疲劳性（耐弯曲疲劳性），耐候性，耐臭氧性，热老化稳定性优异，并且在化学反应性，加工性和相容性方面也表现出优异的性能，以及与共混硫化性 提出了诸如苯乙烯 - 丁二烯橡胶（SBR）等芳香族环的树脂，并且可用于各种橡胶制品的材料和用作树脂产品的改性剂，所述共聚物包含衍生自具有2个碳原子的α-烯烃的结构单元 -20个碳原子，比例为30-99.8摩尔％，衍生自0.1-60摩尔％的含芳环的乙烯基单体的结构单元和衍生自链状非共轭三烯的结构单元或 四烯在分子中具有0.1-10摩尔％的一个乙烯基，所述共聚物在十氢化萘在135℃下测定的特性粘度为0.05-10dl / g 。

    Styrenic copolymer and process for producing same
    9.
    发明授权
    Styrenic copolymer and process for producing same 失效
    苯乙烯共聚物及其制备方法

    公开(公告)号：US5554695A

    公开(公告)日：1996-09-10

    申请号：US433966

    申请日：1995-05-04

    申请人： Shuji Machida ,  Toshinori Tazaki

    发明人： Shuji Machida ,  Toshinori Tazaki

    IPC分类号： C08F2/44 ,  C08F4/64 ,  C08F212/04 ,  C08F297/06

    CPC分类号： C08F212/04

    摘要： There are disclosed a styrenic copolymer which comprises at least one structural unit represented by the general formula (I) ##STR1## and a structural unit represented by the general formula (II) ##STR2## or a structural unit represented by the general formula (IX) ##STR3## wherein the symbols are each as previously defined in the specification, the structural unit (II) or (IX) being contained in an amount of 0.01 to 99.9 mol %; and a process for the production of the above copolymer.The above styrenic copolymer has a high degree of syndiotactic configuration in the stereoregularity of the main chain of the structural unit (I) as well as adhesivity and compatibility with a resin of a different type.

    摘要翻译： 公开了一种苯乙烯共聚物，其包含由通式（I）表示的至少一个结构单元（I）和由通式（II）表示的结构单元（II）或表示的结构单元 通式（IX）其中符号各自如说明书中先前定义，结构单元（II）或（IX）的含量为0.01至99.9mol％; 以及制备上述共聚物的方法。 上述苯乙烯共聚物在结构单元（I）的主链的立构规整性以及与不同类型的树脂的粘合性和相容性方面具有高程度的间同构型。

    .alpha.-olefin/para-alkylstyrene copolymers
    10.
    发明授权
    .alpha.-olefin/para-alkylstyrene copolymers 失效
    α-烯烃/对烷基苯乙烯共聚物

    公开(公告)号：US5543484A

    公开(公告)日：1996-08-06

    申请号：US341778

    申请日：1994-11-18

    申请人： T. C. Chung ,  H. L. Lu

    发明人： T. C. Chung ,  H. L. Lu

    IPC分类号： C08F8/00 ,  C08F210/00 ,  C08F210/02 ,  C08F212/04 ,  C08F212/14 ,  C08F257/02 ,  C08F290/04 ,  C08F293/00 ,  C08F212/08

    CPC分类号： C08F293/00 ,  C08F210/00 ,  C08F212/04 ,  C08F212/14 ,  C08F257/02 ,  C08F290/04 ,  C08F290/044 ,  C08F8/00 ,  C08F8/06 ,  C08F8/20 ,  C08F8/28 ,  C08F8/30 ,  C08F8/32 ,  C08F8/34 ,  C08F8/40 ,  C08F8/42 ,  C08F210/02 ,  C08F2800/10 ,  Y02P20/582

    摘要： Copolymers comprising poly(.alpha.-olefin) having at least few p-alkylstyrene (para-alkylstyrene) groups or/and p-alkylstyrene derivatives within the structure therein, said polymer having monomer units represented by the structural formula: ##STR1## in which R, R' and R" are, independently, either hydrogen, alkyl, or primary or secondary alkyls. Preferably, R is hydrogen and C.sub.1 to C.sub.10 linear and branched alkyl, and most preferably R is hydrogen, C.sub.1 and C.sub.2. R' and R" are hydrogen, C.sub.1 to C.sub.5 alkyl, or C.sub.1 to C.sub.5 primary or secondary alkyl, and most preferably R' and R" are hydrogen. F comprises a hydrogen or a functional group, such as --COOH, --OH, --NH.sub.2, --Cl, --Br, --M, --COOM (M=metals, e.g. Li, Na, K and Ca) etc., or a mixture of functional group and hydrogen. In the copolymer composition, the .alpha.-olefin mole % (m) is between about 5 and 99.9. Preferably, m is between 85 and 99.9, and most preferably m is between 95 and 99.9. The sum of m and n (mole % of p-alkylstyrene) is 100. The copolymer having a number average molecular weight (Mn) of at least about 1,000, and preferably at least about 10,000. The copolymers also preferably have a ratio of weight average molecular weight (Mw) to number average molecular weight, or Mw/Mn of less than about 8, more preferably less than about 4, most preferably less than about 2.5.Also disclosed are polymerization process, involving transition metal catalysts (especially metallocene compounds with constrained ligand geometry) for producing .alpha.-olefin/p-alkylstyrene copolymers, and subsequently derivatization processes for producing functionalized copolymers of .alpha.-olefin and p-alkylstyrene by the functionalization of benzylic protons in p-alkylstyrene units of copolymer.

    摘要翻译： 包含在其结构内具有至少几个对烷基苯乙烯（对烷基苯乙烯）基团或/和对烷基苯乙烯衍生物的聚（α-烯烃）的共聚物，所述聚合物具有由结构式表示的单体单元：其中R R'和R“独立地是氢，烷基或伯或仲烷基。 优选地，R是氢和C1-C10直链和支链烷基，最优选R是氢，C1和C2。 R'和R“为氢，C1至C5烷基或C1至C5伯或仲烷基，最优选R'和R”为氢。 F包括氢或官能团，例如-COOH，-OH，-NH 2，-Cl，-Br，-M，-COOM（M =金属，例如Li，Na，K和Ca）等，或 官能团和氢的混合物。 在共聚物组合物中，α-烯烃摩尔％（m）为约5至99.9。 优选地，m在85和99.9之间，最优选m在95和99.9之间。 m和n（对烷基苯乙烯的摩尔％）的总和为100.数均分子量（Mn）为至少约1,000，优选至少约10,000的共聚物。 共聚物还优选具有小于约8，更优选小于约4，最优选小于约2.5的重均分子量（Mw）与数均分子量或Mw / Mn的比率。 还公开了聚合方法，包括用于生产α-烯烃/对烷基苯乙烯共聚物的过渡金属催化剂（特别是具有约束配体几何形状的茂金属化合物），以及随后通过官能化官能化制备α-烯烃和对 - 烷基苯乙烯的官能化共聚物的衍生方法 共聚物对苯基苯乙烯单元中的苄基质子。